• Title/Summary/Keyword: Substrate system

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Diamond Synthesis by the Thermal Plasma CVD at Atmospheric Pressure (대기압 열플라즈마 CVD에 의한 다이아몬드 합성)

  • Lee, Jae-Ho;Ko, Myung-Wan;Park, Dong-Wha
    • Applied Chemistry for Engineering
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    • v.5 no.1
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    • pp.16-23
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    • 1994
  • In an argon thermal plasma CVD system diamond of metastable state was synthesized on molydenum substrate and concentration ratio of methane to hydrogen. Diamond was relatively well obtained when surface temperature of substrate was $890^{\circ}C$ and concentration of methane ratio was 0.5 percents.

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Simulation for FZPL Antenna on Mounted Dielectric Substrate (유전기판에 마운트된 FZPL 안테나 시뮬레이션)

  • 김태용
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.57-60
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    • 2003
  • FZPL antenna have been applied for satellite TV receiver system, radio astronomical observation and so on, because of its flat nature and structural simplicity. Using TLM modeling, numerical simulation was performed for the FZPL antenna which ran be applied for DAB/DMB receiver system. FZPL antenna mounted on dielectric substrate was investigated. As the results, the computed focal length was shorter than the designed one and the received gain was 18dB.

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Polarization Characteristics of Thermal Sprayed Coating Layer (용사코팅층의 분극특성)

  • Ahn, S.H.;Kim, S.J.;Kim, Y.S.
    • Journal of Power System Engineering
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    • v.8 no.4
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    • pp.38-43
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    • 2004
  • Thermal spraying onto the metal substrate has been widely used as a technique of the surface treatment in the various industrial field. A wide range of thermal spray technologies exist and all rely on the fundamental process of fusing a metal feedstock, atomizing it and transporting it to the surface of a substrate. Specially, these methods have been taken into account as the protection method against the corrosion. In this study, the polarization characteristics were carried out on the thermal sprayed coating layer immersed in various pH of diluted aqueous solutions at $25^{\circ}C$. Aluminum, Zinc, Ni-base alloy, alumina and polyethylene powder were used with sprayed coating materials. From the polarization curves, the electrochemical corrosion potential($E_{corr}$) and the corrosion current density($I_{corr}$) were investigated.

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Conductive Characterization of DLC Thin Films Fabricated by Radio-Frequency Magnetron Sputtering

  • Cao, Nguyen Van;Kim, Tae-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.290-290
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    • 2011
  • In this study Diamond-like carbon (DLC) films were deposited on p-type Si substrates using a Radio-Frequency magnetron Sputtering system. The DLC film was deposited by bombarding graphite target with a N2/Ar plasma mixture with various conditions: substrate, pressure, deposition time, temperature of substrate, power and ratio of gas mixture. The effect on the conduction and hardness of DLC thin films were investigated. The conduction of DLC films were measured by I-V measurement. In addition, Raman analysis was performed to study the chemical bonding structure. The hardness was measured by Nano indentation. Atomic Force Microscopy was used for determined surface morphology of DLC film.

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Bendable ac-PDP using Fence-Structured Electrodes on Polyethylene Terephthalate Substrate

  • Choi, Won-Yeol;Hong, Cho-Rong;Kim, Yong-Seog
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.593-596
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    • 2007
  • A possibility of manufacturing bendable ac-PDP using aluminum electrode with anodic aluminum oxide dielectric material system on PET film substrate was explored. For this structure, PET film with fence-structured aluminum electrodes was used for front plate and PET film with barrier ribs of UV curable resin for the rear plate. The results demonstrate that it is feasible to manufacture the bendable ac-PDPs using those material system and are expected to expand the applications of plasma display panels.

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Application of thermodynamics to chemical vapor deposition

  • Latifa Gueroudji;Hwang, Nong-Moon
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1998.09a
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    • pp.1-20
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    • 1998
  • Processing of thin films by chemical vapor deposition (CVD) is accompanied by chemical reactions, in which the rigorous kinetic analysis is difficult to achieve. In these conditions, thermodynamic calculation leads to better understanding of the CVD process and helps to optimise the experimental parameters to obtain a desired product. A CVD phase diagram has been used as guide lines for the process. By determining the effect of each process variable on the driving force for deposition, the thermodynamic limit for the substrate temperature that diamond can deposit is calculated in the C-H system by assuming that the limit is defined by the CVD diamond phase diagram. The addition of iso-supersaturation ratio lines to the CVD phase diagram in the Si-Cl-H system provides additional information about the effects of CVD process variables.

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A Study on the Characteristics of Nanodiamond Films with the Gas Flow Control (가스 유량제어에 의한 나노다이아몬드 박막의 특성연구)

  • Kim, Tae-Gyu;Kim, Chang-Hoon
    • Journal of Surface Science and Engineering
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    • v.39 no.4
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    • pp.153-159
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    • 2006
  • Nanodiamond films were deposited on Si substrate by introducing a time dependent on/off modulation of $CH_4\;and\;O_2$ flows in a vertical-type microwave plasma enhanced chemical vapor deposition system. Surface morphology and diamond quality of the film were investigated as a function of the on/off modulation time interval. The diamond nucleation density on the substrate was enhanced under low temperature and low pressure condition. In addition, the diamond nucleation density was enhanced by increasing the on/off modulation time interval. Enhanced diamond quality was noticeable under the condition of a longer on/off modulation time interval. It was suggested that the nanodiamond nuclei formed the cluster formation.

Underlayer effects on crystallographic and magnetic characteristics of Co-Cr(-Ta) layer (Co-Cr(-Ta) 층의 결정성 및 자기적 특성에 미치는 하지층 효과)

  • 금민종;공석현;가출현;손인환;김경환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.208-211
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    • 2000
  • We prepared Co-Cr-Ta and Co-Cr-Ta/Ti thin film for perpendicular magnetic recording media by facing targets sputtering system (FTS system). Ti underlayer effects on crystallographic and magnetic characteristics of Co-Cr-Ta perpendicular magnetic recording media have been investigated. Crystallgraphic and magnetic characteristic of prepared thin films were evaluated by x-ray diffractometry(XRD), vibrating sample magnetometer(VSM) and kerr hysteresis loop measurement. The coercivity and anisotropy field increase by introduced Ti underlayer when substrate temperature is higher than 150$^{\circ}C$. The c-axis dispersion angle and grain size of Co-Cr-Ta/Ti thin film is decrease than Co-Cr-Ta when substrate temperature is higher than 100$^{\circ}C$. Consequently, the use of a Ti underlayer highly orientated can be improved crystallographic and magnetic characteristics of Co-Cr -Ta perpendicular media layer.

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The effect of substrate temperature on crystallography and electrical properties of ZnO thin films (기판온도에 따른 ZnO박막의 결정구조 및 전기적 특성)

  • 금민종;성하윤;손인환;장경욱;김경환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.415-418
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    • 1999
  • In this paper we studied that the effect of substrate temperature on crystallography and electrical properties of ZnO thin films. Facing Targets Sputtering system can deposit thin films in plasma-free situation and change the deposition condition in wide range. And prepared thin film\`s c-axis orientation and grain size were analyzed by XRD(x-ray diffractometer). In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin film with good c-axis orientation.

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Properties of AZO thin film deposited on the PES substrate (PES 기판상에 증착된 AZO 박막의 특성연구)

  • Kim, Sang-Mo;Rim, You-Seung;Choi, Myung-Gyu;Kim, Kyung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.403-404
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    • 2007
  • We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. ZnO doped the content of Al 2 wt% was used and the sputtering conditions were gas pressure 1mTorr and input power 100W. The electrical, structural and optical properties of AZO thin films were investigated. To investigate the as-deposited thin film properties, we employed four-point probe, UV/VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM).

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