• 한국전기전자재료학회논문지
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• 제19권5호
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• pp.405-410
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• 2006

We fabricated gas sensors using carbon nanotubes (CNTs) as electron emitters for the purpose of detecting inert gases. By using the silicon-glass anodic bonding and glass patterning technologies with the typical Si process, we improved the compactness of the sensors and the reliability in process. The proposed sensor, based on, an electrical discharge theory known as Paschen's law in principle, works by figuring the variation of the discharge current depending on gas concentration. In the experiment, the initial breakdown characteristics were measured for air and Ar as a function of gas pressure. As the result, even though it should be realized that there are many other factors which have an effect on the breakdown of a gap, the sensors led to similar result as predicted by Paschen's law, and they showed a possibility as gas sensors which enable to detect the gas density ranged to the vacuum pressure from 1 to $10^{-3}$ Torr.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.74-79
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• 2000

In an attempt to estimate the wetting properties of wettable metal layers by wetting balance method, an analysis of wetting curves of the coating layer was performed. Based on the analysis, wetting properties of UBM-coated Si-plate were estimated by the new wettability indices. The wetting curves of the one and both sides-coated UBM layers have the similar shape and show the similar tendency to the temperature. So the wetting property estimation of one side coating is possible with wetting balance method. For UBM of Si-chip, Cr/Cu/Au UBM is better than Ti/Ni/Au in the point of wetting time. At general reflow temperature, the wettability of high melting point solders(Sn-Sb, Sn-Ag) is better than that of few melting point ones(Sn-Bi, Sn-In).The contact angle of the one side coated plate to the solder can be calculated from the farce balance equation by measuring the static state force and the tilt angle.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.187-196
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• 2005

MEMS에서 제조 공정 오차 및 외부 응력은 진동형 자이로스코프와 같은 MEMS 소자의 제조 수율에 많은 영향을 미친다. 특히 비연성 진동형 자이로스코프의 경우 감지모드와 구동모드의 주파수 차의 특성은 수율에 직접적인 영향을 미친다. SOI (Silicon-On-Insulator) 공정 및 양극접합 공정으로 패키징된 자이로스코프의 경우, 노칭현상으로 인하여 구조물이 불균일하게 가공되며, 동시에 열팽창계수 차로 인하여 접합된 기판에 큰 휨이 발생한다. 그 결과주파수 차의 분포가 커지고, 동시에 수율은 저하되었다. 이를 개선하기 위하여 SiOG (Silicon On Glass) 기술을 적용하였다. SiOG 공정에서는 접합 후에 기판의 휨을 최소화 하기 위하여 1장의 실리콘 기관과 2장의 유리 기판을 사용하였으며, 노칭을 방지하기 위하여 금속 박막을 사용하였다. 그 결과 노칭 현상이 방지되었으며, 기판의 휨도 감소하였다. 또한 주파수 차의 분포도 매우 균일하게 되었으며, 주파수 차의 편차 또한 개선이 되었다. 그 결과 높은 수율 및 보다 강건한 MEMS 자이로스코프를 개발할 수 있었다.

• 한국환경농학회지
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• 제19권5호
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• pp.401-418
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• 2000

1. Production of the artificial zeolite from coal ash Coal fly ash is mainly composed of several oxides including $SiO_2$ and $Al_2O_3$ derived from inorganic compounds remained after burning. As minor components, $Fe_2O_3$ and oxides of Mg, Ca, P, Ti (trace) are also contained in the ash. These components are presented as glass form resulting from fusion in the process of the combustion of coal. In other word, coal ash may refer to a kind of aluminosilicate glass that is known to easily change to zeolite-like materials by hydrothermal reaction. Lots of hot seawater is disposing near thermal power plants after cooling turbine generator periodically. Using seawater in the hydrothermal reaction caused to produce low price artificial zeolite by reduction of sodium hydroxide consumption, heating energy and water cost. As coal ash were reacted hydrothermally, peaks of quartz and mullite in the ash were weakened and disappeared, and new Na-Pl peaks were appeared strengthily. Si-O-Si bonding of the bituminous coal ash was changed to Si-O-Al (and $Fe^{3+}$) bonding by the reaction. Therefore the produced Na-Pl type zeolite had high CEC of 276.7 $cmol^+{\cdot}kg^{-1}$ and well developed molecular sieve structure with low concentration of heavy metals. 2. Utilization of the artificial zeolite in agro-environment The artificial zeolite(1g) could remove 123.5 mg of zinc, 164.7 mg copper, 184.4 mg cadmium and 350.6 mg lead in the synthetic wastewater. The removability is higher 2.8 times in zinc, 3.3 times in copper, 4.7 times in cadmium and 4.8 times in lead than natural zeolite and charcoal powder. When the heavy metals were treated at the ratio of 150 $kg{\cdot}ha^{-1}$ to the rice plant, various growth inhibition were observed; brownish discoloration and death of leaf sheath, growth inhibition in culm length, number of panicles and grains, grain ripening and rice yield. But these growth inhibition was greatly alleviated by the application of artificial zeolite, therefore, rice yield increased $1.1{\sim}3.2$ times according to the metal kind. In addition, the concentration of heavy metals in the brown rice also lowered by $27{\sim}75%$. Artificial Granular Zeolites (AGZ) was developed for the purification of wastewater. Canon exchange capacity was 126.8 $cmol^+{\cdot}kg^{-1}$. AGZ had Na-Pl peaks mainly with some minor $C_3S$ peaks in X-ray diffractogram. In addition, AGZs had various pore structure that may be adhere the suspended solid and offer microbiological niche to decompose organic pollutants. AGZ could remove ammonium, orthophosphate and heavy metals simultaneously. Mixing ratio of artificial zeolite in AGZs was related positively with removal efficiency of $NH_4\;^+$ and negatively with that of $PO_4\;^{3-}$. Root growth of rice seedling was inhibited severely in the mine wastewater because of strong acidity and high concentration of heavy metals. As AGZ(1 kg) stayed in the wastewater(100L) for 4days, water quality turned into safely for agricultural usage and rice seedlings grew normally.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.300-303
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• 2004

To fill the gap of films for metal-to-metal space High density plasma fluorinated silicate glass (HDP FSG) is used due to various advantages. However, FSG films can have critical drawbacks such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. These problems are generally caused by fluorine penetration out of FSG film. Hence, FSG capping layers such like SRO(Silicon Rich Oxide) are required to prevent flourine penetration. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated through FTIR analysis. FTIR graphs of both SRO using ARC chamber and SiN show that clear Si-H bonds at $2175{\sim}2300cm^{-1}$. Thus, Si-H bond at $2175{\sim}2300cm^{-1}$ of FSG capping layers lays a key role to block fluorine penetration as well as dangling bond.

• 마이크로전자및패키징학회지
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• 제14권1호
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• pp.33-38
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• 2007

본 실험에서는 Non-Conductive Adhesive (NCA) 와 고분자 범프를 이용한 COG (Chip-on-glass) 접합에 대하여 연구하였다. 산화막이 증착된 Si 기판 위에 고분자 범프를 사진식각 방법으로 형성하고, 고분자 범프 위에 직류 마그네트론 스퍼터링 방법으로 금속 박막층을 증착하였다. 기판으로는 Al을 증착한 유리기판을 사용하였다. 두 종류의 NCA를 사용하여 $80^{\circ}C$에서 하중을 변화시켜가며 접합을 실시하였다. 접합부의 특성을 평가하기 위하여 4단자 저항 측정법을 이용하여 접합부의 접속 저항을 측정하였으며, 주사전자현미경을 이용하여 접합부를 관찰하였다. 신뢰성은 $0^{\circ}C$ 와 $55^{\circ}C$ 사이에서 열충격 실험을 2000회까지 실시하여 평가하였다. 신뢰성 측정 전 접합부의 저항 값은 $70-90m{\Omega}$을 나타내었다. 200MPa 이상의 접합 압력에서는 고분자 범프가 NCA 의 필러 파티클에 의해 손상된 것을 관찰하였다. 신뢰성 측정 후 일부 범프가 fail 되었는데 범프의 fail 원인은 범프의 윗부분보다 상대적으로 금속층이 얇게 증착된 범프의 모서리 부분의 금속층의 끊어졌기 때문이었다.

• 한국재료학회지
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• 제20권1호
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• pp.1-6
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• 2010

Geopolymer materials are attractive as inorganic binders due to their superior mechanical and eco-friendly properties. In the current study, geopolymer-based cement was prepared using aluminosilicate minerals from fly-ash with KOH as an alkaline-activator and $Na_2SiO_3$ as liquid glass. Then, calcium carbonate powder from a clam shell was mixed with the geopolymer and the mixture was coated on a concrete surface to provide points of attachment for environmental organisms to grow on the geopolymers. We investigated the effect of the shell powder grain size on the microstructure and bonding property of the geopolymers. A homogeneous geopolymer layer coated well on the concrete surface via aluminosilicate bonding, but the adhesiveness of the shell powder on the geopolymer cement was dependent on the grain size of the shell powder. Superior adhesive characteristics were shown in the shell powder of large grain size due to the deep penetration into the geopolymer by their large weight. This kind of coating can be applied to the adhesiveness of eco-materials on the surface of seaside or riverside blocks.

• 대한기계학회논문집A
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• 제34권4호
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• pp.391-398
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• 2010

금속은 가공성이 우수하기 때문에 다양한 형태의 구조물이나 격막을 제작할 수 있다. 이런 금속 구조물이나 격막에 민감도가 월등히 우수한 실리콘 스트레인 게이지를 적용할 경우 그 응용 범위가 다양해질 수 있다. 이에 금속구조물에 다결정 실리콘 스트레인 게이지를 접착한 형태의 센서를 제안하였다. 실리콘 기판을 이용해 박막형 다결정 실리콘 스트레인 게이지를 제작하기 위한 제작공정을 확립하였으며, 제작된 실리콘 스트레인 게이지를 금속 변형부 위에 접착하기 위한 접착공정을 확립하였다. 이후 금속 외팔보에 실리콘 스트레인 게이지를 글래스 프릿 접착하여 성능평가를 실시하였다. 성능평가 결과 게이지팩터는 34.0 의 값을 가졌으며, TCR(Temperature Coefficient of Resistance)은 $-328\;ppm/^{\circ}C$의 값을 가졌다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.501-502
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• 2006

In-plane type micro piezoelectric micro grippers with pneumatic lines for manipulation biological cells and micro parts were designed, fabricated, and characterized. Micro grippers were fabricated through the final micro-sanding process after wafer level bonding between the etched 4' Si wafer with pneumatic channels and 4' glass wafer. Displacements between two jaws of fabricated micro grippers were linearly increased with applying voltages to piezoelectric actuator. In the case of applying 80 V, the displacement between two jaws was $160{\mu}m$. Using fabricated micro grippers, manipulation tests for biological cell and micro parts with the sizes less than $100{\mu}m$ are in process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.26-29
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• 2004

High density plasma fluorinated silicate glass (HDP FSG) is used as a gap fill film for metal-to-metal space because of many advantages. However, FSG films can cause critical problems such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. It is known that these problems are caused by fluorine penetration out of FSG film. To prevent it, FSG capping layers such like SRO (Silicon Rich Oxide) are needed. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated. Normal stress and High stress due to denser film. While heat treatment to PETEOS caused lower blocking against fluorine penetration, it had insignificant effect on SiN. Compared with other layers, SRO using ARC chamber and SiN were shown a better performance to block fluorine penetration.