SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution (SAXS와 AFM에 의한 HF-용액내 양극 에칭에 의해 제조된 기공성 실리콘의 구조연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.17 no.11
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- pp.1218-1223
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- 2004