• Title/Summary/Keyword: Vapor Condensation

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A Study on the Effects of High Temperature Thermal Cycling on Bond Strength at the Interface between BCB and PECVD SiO2 Layers (고온 열순환 공정이 BCB와 PECVD 산화규소막 계면의 본딩 결합력에 미치는 영향에 대한 연구)

  • Kwon, Yongchai;Seok, Jongwon;Lu, Jian-Qiang;Cale, Timothy S.;Gutmann, Ronald J.
    • Korean Chemical Engineering Research
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    • v.46 no.2
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    • pp.389-396
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    • 2008
  • The effect of thermal cycling on bond strength and residual stress at the interface between benzocyclobutene (BCB) and plasma enhanced chemical vapor deposited (PECVD) silicon dioxide ($SiO_2$) coated silicon wafers were evaluated by four point bending and wafer curvature techniques. Wafers were bonded using a pre-established baseline process. Thermal cycling was done between room temperature and a maximum peak temperature. In thermal cycling performed with 350 and $400^{\circ}C$ peak temperature, the bond strength increased substantially during the first thermal cycle. The increase in bond strength is attributed to the relaxation in residual stress by the condensation reaction of the PECVD $SiO_2$: this relaxation leads to increases in deformation energy due to residual stress and bond strength.

Solid State Cesium Ion Beam Sputter Deposition

  • Baik, Hong-Koo
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.5-18
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    • 1996
  • The solid state cesium ion source os alumino-silicate based zeolite which contains cerium. The material is an ionic conductor. Cesiums are stably stored in the material and one can extract the cesiums by applying electric field across the electrolyte. Cesium ion bombardment has the unique property of producing high negative ion yield. This ion source is used as the primary source for the production of a negative ion without any gas discharge or the need for a carrier gas. The deposition of materials as an ionic species in the energy range of 1.0 to 300eV is recently recognized as a very promising new thin film technique. This energetic non-thermal equilibrium deposition process produces films by “Kinetic Bonding / Energetic Condensation" mechansim not governed by the common place thermo-mechanical reaction. Under these highly non-equilibrium conditions meta-stable materials are realized and the negative ion is considered to be an optimum paeticle or tool for the purpose. This process differs fundamentally from the conventional ion beam assisted deposition (IBAD) technique such that the ion beam energy transfer to the deposition process is directly coupled the process. Since cesium ion beam sputter deposition process is forming materials with high kinetic energy of metal ion beams, the process provider following unique advantages:(1) to synthesize non thermal-equilibrium materials, (2) to form materials at lower processing temperature than used for conventional chemical of physical vapor deposition, (3) to deposit very uniform, dense, and good adhesive films (4) to make higher doposition rate, (5) to control the ion flux and ion energy independently. Solid state cesium ion beam sputter deposition system has been developed. This source is capable of producing variety of metal ion beams such as C, Si, W, Ta, Mo, Al, Au, Ag, Cr etc. Using this deposition system, several researches have been performed. (1) To produce superior quality amorphous diamond films (2) to produce carbon nitirde hard coatings(Carbon nitride is a new material whose hardness is comparable to the diamond and also has a very high thermal stability.) (3) to produce cesiated amorphous diamond thin film coated Si surface exhibiting negative electron affinity characteristics. In this presentation, the principles of solid state cesium ion beam sputter deposition and several applications of negative metal ion source will be introduced.

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Improvement of Deposition Performance of Ultrasonic Spray Pyrolysis Deposition System through Atomizer Shape Modification (분무장치 형상 변경을 통한 초음파 열분해 증착 시스템의 증착 성능 개선)

  • Kim, Kyu-Eon;Lee, Jae-Hoo;Jeon, Jae-Keon;Park, Sung-Hwan;Lee, Chibum
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.4
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    • pp.469-474
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    • 2015
  • In ultrasonic spray pyrolysis deposition, a precursor solution is evaporated by an ultrasonic atomizer, then gas-carried into a furnace where the solute is separated from the water vapor. After condensation, polymerization, and nucleation, the solute oxide forms a thin film. To improve the deposition efficiency, the ultrasonic atomizer was studied to optimize the evaporated gas flow. The vat cover was redesigned, using three versions with different inlet factors being tested through a computational fluid dynamic analysis as well as a water evaporation experiment. The atomization rate with a hemispherical cover with a $30^{\circ}$ inlet was found to be 2.4 times higher than that with the original. This improvement was verified with fluorine-doped tin oxide spray pyrolysis deposition. The film obtained with the modified vat cover was 2.4 times thicker than that obtained with the original vat cover.

A High-Resolution Transmission Electron Microscopy Study of the Grain Growth of the Crystalline Silicon in Amorphous Silicon Thin Films (비정질 실리콘 박막에서 결정상 실리콘의 입자성장에 관한 고분해능 투과전자현미경에 의한 연구)

  • 김진혁;이정용;남기수
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.7
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    • pp.85-94
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    • 1994
  • A high-resolution transmission electron microscopy study of the solid phase crystallization of the amorphous silicon thin films, deposited on SiOS12T at 52$0^{\circ}C$ by low pressure chemical vapor deposition and annealed at 55$0^{\circ}C$ in a dry N$_{2}$ ambient was carried out so that the arrangement of atoms in the crystalline silicon and at the amorphous/crystalline interface of the growing grains could be understood on an atomic level. Results show that circular crystalline silicon nuclei have formed and then the grains grow to an elliptical or dendritic shape. In the interior of all the grains many twins whose{111} coherent boundaries are parallel to the long axes of the grains are observed. From this result, it is concluded that the twins enhance the preferential grain growth in the <112> direction along {111} twin planes. In addition to the twins. many defect such as intrinsic stacking faults, extrinsic stacking faults, and Shockley partial dislocations, which can be formed by the errors in the stacking sequence or by the dissociation of the perfect dislocation are found in the silicon grain. But neither frank partial dislocations which can be formed by the condensation of excess silicon atoms or vacancies and can form stacking fault nor perfect dislocations which can be formed by the plastic deformation are observed. So it is concluded that most defects in the silicon grain are formed by the errors in the stacking sequence during the crystallization process of the amorphous silicon thin films.

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Formation and Hydrogen Absorption Properties of Intermetallic Mg-Ni Compound Nanoparticles (Mg-Ni 금속 간 화합물 나노입자의 형성과 수소저장 특성)

  • BAE, YOOGEUN;HWANG, CHULMIN;KIM, JONGSOO;DONG, XING LONG;KIM, SEWOONG;JUNG, YOUNGUAN
    • Transactions of the Korean hydrogen and new energy society
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    • v.28 no.3
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    • pp.238-245
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    • 2017
  • Mg-Ni nanoparticles were synthesized by a physical vapor condensation method (DC arc-discharge) in a mixture of argon and hydrogen atmosphere, using compressed mixture of micro powders as the raw materials. The crystal phases, morphology, and microstructures of nanoparticles were analyzed by means of X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). It was found that the intermetallic compounds of $Mg_2Ni$ and $Mg_2Ni$ formed with existence of phases of Mg, Ni, and MgO in Mg-Ni nanoparticles. After one cycle of hydrogen absorption/desorption process (activation treatment), Mg-Ni nanoparticles exhibited excellent hydrogen absorption properties. $Mg_2Ni$ phase became the main phase by aphase transformation during the hydrogen treatments. The phenomenon of refinement of grain size in the nanoparticle was also observed after the hydrogen absorption/desorption processes, which was attributed to the effect of volume expansion/shrinkage and subsequent break of nanoparticles. Maximum hydrogen absorption contents are 1.75, 2.21 and 2.77 wt.% at 523, 573 and 623 K, respectively.

Review of Safety for Pressure-Relieving Systems of Small to Middle Scale Chemical Plants (중소규모 화학공장의 압력방출시스템에 대한 안전성 검토)

  • Yim, Ji-Pyo;Jin, Dae-Young;Ma, Byung-Chol;Kang, Sung-Ju;Chung, Chang-Bock
    • Journal of the Korean Society of Safety
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    • v.30 no.6
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    • pp.48-55
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    • 2015
  • A variety of safety issues were investigated for chemical reactors using a toluene solvent in case of a fire at small to middle scale chemical plants. The issues covered the operation of pressure-relieving valves and the subsequent discharges of the toluene to the atmosphere either directly or through an absorber, which represent the current practice at most small chemical plants. It was shown that the safety valve on the reactor may not operate within about twenty minutes after an external fire breaks out, but, once relieved, the toluene vapor released directly to the atmosphere may form a large explosion range on the ground. It was also shown that if the discharge is routed to an existing absorber used for the scrubbing of volatile organic compounds or dusts, the column may not operate normally due to excessive pressure drops or flooding, resulting in the hazardous release of toluene vapors. This study proposed two ways of alleviating these risks. The first is to ruduce the discharge itself from the safety valve by using adequate insulation and protection covers on the reactor and then introduce it into the circulation water at the bottom of the absorber through a dip linet pipe equipped with a ring-shaped sparger. This will enhance the condensation of toluene vapors with the reduced effluent vapors treated in the packing layers above. The second is to install a separate quench drum to condense the routed toluene vapors more effectively than the existing absorber.

Application of Semi-continuous Ambient Aerosol Collection System for Elemental Analysis (대기입자의 원소성분 배출특성연구를 위한 반-연속식 입자채취시스템 적용)

  • Park, Seung-Shik;Ko, Jae-Min;Lee, Dong-Soo
    • Journal of Korean Society for Atmospheric Environment
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    • v.28 no.1
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    • pp.39-51
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    • 2012
  • Aerosol slurry samples were collected in 60-min interval using Korean Semi-continuous Elements in Aerosol Sampler (KSEAS) between May 19 and June 6, 2010 at an urban site of Gwangju. The $PM_{2.5}$ samples were collected with a flow rate of 16.7 L/min and particles are grown by condensation of water vapor in a condenser maintained at ${\sim}5^{\circ}C$ after saturation by direct injection of steam. The resulting droplets are collected in a liquid slurry with a airdroplet separator. Concentrations of 16 elements (Al, Fe, Mn, Ca, K, Cu, Zn, Pb, Cd, Cr, Ti, V, Ni, Co, As, Se) in the collected slurry samples were determined off-line by ICP-MS. KSEAS sample analysis encompassed the sampling periods for which 24-hr average elemental species concentrations were calculated for comparison with those derived from 24-hr integrated filter samples. Relationship between elemental species measured by two methods indicated high correlation coefficients (r), mostly greater than r of 0.80. However, we note that concentrations of Al, K, Ca, Mn, and Fe, which are often associated with crustal elemental particles, in the KSEAS samples, were substantially lower (1.4~11 times) than those found in the typical filter-based samples. This discrepancy is probably due to difficulties in transferring insoluble dust particles to the collection vials in the KSEAS. Temporal profiles of elemental concentrations indicate that some transient events in their concentrations are observed over the sampling periods. For the elemental species studied, atmospheric concentrations during the transient events increased by factors of 4 in Mn~80 in Zn, compared to their background levels. Principle component analyses were applied to the hourly KSEAS data sets to identify sources affecting the concentrations of the metal constituents observed. In this study, we conclude that hourly measurements for particle-bound elemental constituents were extremely useful for revealing the short-term variability in their concentrations and developing insights into their sources.

Elect on Saving Water of Underground Trickle Irrigation (지중관수 방법에 의한 용수절감 효과)

  • Kim J. H.;Kim C. S.;Kim T. W.;Hong J. H.
    • Journal of Biosystems Engineering
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    • v.30 no.2 s.109
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    • pp.102-109
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    • 2005
  • Water consumption at the farm is up to 48 percent of water resource of South Korea while manufacturing industry's is only $9.6\%$. The area of arable land is 2,077,067 ha and 27 percent of it is used for growing fruits and vegetables using furrow or surface irrigation at the greenhouse. Surface irrigation at the greenhouse for fruits and vegetables has problems such as over watering and insufficient supply of water to the fine roots of the plant. However, the research on the new method of irrigation to save water usage is few. The characteristics of soil wetting was measured for using surface irrigation and underground trickle irrigation method where water was supplied at 10, 15, 20, and 25 cm beneath the surface ground. Followings are summary of this study. 1. The efficiency of underground trickle irrigation was expected to be as high as twice of surface irrigation such as drip watering or sprinkling. 2. This improvement could be possible by using less than $50\%$ of irrigation water than surface irrigation to supply similar amount of water near fine roots. 3. Surface irrigation causes soil compaction as deep as 20 cm below the surface ground which reduces soil porosity and root respiration ending up developing less fine roots. 4. Underground trickle irrigation can prevent overdamping in the greenhouse since it does not over wet the surface soil. At winter, the amount of agricultural chemical usage could be reduced since this irrigation method does not develop blight or crop disease from condensation of water vapor.

Ceramic Foams by the Self-Blowing of Polymer (고분자의 자체발포를 이용한 세라믹 다공질체)

  • 백종원;김득중
    • Journal of the Korean Ceramic Society
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    • v.41 no.7
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    • pp.555-559
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    • 2004
  • Ceramic foams were prepared by a self-blowing process of a polysiloxane with A1$_2$O$_3$ as a filler. The release of water and ethanol vapor during the condensation reaction of the polymer triggered the pores in the polymer melt. The size. interconnectivity and shape of the pores in the ceramic foams were strongly dependent on the viscosity of the polymer melt, which could be varied by the content and size oi the filler. When the content of the filler inceased and the size of the filler decreased. the size of the pores were decreased and the thickness between the pores were increased. In the addition, the viscosity of polymer melt increased by the pretreatment at 130$^{\circ}C$ for Ire intermolecular cross linking thereby stabilizing the foam structure. The density and compressive strength of the ceramic foams were affected by the heating rate during the blowing process.

Investigating Statistical Characteristics of Aerosol-Cloud Interactions over East Asia retrieved from MODIS Satellite Data (MODIS 위성 자료를 이용한 동아시아 에어로졸-구름의 통계적 특성)

  • Jung, Woonseon;Sung, Hyun Min;Lee, Dong-In;Cha, Joo Wan;Chang, Ki-Ho;Lee, Chulkyu
    • Journal of Environmental Science International
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    • v.29 no.11
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    • pp.1065-1078
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    • 2020
  • The statistical characteristics of aerosol-cloud interactions over East Asia were investigated using Moderate Resolution Imaging Spectroradiometer satellite data. The long-term relationship between various aerosol and cloud parameters was estimated using correlation analysis, principle component analysis, and Aerosol Indirect Effect (AIE) estimation. In correlation analysis, Aerosol Optical Depth (AOD) was positively Correlated with Cloud Condensation Nuclei (CCN) and Cloud Fraction (CF), but negatively correlated with Cloud Top Temperature (CTT) and Cloud Top Pressure (CTP). Fine Mode Fraction (FMF) and CCN were positively correlated over the ocean because of sea spray. In principle component analysis, AOD and FMF were influenced by water vapor. In particular, AOD was positively influenced by CF, and negatively by CTT and CTP over the ocean. In AIE estimation, the AIE value in each cloud layer and type was mostly negative (Twomey effect) but sometimes positive (anti-Twomey effect). This is related to regional, environmental, seasonal, and meteorological effects. Rigorous and extensive studies on aerosol-cloud interactions over East Asia should be conducted via micro- and macro-scale investigations, to determine chemical characteristics using various meteorological instruments.