• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.252-252
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• 2008

The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a $600{\mu}m{\times}600{\mu}m$ square shaped membrane which made of $1{\mu}m$ thick ploycrystalline 3C-SiC suspended by four legs. 3C-SiC is known for excellent chemical durability, mechanical strength and sustaining of high temperature. The membrane is fabricated by surface micromachining using oxidized Si sacrificial layer. The Pt thin film is used for heating material and resist temperature sensor. The fabrication methodology allows intergration of an array of heating material and resist temperature detector. For reasons of a short response time and a high sensitivity a uniform temperature profile is desired. The dissipation of microhotplate was examined by a IR thermoviewer and the power consumption was measured. Measured and simulated results are compared and analyzed. Thermal characterization of the microhotplates shows that significant reduction in power consumption was achieved using suspended structure.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• 한국수소및신에너지학회논문집
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• 제25권4호
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• pp.419-424
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• 2014

Direct ethanol fuel cell has been fabricated with ceramic membrane. A porous silicon carbide (SiC) membrane having approximately 30% porosity has been applied for a direct ethanol proton exchange membrane (DE-PEM) fuel cell. A horizontal type cell having Pt ($18mg/cm^2$) catalyst layer on both side of the ceramic membrane was used for the demonstration test. The ethanol oxidation based-fuel cell stack showed very high voltage (1.289V) and measurable current level (68mA) even though at room temperature.

• 마이크로전자및패키징학회지
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• 제8권1호
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• pp.39-43
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• 2001

$SiC_{x}N$_{y}$ film is deposited by electron cyclotron resonance plasma chemical vapor deposition system using $SiH_4$(5% in Ar), $CH_4$ and $N_2$. Ternary phase $SiC_{x}N$_{y}$ thin film deposited at the microwave power of 600 W and substrate temperature of 700 contains considerable amount of strong C-N bonds. Change in $CH_4$flow rate can effectively control the residual film stress, and typical surface roughness of 34.6 (rms) was obtained. Extreme]y high hardness (3952 Hv) and optical transmittance (95% at 633 nm) was achieved, which is suitable for a LIGA mask membrane application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.385-386
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• 2008

This paper reports the design of the ultra low power consumption microhotplates for high temperatures. The microhotplates consisting of a platinum-based heating element on AlN/poly 3C-SiC layers were designed. The microhotplate is a $600\times600{\mu}m^2$ square shaped membrane made of $1{\mu}m$ thick ploy 3C-SiC suspended by four legs. The microhotplate was compared with $Si_3N_4/SiO_2/Si_3N_4$(NON) structure microhotplate by COMSOL simulation system. Thermal uniformity, power consumption and thermal characterizations of microhotplates based on 3C-SiC thin film are better than microhotplates with NON structure.

• The Korean Journal of Physiology and Pharmacology
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• 제13권2호
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• pp.115-121
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• 2009

Functional defects in mitochondria are involved in the induction of cell death in cancer cells. We assessed the toxic effect of camptothecin against the human cervical and uterine tumor cell line SiHa with respect to the mitochondria-mediated cell death process, and examined the combined effect of camptothecin and anticancer drugs. Camptothecin caused apoptosis in SiHa cells by inducing mitochondrial membrane permeability changes that lead to the loss of mitochondrial membrane potential, decreased Bcl-2 levels, cytochrome c release, caspase-3 activation, formation of reactive oxygen species and depletion of GSH. Combination of camptothecin with other anticancer drugs (carboplatin, paclitaxel, doxorubicin and mitomycin c) or signaling inhibitors (farnesyltransferase inhibitor and ERK inhibitor) did not enhance the camptothecin-induced cell death and caspase-3 activation. These results suggest that camptothecin may cause cell death in SiHa cells by inducing changes in mitochondrial membrane permeability, which leads to cytochrome c release and activation of caspase-3. This effect is also associated with increased formation of reactive oxygen species and depletion of GSH. Combination with other anticancer drugs (or signaling inhibitors) does not appear to increase the anti-tumor effect of camptothecin against SiHa cells, but rather may reduce it. Combination of camptothecin with other anticancer drugs does not seem to provide a benefit in the treatment of cervical and uterine cancer compared with camptothecin monotherapy.

• 한국막학회:학술대회논문집
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• 한국막학회 2008년도 춘계 총회 및 학술발표회
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• pp.151-153
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• 2008

• 멤브레인
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• 제25권2호
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• pp.115-122
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• 2015

졸겔법에 의해서 trimethylborate (TMB)/tetraethylorthosilicate (TEOS) 몰비 0.01, 온도 $800^{\circ}C$에서 $SiO_2{\cdot}B_2O_3$가 제조되었다. 그리고 제조된 $SiO_2{\cdot}B_2O_3$와 PDMS[poly(dimethylsiloxane)]로부터 PDMS-$SiO_2{\cdot}B_2O_3$ 복합막을 제조하고 막의 물리화학적 특성을 TG-DTA, FT-IR, BET, X-ray, SEM에 의해 조사하고 그리고 $H_2$와 $N_2$의 투과도와 선택도를 조사하였다. TG-DTA, BET, X-ray, FT-IR 측정에 의하면 $SiO_2{\cdot}B_2O_3$는 무정형의 다공성 $SiO_2{\cdot}B_2O_3$였으며, 기공의 평균직경은 $37.7821{\AA}$, 표면적은 $247.6868m^2/g$이었다. TGA 측정에 의하면 PDMS 내에 $SiO_2{\cdot}B_2O_3$가 첨가되었을 때 PDMS-$SiO_2{\cdot}B_2O_3$ 복합막의 열적 안정성은 향상되었다. SEM 관찰에 의하면 $SiO_2{\cdot}B_2O_3$는 약 $1{\mu}m$ 크기로 PDMS 내에 덩어리 상태로 뭉쳐서 분산되어 있었다. 기체투과실험에 의하면 PDMS 내에 $SiO_2{\cdot}B_2O_3$ 함량이 증가하면 $H_2$와 $N_2$의 투과도는 증가하였고, 질소보다 Lenard Jones 분자지름이 작은 $H_2$의 투과도는 $N_2$의 투과도보다 컸으며, 선택도($H_2/N_2$)는 감소하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.113-113
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• 2009

This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on $AlN(0.1{\mu}m)/3C-SiC(1.0{\mu}m)$ suspended membranes by surface micro- machining technology. The 3C-SiC and AlN thin films which have wide energy bandgap and very low lattice mismatch were used sensors for high temperature and voltage environments. The 3C-SiC thin film was used as micro heaters and temperature sensor materials simultaneously. The implemented 3C-SiC RTD (resistance of temperature detector) and the power consumption of micro heaters were measured and calculated. The TCR (thermal coefficient of the resistance) of 3C-SiC RTD is about -5200 $ppm/^{\circ}C$ within a temperature range from $25^{\circ}C$ to $50^{\circ}C$ and -1040 $ppm/^{\circ}C$ at $500^{\circ}C$. The micro heater generates the heat about $500^{\circ}C$ at 10.3 mW. Moreover, durability of 3C-SiC micro heaters in high voltages is better than pt micro heaters. A thermal distribution measured and simulated by IR thermovision and COMSOL is uniform on the membrane surface.

• 한국막학회:학술대회논문집
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• 한국막학회 1993년도 춘계 총회 및 학술발표회
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• pp.35-35
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• 1993

튜브형 $\alpha-Al_2O_3$ 담체에 졸-겔 침지코팅법과 가압코팅(pressurized coating) 법으로 boehmite 졸과 극미세 입자 SiO$_2$ 및 TiO$_2$ 졸을 코팅한 후 200$\circ$C~500$\circ$C 에서 열처리하여 복합분리막을 제조하였다.