Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.11a
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- Pages.113-113
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- 2009
Design fabrication and characteristics of 3C-SiC micro heaters for high temperature, high powers
고온, 고전압용 SiC 마이크로 히터 설계, 제작 및 특성
- Jeong, Jae-Min (School of Electrical Eng., Univ. of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., Univ. of Ulsan)
- Published : 2009.11.12
Abstract
This paper describes the characteristics of a poly 3C-SiC micro heater which was fabricated on