• Title/Summary/Keyword: Single irradiation

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The Improved Characteristics of Wet Anisotropic Etching of Si with Megasonic Wave (Megasonic wave를 이용한 실리콘 이방성 습식 식각의 특성 개선)

  • Che Woo-Seong;Suk Chang-Gil
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.81-86
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    • 2004
  • A new method to improve the wet etching characteristics is described. The anisotropic wet-etching of (100) Si with megasonic wave has been studied in KOH solution. Etching characteristics of p-type (100) 6 inch Si have been explored with and without megasonic irradiation. It has been observed that megasonic irradiation improves the characteristics of wet etching such as an etch uniformity and surface roughness. The etching uniformity on the whole wafer with and without megasonic irradiation were less than ${\pm}1\%$ and more than $20\%$, respectively. The initial root-mean-square roughness($R_{rms}$) of single crystal silicon is 0.23 nm. It has been reported that the roughnesses with magnetic stirring and ultrasonic agitation were 566 nm and 66 nm, respectively. Comparing with the results, etching with megasonic irradiation achieved the Rrms of 1.7 nm on the surface after the $37{\mu}m$ of etching depth. Wet etching of silicon with megasonic irradiation can maintain nearly the original surface roughness after etching process. The results have verified that the megasonic irradiation is an effective way to improve the etching characteristics such as etch uniformity and surface roughness.

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Brilliantly Shining Semiconductor Nanocrystal Dispersed Glass for UV-LED Excitation

  • Murase, Norio;Li, Chunliang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.385-387
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    • 2003
  • We have fabricated a new-type high-brightness phosphor consisting of a sol-gel derived glass with finely dispersed semiconductor nanocrystals. It is possible to obtain visible light of any wavelength with a single UV irradiation. The glass firmly adheres to a glass substrate. Therefore it can easily be used for developing devices.

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Atomically sculptured heart in oxide film using convergent electron beam

  • Gwangyeob Lee;Seung-Hyub Baek;Hye Jung Chang
    • Applied Microscopy
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    • v.51
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    • pp.1.1-1.2
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    • 2021
  • We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.

Picosecond Absorption Kinetic Spectrometer with a Laser and a Streak Camera

  • Jang, Du-Jeon
    • Proceedings of the Optical Society of Korea Conference
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    • 1990.02a
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    • pp.172-176
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    • 1990
  • A high resolution picosecond absorption kinetic spectrometer utilizing dye emission and a streak camera is presented and compared with other methods of picosecond transient absorption measurements. Typical transient absorption and bleach recovery kinetics measured with this spectrometer are shown. Single wavelength transient absorption or ground state bleach recovery kinetics are determined on the basis of a single laser shot, so that the samples are relatively free frm decomposition by irradiation. Excellent kinetics may be obtained from the near UV to the near IR and are not subject to interference from luminescence of samples. The sensitivity of this spectrometer is very high and it is reasonably easy and convenient to set up and use.

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Application of Combustion in Porous Inert Medium to Thermophotovoltaic Generation of Electricity and Excess Enthalpy Combustion Similarity to both Single and Multi-channels (다공체 내 연소의 열광전 발전에의 적용과 단일, 다중채널 및 다공체 내 초과 엔탈피 연소의 상사성)

  • Lee, Dae Keun
    • 한국연소학회:학술대회논문집
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    • 2012.11a
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    • pp.171-174
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    • 2012
  • Thermophotovoltaics is the direct energy conversion technology from thermal to electric (voltaic) energy via photon radiation, without any thermodynamic cycle. It is, in general, accomplished by immersing solid body in high temperature heat source (e.g. combustion field), in order to achieve high intensity irradiation, and by receiving the radiation thereof on photovoltaic cells. In this paper, advantages of combustion in porous inert medium in applying to the thermophotovoltaics are discussed in a view of its excess enthalpy features. In addition, the similarities of flame behaviors in porous inert medium to both in single and multi-channels are described.

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The Laminating process for Single Substrate Flexible LCD

  • Bae, Kwang-Soo;Choi, Yoon-Seuk;Kim, Hak-Rin;Kim, Jae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1125-1128
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    • 2007
  • The laminating technique for developing flexible liquid crystal display was demonstrated by using a thin UV curable polymer film and a plastic substrate with patterned polymer wall structure. We adopted the rigid wall structure to provide a solid mechanical support for the stable molecular alignment of liquid crystals (LCs) in the device. The cover film was prepared to have an ability of aligning LC molecules by patterning a micro-groove structure using the soft-lithographic process. These two substrates can be assembled tightly by the laminating and one-step UV irradiation process because of the adhesive nature of the used UV curable polymers. Proposed method can be used to fabricate the flexible LC display with simplicity and also be applicable for a cost-effective roll-to-roll process.

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A New Asymmetric Photoisomerization of 2,3-Dihydropyrrolo[1,2-b]benzisothiazole 5,5-Dioxides (2,3-Dihydropyrrolo[1,2-b]benzisothiazole 5,5-Dioxide들의 비대칭성 광이성질화 반응)

  • Elghamry, Ibrahim;Dopp, Dietrich
    • Journal of the Korean Chemical Society
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    • v.54 no.6
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    • pp.727-730
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    • 2010
  • A tricyclic ring system bearing new stereogenic center namely 2,3-dihydro[1]benzothieno[3,2-b]pyrrole 4,4-dioxide was synthesized by asymmetric photoisomerization of 2,3-dihydropyrrolo[1,2-b]benzisothiazole 5,5-dioxide by irradiation with 245 nm emission of the low-pressure mercury lamp. The chemical structure and the purity of the photoproduct were delineated preliminarily by IR, NMR, and MS and finally confirmed by single crystal X-ray crystallography.

Preparati on and Characterization of $LnTaO_4$ (Ln = La, Nd, Sm, Dy, Er and Tm)

  • Fujita, Atsushi;Matsushita, Hiroaki;Katsui, Akinori
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1116-1117
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    • 2006
  • Lanthanide tantalite $LnTaO_4$ (Ln= La, Nd, Sm, Dy, Er and Tm) was synthesized by a solid state reaction between mixed powders of $Ln_2O_3$ and $Ta_2O_5$. The single-phase $LnTaO_4$ was prepared by sintering at temperatures of 1423-1673 K in air. The SEM observation showed that the particles were provided with the growth steps and the depeloped facets. The photocatalytic activity for water splitting of $LnTaO_4$ prepared was measured under UV light irradiation. The activity obtained was higher than that previously reported. These results suggested the crystallinity of $LnTaO_4$ photocatalysts correlates closely with the efficiency of water splitting.

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Preparation and characterization of ZnWO4 nanocrystallines and single crystals

  • Lim, Chang-Sung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.5
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    • pp.197-201
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    • 2010
  • $ZnWO_4$ nanocrystallines were prepared from polymeric complex method using microwave irradiation. The average nanocrystalline sizes were 18~25 nm showing an ordinary tendency to increase with the temperatures from 400 to $600^{\circ}C$. Bulk type single crystals of $ZnWO_4$ were grown successfully in the [100], [010] and [001] directions using the Czochralski method. The effect of the growth parameters, such as the rotation speed, pulling rate and diameter of the grown crystals, were examined. The hardness, thermal expansion coefficients and dielectric constants of the crystals were evaluated.

Practical Surface Sculpting Method for the Fabrication of Predefined Curved Structures using Focused Ion Beam

  • Kim, Heung-Bae
    • Applied Science and Convergence Technology
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    • v.25 no.5
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    • pp.92-97
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    • 2016
  • Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.