• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.1-9
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• 2010

A dynamic flow system has been developed which can be used for vacuum gauge calibration by comparison method - a calibration method in which the reading of the gauge under calibration is compared to another calibrated vacuum gauge called the "secondary standard" - and other vacuum-related experiments. The chamber of the calibration system is pumped by a turbomolecular pump (TMP), backed by a scroll pump. As maximum acceptable pressure at the inlet of a TMP is 0.1 Pa, above which the TMP decelerates, the pumping speed decreases and it becomes more difficult to adjust pressure under such circumstances. In the present work, high pressures of up to 133 Pa have been generated in the chamber of the newly developed dynamic flow control system by installing a well-designed conductance-reducer in the by-pass line and, at the same time, operating the TMP in safe mode. In addition, the gas flow and pressure distribution within the chamber have been investigated for the entire pressure range (0.1 Pa ~ 133 Pa) while generating pressure dynamically. Maximum deviations in pressure (1.6 %) were observed at point C on the chamber, which is close to the gas inlet port on the top of the chamber.

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.403-410
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• 2009

Vacuum chambers have wide application for a variety of purposes such as material processing, vacuum gauge calibration, etc. As the dynamic pressure generated in such chamber is non-uniform, in many industrial as well as research processes, it is vital to know the non-uniform gas distribution with associated gas flow regimes and the ways of minimizing these pressure non-uniformities. In the present work, the behavior of gas flow in a vacuum chamber, during continuous gas flow, is described in the pressure range 0.1-133 Pa and the effect of baffle plate in minimizing the pressure non-uniformities is investigated. It was observed that maximum deviations in the pressure occur near the gas inlet point and that the effect of baffle plate in minimizing the pressure non-uniformities is more obvious in the transitional flow regime.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.308-308
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• 2009

• Journal of the Korean Vacuum Society
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• v.2 no.4
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• pp.480-485
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• 1993

Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.970-972
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• 2011

The vacuum chamber pressure was investigated according to the second throat exhaust diffuser entrance diameter. The sizes of diffuser entrance were changed three cases, and each case was computed by using CFD. Also in order to relatively compare the vacuum chamber pressure the Euler equation was adopted. According to the results, as the size of diffuser entrance was increased it was observed that the vacuum chamber pressure was decreased.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.46-55
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• 2005

For the sea-level performance test of rocket motor designed to operate in the upper atmosphere, ejectors with no induced secondary flow are generally used, which serves dual purposes of evacuating the test cell and performing as a supersonic exhaust diffuser (SED). The main concern of this research is to simulate starting transients in order to visualize evolution of internal shock structures in SED with different initial cell (vacuum chamber) pressures. RANS code with low Reynolds $k-\varepsilon$ turbulence model was employed for these computations. Numerical results were compared with the pressure measurements previously performed [Proceedings of 2004 Annual Conference, KIMST], and showed good agreements with pressure-time history of measured data. In the case of low vacuum chamber pressure, abrupt impingement of the under-expanded supersonic jet from the nozzle onto the diffuser wall was observed, whereas initial impingement point was located downstream and moved slowly upstream in the case of non-vacuum chamber pressure. In spite of initially dissimilar evolution of shock structures, iso-mach contour revealed that the steady shock structures had little difference except the location of flow separation and normal shock.

• Journal of Mechanical Science and Technology
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• v.16 no.10
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• pp.1314-1319
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• 2002

A mathematical model and control laws for an Electronic-Vacuum Booster (EVB) for application to vehicle cruise control will be presented. Also this paper includes performance test result of EVB and vehicle cruise control experiments. The pressure difference between the vacuum chamber and the apply chamber is controlled by a PWM-solenoid-valve. Since the pressure at the vacuum chamber is identical to that of the engine intake manifold, the output of the electronic-vacuum booster Is sensitive to engine speed. The performance characteristics of the electronic-vacuum booster have been investigated via computer simulations and vehicle tests. The mathematical model of the electronic-vacuum booster developed in this study and a two-state dynamic engine model have been used in the simulations. It has been shown by simulations and vehicle tests that the EVB-cruise control system can provide a vehicle with good distance control performance in both high speed and low speed stop and go driving situations.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.24-27
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• 1992

The Pohang Accelerator Lab is constructing a 2 GeV synchrotron radiation source. In order to achieve a beam lifetime of 5 hours or more, the average pressure in the vacuum chamber will be kept in the nano Torr range. Each chamber consists of a top and a bottom piece, which are machined separately and welded together. The chamber material is A1 5083-H321. The pumping system has nine sets of lumped NEGs in tandem with ion pumps installed beneath photon stops, and six ion pumps per superperiod. A prototype chamber will be machined by February 1992. After various tests with the prototype chamber, the vacuum chamber design will be refined.