The Thin Silicon Films ppreppared by Thermal- and pphoto-CVD at Low Tempperatures

• Chung, Chan-Hwa;Han, Jae-Hyun;Moon, Sang-Heup
• • Proceedings of the Korean Vacuum Society Conference
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  • 1993.07a
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  • pp.65-67
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  • 1993
• PDF

Giant grain growth of platinum thin film on thermally oxidized silicon wafer

• Lee, Dong-Su;Park, Dong-Yeon;Woo, Hyun-Jung;Kim, Seung-Hyun;Ha, Jo-Woong;Hwang, Cheol-Seong;Yoon, Eui-Joon
• • Proceedings of the Korean Ceranic Society Conference
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  • 2000.10a
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  • pp.160.2-160
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  • 2000
• PDF

Interfacial multi-layer formation between a thin zirconate film and a silicon substrate during thermal treatment (열처리시 Si 기판과 zirconate 박막 사이에 형성되는 다층 구조 분석)

• Heo, Jae-Seong;Choe, Hun-Sang;Baek, Sang-Yeol;Son, Chang-Sik;Choe, In-Hun
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2005.05a
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  • pp.261-261
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  • 2005
• PDF

Influence of different gas concentrations on the plasma etching mechanism for amorphous silicon thin films

• Lee, Jong-Wan;Gang, Seong-Gu;Kim, Tae-Hyeong;Kim, Cha-Yeon;Kim, Seong-Tae
• • Proceedings of the Korean Vacuum Society Conference
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  • 1994.06a
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  • pp.112-112
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  • 1994
• PDF

Elaboration by Tape Casting and Hot Lamination of Copper/Silicon Carbide Composite Thin Films for Microelectronic Applications

• Silvain, Jean-Francois;Geffroy, Pierre-Marie;Chartier, Thierry
• • Proceedings of the Korean Powder Metallurgy Institute Conference
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  • 2006.09b
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  • pp.850-850
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  • 2006
• PDF

Characterization of Silicon Nitride Thin Films by Nanoindentation and Scanning Probe Microscope (나노인덴테이션 주사탐침현미경을 이용한 질화 규소 박막의 특성 평가)

• Kim, Bong-Seop;Lee, Hong-Rim;Go, Cheol-Ho;Yun, Jon-Do;Kim, Ji-Su;Choe, Seong-Ryong;Kim, Gwang-Ho
• • Proceedings of the Korean Ceranic Society Conference
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  • 2002.10a
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  • pp.53.2-53
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  • 2002
• PDF

The Effect of Process Conditions for Formation of n-type Microcrystalline Silicon Thin Films by TCP-PECVD (TCP-PECVD를 이용한 n-type 마이크로결정질 실리콘 박막형성에 공정조건이 미치는 영향)

• Lee, Hyeong-Cheol;Lee, Yu-Jin;Sin, Jin-Guk;Yeom, Geun-Yeong
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2004.05a
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  • pp.61-61
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  • 2004
• PDF

Influence of AC-voltage on the crystallization of amorphous silicon thin film during field aided lateral crystallization process (전계 유도 방향성 결정화 공정시 비정질 실리콘 박막의 결정화에 미치는AC전압의 영향)

• Choe, Seong-Hwa;Kim, Yeong-Bae;Kim, Hyeon-Cheol;Choe, Deok-Gyun
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2004.05a
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  • pp.62-62
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  • 2004
• PDF

Effects of Conditions of Silicon Substrates on The Formation and Electrical Properties of TiSi$_2$ Thin Films (기판 조건에 따른 TiSi$_2$박막의 형성 및 전기적 특성 변화 고찰)

• 김은하;고대홍
• • Journal of the Korean Ceramic Society
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  • v.35 no.11
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  • pp.1141-1147
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  • 1998
• PDF

INTERFICAL REACTION OF METAL THIN FILMS ON ION IMPLANTATED SILICON UNDER HIGH CURRENT DENSITY

• Lin, H.H.;Chen, K.N.;Cheng, S.L.;Chen, L.J.
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1998.08a
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  • pp.69.3-69
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  • 1998
• PDF

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