한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)
- 제10권4호
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- Pages.309-317
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- 2000
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- 1225-1429(pISSN)
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- 2234-5078(eISSN)
CMP (Chemical Mechanical Polishing) characteristics of langasite single crystals for SAW filter applications
- Jang, Min-Chul (Ceramic Processing Research Center(CPRC), Hanyang University) ;
- An, Jin-Ho (Ceramic Processing Research Center(CPRC), Hanyang University) ;
- Kim, Jong-Cheol (Korea Institute of Ceramic Engineering and Technology) ;
- Auh, Keun-Ho (Ceramic Processing Research Center(CPRC), Hanyang University)
- 발행 : 2000.08.01
초록
Langasite is a promising new piezoelectric material for SAW filter application. Little was known until recently about the methods needed to mechanically polish and chemically polish/etch this material. In this experiment, polishing, slurry chemistry and chemical wet etching for langasite is described. Conventional quartz and LN (
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