Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Numerical Analysis and Experiment of Environmental Control Cell for Ultra-nano Precision Machine

초정밀 가공기를 위한 환경 제어용 셀에 관한 실험 및 해석적 연구

  • Oh, S.J. (Graduate School of Mechanical Engineering, Inha University) ;
  • Kim, C.S. (Graduate School of Mechanical Engineering, Inha University) ;
  • Cho, J.H. (Graduate School of Mechanical Engineering, Inha University) ;
  • Kim, D.Y. (Graduate School of Mechanical Engineering, Inha University) ;
  • Seo, T.B. (Department of Mechanical Engineering, Inha University) ;
  • Ro, S.K. (Intelligent Machine System Research Center, KIMM) ;
  • Park, J.K. (Intelligent Machine System Research Center, KIMM)
  • Received : 2013.08.13
  • Accepted : 2013.10.02
  • Published : 2013.10.15
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Abstract

In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within $17.465{\pm}0.055^{\circ}C$.

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References

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