• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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• pp.83.2-83
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• 2003

• 한국주조공학회지
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• 제28권6호
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• pp.282-287
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• 2008

The effect of CaO mold on the formation of reaction layer was investigated. CaO mold was prepared by mixing of Colloidal silica($NALCO^{(R)}$ 1130) and an $ZrO_2$, CaO at room temperature. The dried at $20{\pm}3^{\circ}C$, 75% humidity for 12hrs. Sample was prepared from the Cp-Ti(grade-2) and melted by high frequence induction melting system in the vacuum condition. The react ion layer of Ti was confirmed by optical microscopy, microhardness(Hv) and X-ray diffraction. Thickness of reaction layer using the CaO stabilized ZrO2 was thinner than the CaO added ZrO2. And thickness of reaction layer were decreased with decreasing pH of slurry. CaO addition in the slurry could not controlled reaction between molten Ti and investment mold. On the other hand, the CaO chemical bonded ZrO2 by stabilization treatment could controlled reaction between molten Ti and investment mold.

• 한국전기전자재료학회논문지
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• 제20권1호
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• pp.74-79
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• 2007

Most studies on copper Chemical Mechanical Planarization (CMP) have focused on material removal and its mechanisms. Although many studies have been conducted on the mechanism of Cu CMP, a study on uniformity in Cu CMP is still unknown. Since the aim of CMP is global and local planarization, the approach to various factors related to uniformity in Cu CMP is essential to elucidate the Cu CMP mechanism as well. The main purpose of the experiment reported here was to investigate and mechanically analyze the roles of slurry components in the formation of the uniformity in Cu CMP. In this paper, Cu CMP was performed using citric acid($C_{6}H_{8}O_{7}$), hydrogen peroxide($H_{2}O_{2}$), colloidal silica, and benzotriazole($BTA,\;C_{6}H_{4}N_{3}H$) as a complexing agent, an oxidizer, an abrasive, and a corrosion inhibitor, respectively. All the results of this study showed that within-wafer non-uniformity(WIWNU) of Cu CMP could be controlled by the contents of slurry components.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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• pp.560-564
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• 2001

Nowadays, according to the trend of a high performance of concrete structure, the research results have been announced for the purpose to make the high quality. With this respect, we began research to use the Ground Calcium slurry Carbonate (GCC) to a concrete admixtures which ground the limestone until about $1.5mutextrm{m}$. In this paper, we examined the quality of GCC to fine out the value in use as the concrete admixtures. And mechanical properties of concrete using cement blended with GCC, silica fume and mixed two were investigated. It was result from this study that air contents of concrete replaced with GCC were constant regardless of replacement ratio, but the more GCC it had the use of, the less slump was measured. Especially 10% GCC concrete had a good result of compressive strength. In case of mixture with GCC and silica fume, the workability and compressive strength don't seem to be any problems. In the scope of this study it was indicated that the most reasonable replacement with GCC was 10% of cement weight as concrete admixture.

• 한국결정성장학회지
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• 제10권4호
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• pp.309-317
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• 2000

Langasite is a promising new piezoelectric material for SAW filter application. Little was known until recently about the methods needed to mechanically polish and chemically polish/etch this material. In this experiment, polishing, slurry chemistry and chemical wet etching for langasite is described. Conventional quartz and LN ($LiNbO_3$) polishing methods did not produce satisfactory polished surfaces, and polishing with a colloidal silica slurries has shown to be most effective. The optimum condition was investigated by changing the slurry chemistry. As the planarization effect is very important in SAW filter applications, the examination of the effective particle number effect and the particle size effect was carried out. Z-cut langasite surface which had been polished with the colloidal silica slurries was etched in a variety of etchants. Conventional quartz etchants destroyed the polished surface. Other etchants formed a thin film on the surfaces. In this experiment, the reaction between langasite and a few etching solution was analysed. And an appropriate selective etchant solution for analyzing the defects was synthesized.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 춘계학술대회 논문집
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• pp.78-83
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• 2009

In general, Light-hardening polymer was used UV nanoimprint technology. A light-hardening polymer was had the problem of poor hardness, durability. In order to overcome the problem of polymer, inter change optical glass. However glass is very manufacture and a lowering of standars transmittance. In order to glass recover was necessary polishing process. The process is magnetorheological fluids polishing. MR polishing has been developed as a new precision finishing technique to obtain a fine surface. Hence, Magnetorheological fluids has been used for micro polishing to get micro parts. This polishing process guarantees high polishing quality by controlling the fluid density electrically. The applied material in experiments is fused silica glass. Fused silica glass is widely used in the optical field because of high degree of purity. For MR polishing experiments, MR fluid was composed with DI-water, carbonyl iron and nano slurry ceria. The wheel speed and electric current were chosen as the variables for analyzing the characteristics of MR polishing process. Outstanding surface roughness of Ra=1.58nm was obtained on the fused silica glass specimen. And originally glass transmittance was recover on the fused silica glass.

• 자원리싸이클링
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• 제22권2호
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• pp.37-43
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• 2013

다이아몬드 입자를 전착한 와이어를 사용하여 실리콘 잉곳을 슬라이싱 하는 방식은 기존의 슬러리를 사용하는 방식과 달리 절단매체인 실리콘카바이드를 사용하지 않기 때문에 웨이퍼링 후에 발생하는 슬러지에 함유되어 있는 고형분의 대부분은 잉곳으로부터 분리되어 나온 실리콘 성분으로 구성되어 있다. 따라서 슬러지에 함유되어 있는 액상성분만 제거하여도 어렵지 않게 90% 이상의 순도를 가지는 실리콘을 회수할 수 있는 이점이 있다. 본 연구에서 다이아몬드 와이어 쏘잉 방식에서 배출된 슬러지로부터 오일 성분을 제거하여 고품위 실리콘 분말을 회수하였으며, 성형 및 소결공정을 통하여 실리콘에 포함되어 있는 유기물을 포함한 금속불순물을 제거하고, 미분체 실리콘의 산화가 용이한 점을 활용하여 열산화 공정으로 3N급 순도의 실리카를 제조하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.275-276
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• 2008

통신기기가 고주파수화 함에 따라서 저유전 저손실 재료의 필요성이 증대되고 있으며, 세라믹/폴리머 복합재료를 고주파 회로 기판 소재로 이용하려는 관심이 증폭되고 있다. 본 연구에서는 저손실, 저유전율 특성을 구현하기 위해 $SiO_2$를 세라믹 필러로 복합물을 제작하였다. 평균 입자 크기가 16nm, $2.3{\mu}m$의 fumed 실리카와 평균 입자 크기 $1{\mu}m$, $4{\mu}m$의 fused 실리카를 사용하였다. 이 4종류 실리카를 사용하여 slurry를 제작하고 이를 활용하여 tape을 제작하였다. 제작된 복합체 tape을 적층하여 기판을 제작해 기판의 유전특성을 측정하였다. fumed 실리카의 경우 $SiO_2$ 10vol%이상에서는 균일한 tape성형이 어려워졌으며, 유전 손실이 fused 실리카와 비교하였을 때 큰 폭으로 증가하였다. fumed silica, fused silica 두 종류 모두 입도가 증가하면 유전손실이 증가하였다.

• 한국입자에어로졸학회지
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• 제5권4호
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• pp.189-197
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• 2009

Wet-type particulate removal system is employed in most of ironmaking processes. These de-dusting systems require additional downstream aggregates for treatment of water and for drying of the collected slurry. Thus dried slurry can be pressed in shape of briquettes and recycled in the steelmaking process. Different from the wet-type, the dry-type particulate removal systems generate no slurry. A high-temperature, high-pressure de-dusting system with inertial inlet was developed. The target application of this system was to remove particulate matter generated from the novel ironmaking process and other steelmaking processes. In this study we conducted tests with this newly developed system to evaluate the performance of the silica-carbide (SiC) ceramic filters. In addition, for purpose of comparison, we also conducted tests with a unit which has conventional direct inlet. Fe-Particles collected from the novel ironmaking process were used in our tests as test dusts. The temperature and the pressure were kept constant at their respective values $800^{\circ}C$ and $3kg_f/cm^2$.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 1992년도 가을 학술발표회 논문집
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• pp.1-4
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• 1992

This paper deals with the effect of siliceous slurry coating on concrete microstructure under damp environment. This material is mixed inorganic powder consisted of silica, cement and fine sand and water. Water pressure was given on the coated surface of concrete. for estimation on effect of siliceous slurry coating, microstructure of coated concrete was observed through SEM, and chemical components of crystals were analyzed with X-ray diffraction and EDX. A number of needle and fibrous crystals were produced in microstructure. And based on X-ray diffraction and EDX, needle crystal mainly consist of Al, Si, and Ca, and it is concluded to be ettringite. Fibrous crystals consist of Ca and Si, and it to be calcium silicate hydrate.