References
- Manoh, K., Shikida, M., Yamashiro, T., 'Small Integrated Optical Head Device using a Blue-Violet Laser Diode for Blu-ray Disc System,' Jpn. J. Appl. Phys. Vol.42, pp.880-884, 2003 https://doi.org/10.1143/JJAP.42.880
- Nemoto, K., Honda, K., 'Integrated Optical Devices for Optical Disk Applications,' IEICE Trans. Electron., Vol.E85-C, No.4, pp. 1001-1008, 2000
- Maeda, T., Terao, M., Shimano, T., 'A Review of Optical Disk Systems with Blue-Violet Laser Pickups,' Jpn. J. Appl. Phys. Vol. 42, pp.1044-1051, 2003 https://doi.org/10.1143/JJAP.42.1044
- Ensell, G., 'Alignment of Mask Patterns to Crystal Orientation,' Sensors and actuators A 53, pp.345-348,1996 https://doi.org/10.1016/0924-4247(96)80158-0
- Merveille, C., 'Surface Quality of {III} Side-walls in KOH-etched Cavities,' Sensors and Actuators A, Vol. 60, pp. 244-248, 1997 https://doi.org/10.1016/S0924-4247(97)01495-7
- Holke, A., Henderson, H. T., 'Ultra-deep Anisotropic Etching of (110) Silicon,' J. Micromech. Microeng. Vol. 9, pp.51-57, 1999 https://doi.org/10.1088/0960-1317/9/1/306
- Nijdam, A. J., Berenschot, J. W., Suchtelen, J., Gardeniers, J. and Elwenspoek, M., 'Velocity Sources as an Explanation for Experimentally Observed Variations in Si {III} Etch Rates,' J. Micromech. Microeng., Vol. 9, pp.135-138, 1999 https://doi.org/10.1088/0960-1317/9/2/008
- Nijdam, A. J., Gardeniers, J., Gui, C. and Elwenspoek, M., 'Etching Pits and Dislocations in Si (111),' Sensors and Actuators 86, pp.238-247, 2000 https://doi.org/10.1016/S0924-4247(00)00458-1
- Veenendaal, E., Sato, K., Shikida, M. and Suchtelen, J., 'Micromorphology of Single Crystalline Silicon Surfaces during Anisotropic Wet Chemical Etching in KOH and TMAH,' Sensors and Actuators A 93, pp.219-231, 2001 https://doi.org/10.1016/S0924-4247(01)00655-0
- Sato, K., Shikida, M., Yamashiro, T., Tsunekawa, M. and Ito, S., 'Roughening of Single-crystal Silicon Surface Etched by KOH Water Solution,' Sensors and Actuators, Vol. 73,pp.122-130, 1999 https://doi.org/10.1016/S0924-4247(98)00270-2
- Shikida, M., Masuda, T., Uchikawa, D. and Sato, K., 'Surface Roughness of Single-crystal Silicon Etched by TMAH Solution,' Sensors and Actuators A 90, pp.223-231, 2001 https://doi.org/10.1016/S0924-4247(01)00531-3
- Park, S. J., Ahn, B. W., Lee, S. J., 'Nano-scale Precision Polishing Characteristics using Micro Quill and Magnetic Chain Structure,' Journal of KSPE, Vol. 21,No.8, pp.34-42, 2004