• Title, Summary, Keyword: Thick-film sensor

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Thick-Film Strain-gage Ceramic-Pressure Sensor (세라믹 다이어프램을 이용한 후막 스트레인 게이지 압력센서)

  • 이성재;박하용;민남기
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.12
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    • pp.987-993
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    • 2001
  • In this paper, we presents the construction details and output characteristics of a thick film piezoresistive strain gage. The thick film was printed on the ceramic diaphragm back side by screen printing and cured at 850$^{\circ}C$. The strain distribution and deflection on ceramic diaphragm were performed with finite-element method(FEM tool ANSYS-5.3). Various thick film strain gage characteristics were analysed, including nonlinearity, hysteresis, stability and sensitivity of thick film strain gages.

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Effect of P(VDF/TrFE) Film Thickness on the Characteristics of Pyroelectric Passive Infrared Ray Sensor for Human Body Detection (P(VDF/TrFE) 필름의 두께에 따른 인체 감지형 초전형 PIR 적외선 센서의 특성)

  • Kwon, Sung-Yeol
    • Journal of Sensor Science and Technology
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    • v.20 no.2
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    • pp.114-117
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    • 2011
  • A thick 25 ${\mu}m$ thickness poled P(VDF/TrFE) film pyroelectric infrared ray sensor has been fabricated and then thin 1.6 ${\mu}m$ thickness P(VDF/TrFE) film pyroelectric infrared ray sensor has been fabricated also. These thick and thin P(VDF/TrFE) film pyroelectric infrared ray sensor was mounted in TO-5 housing to detect infrared light of 5.5 ~ 14 ${\mu}m$ wavelength for human body detecting with each other. The noise output voltage of the thick P(VDF/TrFE) film pyroelectric infrared ray sensor were 380 mV and NEP(noise equivalent power) is $3.95{\times}10^{-7}$ W which is the similar value with the commercial pyroelectric infrared ray sensor using ceramic materials as a sensing material. The NEP and specific detectivity $D^*$ of the thin P(VDF/TrFE) film pyroelectric infrared ray sensor were $2.13{\times}10^{-8}$ W and $9.37{\times}106$ cm/W under emission energy of 13 ${\mu}W/cm^2$ respectively. These result caused by lower thermal diffusion coefficient of a thin 1.6 ${\mu}m$ thickness PVDF/TrFE film than the thick 25 ${\mu}m$ thickness poled P(VDF/TrFE) film pyroelectric infrared ray sensor.

Development of piezocapacitive thick film strain gage based on ceramic diaphragm (세라믹 다이어프램을 이용한 정전용량형 후막 스트레인 게이지)

  • Lee, Seong-Jae;Park, Ha-Young;Kim, Jung-Ki;Min, Nam-Ki
    • Proceedings of the KIEE Conference
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    • pp.1529-1531
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    • 2003
  • Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, piezocapastive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. The screen printing technique has been used to fabricate the pressure sensors on alumina substrate($Al_2O_3$). Thick film capacitive of strain sensing characteristics are reported and dielectric paste based on (Ti+Ba) materials. The electric property of dielectric paste has been studied and exhibit good properly with good gage factor comparable to piezoresistive strain gage. New piezocapacitive strain sensor was designed and tested. The output of capacitive value was good characteristics.

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Design of a Smart Gas Sensor System for Room Air-Cleaner of Automobile (Thick-Film Metal Oxide Semiconductor Gas Sensor)

  • Kim, Jung-Yoon;Shin, Tae-Zi;Yang, Myung-Kook
    • Journal of Electrical Engineering and Technology
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    • v.2 no.3
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    • pp.408-412
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    • 2007
  • It is almost impossible to secure the reproductibility and stability of a commercial Thick-Film Metal Oxide Semiconductor Gas Sensor since it is very difficult to keep the consistency of the manufacturing environment. Thus it is widely known that the general Semiconductor-Oxide Gas Sensors are not appropriate for precise measurement systems. In this paper, the output characteristic analyzer of the various Thick-Film Metal Oxide Semiconductor Gas Sensors that are used to recognize the air quality within an automobile are proposed and examined. The analyzed output characters in a normal air chamber are grouped by sensor ranks and used to fill out the characteristic table of the Thick-Film Metal Oxide Semiconductor Gas Sensors. The characteristic table is used to determine the rank of the sensor that is equipped in the current air cleaner system of an automobile. The proposed air control system can also adapt the on-demand operation that recognizes the history of the passenger's manual-control.

Sensing Mechanism Property of $RuO_2$ Thick Film Resistor. ($RuO_2$ 후막저항을 이용한 압력센서의 출력특성 개선)

  • Lee, Seong-Jae;Park, Ha-Young;Min, Nam-Ki
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.350-351
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    • 2006
  • Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

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Fabrication and Characteristics of Thick Film Alcohol Gas Sensors (후막형 알코올 센서의 제조 및 특성)

  • Choi Dong-Han
    • Proceedings of the IEEK Conference
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    • pp.387-390
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    • 2004
  • Thick film alcohol gas sensors were fabricated. Their electrical properties and gas sensing characteristics were investigated. The sensitivity of $1wt.\%$ Pd-doped ${\gamma}-Fe_2O_3$ thick film heat treated at $400^{\circ}C$, 2hrs was $74\%$ to 500ppm alcohol gas at the operating temperature of $250^{\circ}C$. The selectivity of the film to alcohol was good. It showed fast response time to low concentrations of alcohol in air, hence this sensor can be used as a breath sensor.

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Characteristics of a Metal-loaded SnO2/WO3 Thick Film Gas Sensor for Detecting Acetaldehyde Gas

  • Jun, Jae-Mok;Park, Young-Ho;Lee, Chang-Seop
    • Bulletin of the Korean Chemical Society
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    • v.32 no.6
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    • pp.1865-1872
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    • 2011
  • This study investigates the sensitivity of a gas sensor to volatile organic compounds (VOCs) at various operating temperatures and catalysts. Nano-sized powdered $WO_3$ prepared by sol-gel and chemical precipitation methods was mixed with various metal oxides. Next, transition metals (Pt, Ru, Pd, and In) were doped on the surface of the mixture. Metal-$WO_3$ thick films were prepared using the screen-printing method. The physical and chemical properties of the films were studied by SEM/EDS, XRD, and BET techniques. The measured sensitivity to VOCs is defined as the ratio ($R_a/R_g$) of resistance ($R_{air}$) of $WO_3$ film in the air to resistance ($R_{gas}$) of $WO_3$ film in a VOCs test gas. The sensitivity and selectivity of the films were tested with various VOCs such as acetaldehyde, formaldehyde, methyl alcohol, and BTEX. The thick $WO_3$ film containing 1 wt % of Ru and 5 wt % of $SnO_2$ showed the best sensitivity and selectivity to acetaldehyde gas at an operating temperature of 300 $^{\circ}C$.

A Study of Deflection of Ceramic Diaphragm for a Pressure Sensor (후막저항의 기하학적 위치에 따른 압력센서의 출력특성 고찰)

  • Lee, Seong-Jae;Lee, Deuk-Young;Ha, Young-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.884-887
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    • 2003
  • Strain gages were widely used transducers. Essentially a strain gage was an electric element to which an appropriate type was attached. Strain was sensed by gages and provided electrical output proportional to applied forced. This paper describes the recent development of a thick film strain gage ceramic pressure sensors. The thick film resistors as strain gage in the Wheatstone bridge were fabricated with a novel mixture of ruthenium. The thick-film technology of resistors were printed on the ceramic diaphragm back side by screen printing and cured at $850^{\circ}C$. The mechanical measurements were performed with the computer simulation results(ANSYS 5.1). The output sensitivity was 1.2mV/V, of which max. nonlinearity was less than 0.29%, hysteresis was less than 0.38%FS.

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Characteristics of metal-loaded TiO2/SnO2 thick film gas sensor for detecting acetonitrile (아세토나이트릴 가스 검지를 위한 센스의 제작 및 특성)

  • Park, Young-Ho;Lee, Chang-Seop
    • Journal of the Korean Institute of Gas
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    • v.13 no.2
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    • pp.23-29
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    • 2009
  • This study investigated sensitivity of the gas sensor to chemical weapons with the sensor material doped with catalysts. The nano-sized SnO2 powder mixed with metal oxides (TiO2) was doped with transition metals(Pt, Pd and In). Thick film of nano-sized SnO2 powder with TiO2 was prepared by screen-printing method onto Al2O3 substrates with platinum electrode and chemical precipitation method. The physical and chemical properties of sensor material were investigated by SEM/EDS, XRD and BET analyzers. The measured sensitivity to simulant toxic gas is defined as the percentage of resistance of value equation, [(Ra-Rg)/$Ra\;{\times}100$)], that of the resistance(Ra) of SnO2 film in air and the resistance(Rg) of SnO2 film in acetonitrile gas. The best sensitivity and selectivity of these thick film were shown with 1wt.% Pd and 1wt.% TiO2 for acetonitile gas at the operating temperature of $250^{\circ}C$.

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Fabrication and ethanol gas sensing characteristics of the thick film ethanol gas sensors (후막형 에탄올 가스 감지소자의 제조 및 특성)

  • Choi, Dong-Han
    • Journal of Sensor Science and Technology
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    • v.16 no.6
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    • pp.428-433
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    • 2007
  • $SnO_{2}$-based thick film ethanol gas sensors were fabricated on alumina substrates and their ethanol gas sensing characteristics were investigated. The film sintered at $400^{\circ}C$ for 2 hrs. showed the highest sensitivity to ethanol gas and the sensitivity of the film to 1000 ppm ethanol gas in air was 97 % at an operating temperature of $250^{\circ}C$. The addition of $Fe_{2}O_{3}$ to $SnO_{2}$ enhanced the sensitivity by changing the type and number of surface acidic/basic sites.