A study of improvement on the dry etch characteristics of Al-Nd films for application to thin-film-transister liquid crystal displays (TFT-LCD용 Al-Nd 박막의 건식식각특성 개선에 관한 연구)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1999.11a
- /
- pp.88-88
- /
- 1999