Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.403-404
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- 2007
Properties of AZO thin film deposited on the PES substrate
PES 기판상에 증착된 AZO 박막의 특성연구
- Kim, Sang-Mo (Dept. of Electrical Engineering, Kyungwon University) ;
-
Rim, You-Seung
(Dept. of Electrical Engineering, Kyungwon University)
;
- Choi, Myung-Gyu (Dept. of Electrical Engineering, Kyungwon University) ;
- Kim, Kyung-Hwan (Dept. of Electrical Engineering, Kyungwon University)
- Published : 2007.06.21
Abstract
We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. ZnO doped the content of Al 2 wt% was used and the sputtering conditions were gas pressure 1mTorr and input power 100W. The electrical, structural and optical properties of AZO thin films were investigated. To investigate the as-deposited thin film properties, we employed four-point probe, UV/VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM).