A Study of Non-uniform Pressure Distribution in Vacuum Chamber during Dynamic Gas Flow

  • Khan, Wakil (Vacuum Technology Center, KRISS) ;
  • Hong, K.S. (Vacuum Technology Center, KRISS) ;
  • Lim, I.T. (Vacuum Technology Center, KRISS) ;
  • Shin, Y.H. (Vacuum Technology Center, KRISS) ;
  • Hong, S.S. (Vacuum Technology Center, KRISS)
  • Published : 2009.08.19