Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The effect of substrate temperature on crystallography and electrical properties of ZnO thin films

기판온도에 따른 ZnO박막의 결정구조 및 전기적 특성

  • 금민종 (경원대학교 공대 전기전자공학부) ;
  • 성하윤 (신성대학 전기과) ;
  • 손인환 (경원대학교 공대 전기전자공학부) ;
  • 장경욱 (경원대학교 공대 전기전자공학부) ;
  • 김경환 (경원대학교 공대 전기전자공학부)
  • Published : 1999.11.01
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Abstract

In this paper we studied that the effect of substrate temperature on crystallography and electrical properties of ZnO thin films. Facing Targets Sputtering system can deposit thin films in plasma-free situation and change the deposition condition in wide range. And prepared thin film\`s c-axis orientation and grain size were analyzed by XRD(x-ray diffractometer). In the results, we suggest that FTS system is very suitable to preparing high quality ZnO thin film with good c-axis orientation.

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