Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Underlayer effects on crystallographic and magnetic characteristics of Co-Cr(-Ta) layer

Co-Cr(-Ta) 층의 결정성 및 자기적 특성에 미치는 하지층 효과

  • 금민종 (경원대학교 공대 전기전자공학부) ;
  • 공석현 (동경공업대학 전자물리과) ;
  • 가출현 (신성대학 전기과) ;
  • 손인환 (신성대학 전기과) ;
  • 김경환 (경원대학교 공대 전기전자공학부)
  • Published : 2000.07.01
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Abstract

We prepared Co-Cr-Ta and Co-Cr-Ta/Ti thin film for perpendicular magnetic recording media by facing targets sputtering system (FTS system). Ti underlayer effects on crystallographic and magnetic characteristics of Co-Cr-Ta perpendicular magnetic recording media have been investigated. Crystallgraphic and magnetic characteristic of prepared thin films were evaluated by x-ray diffractometry(XRD), vibrating sample magnetometer(VSM) and kerr hysteresis loop measurement. The coercivity and anisotropy field increase by introduced Ti underlayer when substrate temperature is higher than 150$^{\circ}C$. The c-axis dispersion angle and grain size of Co-Cr-Ta/Ti thin film is decrease than Co-Cr-Ta when substrate temperature is higher than 100$^{\circ}C$. Consequently, the use of a Ti underlayer highly orientated can be improved crystallographic and magnetic characteristics of Co-Cr -Ta perpendicular media layer.

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