• Title/Summary/Keyword: Ultra Precision Engineering

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Development of an Active Ultra-precision Polishing Machine (능동형 초정밀 폴리싱가공기 개발)

  • 최진경;한성종;박경환;김태형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.74-78
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    • 2002

  • Ultra-Precision CNC polishing system including on-machine measurement system, a corrective polishing algorithm is developed. The unit removal profiles for various polishing tools and analyzed and tested and dwell time distributions and residual errors for a target removal shape are calculated. The corrective polishing algorithm is tested with various workpieces. This result will be used for the software development of the CNC polishing system.

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Numerical Analysis and Experiment of Environmental Control Cell for Ultra-nano Precision Machine (초정밀 가공기를 위한 환경 제어용 셀에 관한 실험 및 해석적 연구)

  • Oh, S.J.;Kim, C.S.;Cho, J.H.;Kim, D.Y.;Seo, T.B.;Ro, S.K.;Park, J.K.
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.5
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    • pp.824-830
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    • 2013

  • In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within $17.465{\pm}0.055^{\circ}C$.

  • https://doi.org/10.7735/ksmte.2013.22.5.824 인용 PDF KSCI