• Korean Chemical Engineering Research
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• 제46권2호
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• pp.389-396
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• 2008

벤조시클로부텐(benzocyclobutene; BCB)과 플라즈마 화학기상증착(PECVD)된 산화규소막이 코팅된 웨이퍼들 사이의 계면에서, 고온 열순환 공정에 의한 잔류응력 및 본딩 결합력의 효과를 4점 굽힙시험법과 웨이퍼 곡률 측정법에 의해 평가하였다. 이를 위해 웨이퍼들은 사전에 확립된 표준 본딩공정에 의거하여 본딩하였으며 이들 웨이퍼에 대한 열순환 공정은 상온으로부터 최대 순환온도 사이에서 수행하였다. 최대 온도 350 및 $400^{\circ}C$에서 수행한 열순환 공정에서, 본딩 결합력은 첫번째 순환공정 동안 크게 증가하는 데, 이는 순환공정 시 발생하는 산화규소막의 축합 반응에 의한 잔류응력 감소 때문인 것으로 분석되었다. 이러한 산화규소막의 잔류응력이 감소함에 따라 BCB와 산화규소막으로 구성된 다층막의 잔류응력에 의해 변형되는 에너지는 상승하였고 따라서 BCB와 산화규소막 사이 다층막의 의 본딩 결합력은 증가하였다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
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• pp.5-18
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• 1996

The solid state cesium ion source os alumino-silicate based zeolite which contains cerium. The material is an ionic conductor. Cesiums are stably stored in the material and one can extract the cesiums by applying electric field across the electrolyte. Cesium ion bombardment has the unique property of producing high negative ion yield. This ion source is used as the primary source for the production of a negative ion without any gas discharge or the need for a carrier gas. The deposition of materials as an ionic species in the energy range of 1.0 to 300eV is recently recognized as a very promising new thin film technique. This energetic non-thermal equilibrium deposition process produces films by “Kinetic Bonding / Energetic Condensation" mechansim not governed by the common place thermo-mechanical reaction. Under these highly non-equilibrium conditions meta-stable materials are realized and the negative ion is considered to be an optimum paeticle or tool for the purpose. This process differs fundamentally from the conventional ion beam assisted deposition (IBAD) technique such that the ion beam energy transfer to the deposition process is directly coupled the process. Since cesium ion beam sputter deposition process is forming materials with high kinetic energy of metal ion beams, the process provider following unique advantages:(1) to synthesize non thermal-equilibrium materials, (2) to form materials at lower processing temperature than used for conventional chemical of physical vapor deposition, (3) to deposit very uniform, dense, and good adhesive films (4) to make higher doposition rate, (5) to control the ion flux and ion energy independently. Solid state cesium ion beam sputter deposition system has been developed. This source is capable of producing variety of metal ion beams such as C, Si, W, Ta, Mo, Al, Au, Ag, Cr etc. Using this deposition system, several researches have been performed. (1) To produce superior quality amorphous diamond films (2) to produce carbon nitirde hard coatings(Carbon nitride is a new material whose hardness is comparable to the diamond and also has a very high thermal stability.) (3) to produce cesiated amorphous diamond thin film coated Si surface exhibiting negative electron affinity characteristics. In this presentation, the principles of solid state cesium ion beam sputter deposition and several applications of negative metal ion source will be introduced.

• 한국생산제조학회지
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• 제24권4호
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• pp.469-474
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• 2015

In ultrasonic spray pyrolysis deposition, a precursor solution is evaporated by an ultrasonic atomizer, then gas-carried into a furnace where the solute is separated from the water vapor. After condensation, polymerization, and nucleation, the solute oxide forms a thin film. To improve the deposition efficiency, the ultrasonic atomizer was studied to optimize the evaporated gas flow. The vat cover was redesigned, using three versions with different inlet factors being tested through a computational fluid dynamic analysis as well as a water evaporation experiment. The atomization rate with a hemispherical cover with a $30^{\circ}$ inlet was found to be 2.4 times higher than that with the original. This improvement was verified with fluorine-doped tin oxide spray pyrolysis deposition. The film obtained with the modified vat cover was 2.4 times thicker than that obtained with the original vat cover.

• 전자공학회논문지A
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• 제31A권7호
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• pp.85-94
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• 1994

A high-resolution transmission electron microscopy study of the solid phase crystallization of the amorphous silicon thin films, deposited on SiOS12T at 52$0^{\circ}C$ by low pressure chemical vapor deposition and annealed at 55$0^{\circ}C$ in a dry N$_{2}$ ambient was carried out so that the arrangement of atoms in the crystalline silicon and at the amorphous/crystalline interface of the growing grains could be understood on an atomic level. Results show that circular crystalline silicon nuclei have formed and then the grains grow to an elliptical or dendritic shape. In the interior of all the grains many twins whose{111} coherent boundaries are parallel to the long axes of the grains are observed. From this result, it is concluded that the twins enhance the preferential grain growth in the <112> direction along {111} twin planes. In addition to the twins. many defect such as intrinsic stacking faults, extrinsic stacking faults, and Shockley partial dislocations, which can be formed by the errors in the stacking sequence or by the dissociation of the perfect dislocation are found in the silicon grain. But neither frank partial dislocations which can be formed by the condensation of excess silicon atoms or vacancies and can form stacking fault nor perfect dislocations which can be formed by the plastic deformation are observed. So it is concluded that most defects in the silicon grain are formed by the errors in the stacking sequence during the crystallization process of the amorphous silicon thin films.

• 한국수소및신에너지학회논문집
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• 제28권3호
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• pp.238-245
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• 2017

Mg-Ni nanoparticles were synthesized by a physical vapor condensation method (DC arc-discharge) in a mixture of argon and hydrogen atmosphere, using compressed mixture of micro powders as the raw materials. The crystal phases, morphology, and microstructures of nanoparticles were analyzed by means of X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). It was found that the intermetallic compounds of $Mg_2Ni$ and $Mg_2Ni$ formed with existence of phases of Mg, Ni, and MgO in Mg-Ni nanoparticles. After one cycle of hydrogen absorption/desorption process (activation treatment), Mg-Ni nanoparticles exhibited excellent hydrogen absorption properties. $Mg_2Ni$ phase became the main phase by aphase transformation during the hydrogen treatments. The phenomenon of refinement of grain size in the nanoparticle was also observed after the hydrogen absorption/desorption processes, which was attributed to the effect of volume expansion/shrinkage and subsequent break of nanoparticles. Maximum hydrogen absorption contents are 1.75, 2.21 and 2.77 wt.% at 523, 573 and 623 K, respectively.

• 한국안전학회지
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• 제30권6호
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• pp.48-55
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• 2015

A variety of safety issues were investigated for chemical reactors using a toluene solvent in case of a fire at small to middle scale chemical plants. The issues covered the operation of pressure-relieving valves and the subsequent discharges of the toluene to the atmosphere either directly or through an absorber, which represent the current practice at most small chemical plants. It was shown that the safety valve on the reactor may not operate within about twenty minutes after an external fire breaks out, but, once relieved, the toluene vapor released directly to the atmosphere may form a large explosion range on the ground. It was also shown that if the discharge is routed to an existing absorber used for the scrubbing of volatile organic compounds or dusts, the column may not operate normally due to excessive pressure drops or flooding, resulting in the hazardous release of toluene vapors. This study proposed two ways of alleviating these risks. The first is to ruduce the discharge itself from the safety valve by using adequate insulation and protection covers on the reactor and then introduce it into the circulation water at the bottom of the absorber through a dip linet pipe equipped with a ring-shaped sparger. This will enhance the condensation of toluene vapors with the reduced effluent vapors treated in the packing layers above. The second is to install a separate quench drum to condense the routed toluene vapors more effectively than the existing absorber.

• 한국대기환경학회지
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• 제28권1호
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• pp.39-51
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• 2012

Aerosol slurry samples were collected in 60-min interval using Korean Semi-continuous Elements in Aerosol Sampler (KSEAS) between May 19 and June 6, 2010 at an urban site of Gwangju. The $PM_{2.5}$ samples were collected with a flow rate of 16.7 L/min and particles are grown by condensation of water vapor in a condenser maintained at ${\sim}5^{\circ}C$ after saturation by direct injection of steam. The resulting droplets are collected in a liquid slurry with a airdroplet separator. Concentrations of 16 elements (Al, Fe, Mn, Ca, K, Cu, Zn, Pb, Cd, Cr, Ti, V, Ni, Co, As, Se) in the collected slurry samples were determined off-line by ICP-MS. KSEAS sample analysis encompassed the sampling periods for which 24-hr average elemental species concentrations were calculated for comparison with those derived from 24-hr integrated filter samples. Relationship between elemental species measured by two methods indicated high correlation coefficients (r), mostly greater than r of 0.80. However, we note that concentrations of Al, K, Ca, Mn, and Fe, which are often associated with crustal elemental particles, in the KSEAS samples, were substantially lower (1.4~11 times) than those found in the typical filter-based samples. This discrepancy is probably due to difficulties in transferring insoluble dust particles to the collection vials in the KSEAS. Temporal profiles of elemental concentrations indicate that some transient events in their concentrations are observed over the sampling periods. For the elemental species studied, atmospheric concentrations during the transient events increased by factors of 4 in Mn~80 in Zn, compared to their background levels. Principle component analyses were applied to the hourly KSEAS data sets to identify sources affecting the concentrations of the metal constituents observed. In this study, we conclude that hourly measurements for particle-bound elemental constituents were extremely useful for revealing the short-term variability in their concentrations and developing insights into their sources.

• Journal of Biosystems Engineering
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• 제30권2호
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• pp.102-109
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• 2005

Water consumption at the farm is up to 48 percent of water resource of South Korea while manufacturing industry's is only $9.6\%$. The area of arable land is 2,077,067 ha and 27 percent of it is used for growing fruits and vegetables using furrow or surface irrigation at the greenhouse. Surface irrigation at the greenhouse for fruits and vegetables has problems such as over watering and insufficient supply of water to the fine roots of the plant. However, the research on the new method of irrigation to save water usage is few. The characteristics of soil wetting was measured for using surface irrigation and underground trickle irrigation method where water was supplied at 10, 15, 20, and 25 cm beneath the surface ground. Followings are summary of this study. 1. The efficiency of underground trickle irrigation was expected to be as high as twice of surface irrigation such as drip watering or sprinkling. 2. This improvement could be possible by using less than $50\%$ of irrigation water than surface irrigation to supply similar amount of water near fine roots. 3. Surface irrigation causes soil compaction as deep as 20 cm below the surface ground which reduces soil porosity and root respiration ending up developing less fine roots. 4. Underground trickle irrigation can prevent overdamping in the greenhouse since it does not over wet the surface soil. At winter, the amount of agricultural chemical usage could be reduced since this irrigation method does not develop blight or crop disease from condensation of water vapor.

• 한국세라믹학회지
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• 제41권7호
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• pp.555-559
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• 2004

폴리실록산 고분자의 자가 발포과정을 이용하여 세라믹 다공질체를 제조하였다. 고분자가 가교반응을 하는 과정에서 발생하는 물과 알콜 증기를 이용하면 고분자 용융액 내에 기공을 형성할 수 있다. 세라믹 다공질체 내의 기공의 크기와 모양은 고분자 용융액의 점도에 따라 크게 달라진다. 충진제인 A1$_2$O$_3$ 함량이 증가하면 기공 크기는 감소하며 이는 A1$_2$O$_3$의 입자크기가 감소하여도 비슷한 양상을 보였다. 고분자 용융액의 점도는 고분자의 가교반응정도에 따라서도 영향을 받는다. 발포 전에 13$0^{\circ}C$에서 열처리를 하면 점도는 증가하며 다공질체의 기공 안정성은 증가한다. 제조된 세라믹 다공질체의 밀도와 압축강도는 발포과정에서의 승온속도에 따라 다른 값을 보였다.

• 한국환경과학회지
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• 제29권11호
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• pp.1065-1078
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• 2020

The statistical characteristics of aerosol-cloud interactions over East Asia were investigated using Moderate Resolution Imaging Spectroradiometer satellite data. The long-term relationship between various aerosol and cloud parameters was estimated using correlation analysis, principle component analysis, and Aerosol Indirect Effect (AIE) estimation. In correlation analysis, Aerosol Optical Depth (AOD) was positively Correlated with Cloud Condensation Nuclei (CCN) and Cloud Fraction (CF), but negatively correlated with Cloud Top Temperature (CTT) and Cloud Top Pressure (CTP). Fine Mode Fraction (FMF) and CCN were positively correlated over the ocean because of sea spray. In principle component analysis, AOD and FMF were influenced by water vapor. In particular, AOD was positively influenced by CF, and negatively by CTT and CTP over the ocean. In AIE estimation, the AIE value in each cloud layer and type was mostly negative (Twomey effect) but sometimes positive (anti-Twomey effect). This is related to regional, environmental, seasonal, and meteorological effects. Rigorous and extensive studies on aerosol-cloud interactions over East Asia should be conducted via micro- and macro-scale investigations, to determine chemical characteristics using various meteorological instruments.