• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.09a
• /
• pp.5-8
• /
• 2001

The $Sr_{0.8}Bi_{2.4}Ta_{2}O_{9}(SBT)$ thin films are deposited on Pt-coated electrode$(Pt/TiO_{2}/SiO_{2}/Si)$ using RF magnetron sputtering method. With increasing annealing tempera ture from $600[^{\circ}C]$ to $850[^{\circ}C]$, Bi-layered perovskite phase was crystallized above $650[^{\circ}C]$. The dielectric constant is 213 at annealing temperature of $750[^{\circ}C]$ and dielectric loss have a stable value within 0.1. Leakage current density is $1.01{\times}10^{-8} A/cm^{2}$ at annealing temperature of $750[^{\circ}C]$ The fatigue characteristics of SBT thin films did not change up to $10^{10}$ switching cycles.

• Transactions on Electrical and Electronic Materials
• /
• v.1 no.1
• /
• pp.40-44
• /
• 2000

Metal-ferroelectric-insulator-semoiconductor field effect transistor (MFISFETs) were fabricated using CMOS processes. The Pt/SBT/NO combined layers were etched for forming a conformal gate by using Ti/Cr metal masks and a two step etching method, By the method, we were able to fabricate a small-sized gate with the dimension of $16/4{\mu}textrm{m}$ in the width/length of gate. It has been chosen the non-self aligned source and drain implantation process, We have deposited inter-layer dielectrics(ILD) by low pressure chemical vapor deposition(LPCVD) at $380^{circ}C$ after etching the gate structure and the threshold voltage of p-channel MFISFETs were about 1.0 and -2.1V, respectively. It was also observed that the current difference between the $I_{ON}$(on current) and $I_{OFF}$(off current) that is very important in sensing margin, is more that 100 times in $I_{D}-V_{G}$ hysteresis curve.

• Journal of Sensor Science and Technology
• /
• v.13 no.2
• /
• pp.85-89
• /
• 2004

This paper represents the development of high sensitivity photo-sensor for the fluorescence detection in the integrated biological analysis system. The finger-type PIN photodiodes were fabricated as the photo-sensor, and had a high sensitivity ($I_{light}/I_{dark}$ = 8720). The interference filter consisted of $TiO_{2}$ and $SiO_{2}$ was directly deposited on the photodiodes. Deposited filter with 95.5% reflection under 532 nm and 98% transmission over 580 nm exceedingly decreased the magnitude of background signal in the detection. The PDMS micro-fluidic channels are bonded on the photodiode by $O_{2}$ plasma treatment. The detection current was proportional to two primary parameters (light intensity, concentration), and the on-chip detection system could detect fluorescence signals down to 100 nM concentration (LOD = Limit of detection of rhodamine).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1996.05a
• /
• pp.63-67
• /
• 1996

In this paper, effect of MnO$_2$ addition(0, 0.1, 0.2, 0.3, 0.5wt%) on the microstructure, dielectric and piezoelectric properties of [xPMW - (0.15-x) PNN] - [yPT-(0.85-y)PZ] (x=0, 0.01, 0.02, 0.03, 0.05, y = 0.35, 0.40, ().425, 0.45, 0.5) were investigated. When Ti/Zr ratio was 1.0, dielectric and piezoelectric properties were highest value. With PMW 2mol%, dielectric constant, dielectric constant (d$\_$33/, d$\_$31/) and electromechanical coupling factor (kp, k$\_$31/) were highest values of 1995, 479, 186(x10$\^$-12/C/N), 0.61, 0.36, respectively. With the addition of MnO$_2$, dielectric constant, electromechanical coupling factor (kp, k$\_$31/) were decreased, but with 0.3wt% MnO$_2$, eletromechanical coupling factor was highest value of 0.63. With the addition of MnO$_2$, mechanical quality(Q$\_$m/ was increased.

• Electrical & Electronic Materials
• /
• v.10 no.9
• /
• pp.909-915
• /
• 1997

To improve the electro-induced strain and to decease the hysteresis of that W $O_3$dopant of which amount is 0~0.8wt% was added to (P $b_{0.73}$/B $a_{0.27}$)(Z $r_{0.75}$/ $Ti_{0.25}$) $O_3$+0.1wt% $Y_{2}$/ $O_3$ceramics. At the specimen with 0.4 wt% W $O_3$the electromechanical coupling coefficient( $K_{31}$ ) showed the maximum value of 23.6% at D.C 10 kV/cm electric field. At the same W $O_3$addition amount the piezoelectric constant( $d_{31}$ ) and the electro-induced strain($\Delta$$\ell$/$\ell$)showed the highest values of 182$\times$10$^{-12}$ [C/N] 210$\times$10$^{-6}$ $\Delta$$\ell$/$\ell$at D.C. 10 kV/cm electric field. respectively0 kV/cm electric field. respectivelyvely.

• Progress in Superconductivity
• /
• v.9 no.2
• /
• pp.162-166
• /
• 2008

We are developing a sensitive gamma ray spectrometer based on superconducting transition edge sensors. The detector consists of a small piece of high purity Sn as an absorber and a Ti/Au bilayer as a temperature sensor. It is designed to measure the thermal signal caused by absorption of gamma rays. The mechanical support and the thermal contact between the absorber and the thermometer were made with Stycast epoxy. The bilayer was formed by e-beam evaporation and patterned by wet etching on top of a $SiN_X$ membrane. A sharp superconducting transition of the film was measured near 100 mK. When the film was biased to the edge of the transition, signals were observed due to single photon absorption emitted from an $^{241}Am$ source. The measured spectrum showed several characteristic peaks of the source including 59.5 keV gamma line. The full with at half maximum was about 900 eV for the 59.5 keV gamma line. The background was low enough to resolve low energy lines. Considerations to improve the energy resolution of the gamma ray spectrometer are also discussed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.295-295
• /
• 2012

본 연구에서는 아크방전을 이용한 질화 티타늄의 합성 과정 중에서, 시편 청정 공정변수를 변화시킴에 따라 계면에서의 미세조직 변화와 코팅층의 물성을 평가하였다. 아크 소스에 장착된 타겟은 $120mm{\Phi}$, 99.5 %의 티타늄 타겟을 사용 하였고, 시편과 타겟 간의 거리는 약 30 cm이며, 시편은 SUS를 사용하였다. 시편을 진공용기에 장착하고 진공배기를 실시한 후 Ar 가스 분위기에서 시편에 전압을 인가한 후 아크를 발생시켜 약 5분간 시편 청정을 실시하였다. 이 시편 청정 과정에서 시편 인가전압을 0~1,000 V로 변화시켰고 시편 정청이 끝나면 시편에 인가된 전압을 차단하고 코팅하였다. 질화 티타늄의 두께는 약 $3{\mu}m$로 동일하게 코팅하였다. 시편 인가전압 변화에 따라 시편청정 공정 시 계면에서 티타늄층이 코팅되거나 모재 내부까지 침투하는 현상을 관찰하였다. 시편청정 공정변수 변화에 따른 질화 티타늄의 코팅을 통해 계면의 미세조직과 성분의 변화를 주사전자현미경, 투과전자현미경 이미지와 에너지 분산분광기 (Energy Dispersive Spectroscopy ; EDS)를 통해 확인하였으며 나노인덴터를 이용해 경도, 탄성계수 등의 물성변화를 측정하였다. 본 연구에서 얻어진 결과를 이용하여 시편 청정 공정 제어를 통한 다양한 물성변화가 가능 할 것으로 예상된다.

• Progress in Superconductivity and Cryogenics
• /
• v.19 no.3
• /
• pp.13-17
• /
• 2017

We investigated the effect of self-assembled BSO nano-defects as pinning centers in BSO-added GdBCO films when the thicknesses of films were varied. 3.5 vol. % BSO-added GdBCO films with varying thicknesses from 200 nm to 1000 nm were deposited on $SrTiO_3$ (STO) substrate by using pulsed laser deposition (PLD) process. For the films with thicknesses of 400 nm and 600 nm, 'anomaly shoulders' in $J_c-H$ characteristic curves were observed near the matching field. The anomaly shoulders appeared in the field dependence of $J_c$ may be attributed to the existence of double pinning mechanisms in thin films. The fit to the pinning force density as a function of reduced field h ($H/H_{irr}$) using the Dew-Hughes' scaling law shows that both the 400 nm- and the 600 nm-thick films have double pinning mechanisms while the other films have a single pinning mechanism. These results indicate that the self-assembled property of BSO result in different role as pinning centers with different thickness.

• Membrane and Water Treatment
• /
• v.6 no.3
• /
• pp.251-262
• /
• 2015

In this work the preparation and characterization of a membrane containing a uniform mesoporous Titanium oxide top layer on a porous stainless steel substrate has been studied. The 316 L stainless steel substrate was prepared by powder metallurgy technique and modified by soaking-rolling and fast drying method. The mesoporous titania membrane was fabricated via the sol-gel method. Morphological studies were performed on both supported and unsupported membranes using scanning electron microscope (SEM) and field emission scanning microscope (FESEM). The membranes were also characterized using X-ray diffraction (XRD) and $N_2$-adsorption / desorption measurement (BET analyses). It was revealed that a defect-free anatase membrane with a thickness of $1.6{\mu}m$ and 4.3 nm average pore size can be produced. In order to evaluate the performance of the supported membrane, single-gas permeation experiments were carried out at room temperature with nitrogen gas. The permeability coefficient of the fabricated membrane was $4{\times}10^{-8}\;lit\;s^{-1}\;Pa^{-1}\;cm^{-1}$.

• Journal of Fisheries and Marine Sciences Education
• /
• v.19 no.1
• /
• pp.1-7
• /
• 2007

The purpose of this study was to investigate geochemical characteristics of surface sediments in the Keum river estuary adjacent to coastal area. For this study we collected the 21 surface sediments samples. Mean size of surface samples was $3.24{\sim}6.65{\phi}$ on inner estuary and was $2.15{\sim}3.42{\phi}$ on outside estuary. Surface samples were composed of silt on inner estuary and were composed of sand which was more larger than $4{\phi}$ on outside estuary. Most major elements except CaO, $Na_2O$ showed good relationships between variation of contents and grain size. Contents of $Al_2O_3$, $Fe_2O_3$, MgO, $K_2O$, $TiO_2$, $P_2O_5$ and $M_nO$ were increased predominately owing to the variation of mean size of surface samples. Contents of Co, Cr, Cu, Li, Sr, Zn, La, Ce, Pb, Rb, Nd have a good relationships with grain size but Ba, Th, Sm have not. All of major and minor elements contents except $K_2O$ and Ba were less than world mean contents of shallow surface sediments but apprehend a high pollution possibility on silt sediments in the estuaries.