• 한국세라믹학회지
• /
• 제37권6호
• /
• pp.537-544
• /
• 2000

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 하계학술대회 논문집 B
• /
• pp.766-768
• /
• 1998

Optical Temperature Distribution measurement System (OTDS) is completely different from conventional electric point sensor in that it uses the optical fiber itself as the sensor. This new concept in temperature measuring system requires only one fiber to be laid. The use of optical fiber also gives the advantage of small diameter, light weight, explosion resistance, and electromagnetic noise resistance. The OTDS is a sensor which is capable of making a precise measurement over a wide range of areas using only a single optical fiber. Since current temperature sensors, such as the thermocouple, are only used to measure temperaturea of point, they are almost impractical for measuring a wider range because of the extremely high cost. In comparision with current sensors, the optical fiber distributed temperature sensor can make much quicker and more precise measurements at a comparatively low cost.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2004년도 춘계학술대회
• /
• pp.1364-1369
• /
• 2004

New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena.

• 센서학회지
• /
• 제31권3호
• /
• pp.163-167
• /
• 2022

In this study, we investigated a carbon nanotube (CNT) film sensor to detect hazardous and noxious substances distributed in seawater. The response change of the sensor was studied according to environmental temperature, and its temperature coefficient of resistance (TCR, α) was measured. The temperature of the CNT film (~50 ㎛) was in the range of 20-50 ℃, and αCNT was calculated to be -0.0011 %/ ℃. We experimentally confirmed that the CNT film had a smaller TCR value than that of the conventional sensor. Therefore, we investigated the response change of the CNT sensor according to temperature. The CNT sensor showed a relatively small error of approximately 2.3 % up to 30 ℃, which is within the temperature range of the seawater of the Korean Peninsula. However, when the temperature exceeded 40 ℃, the error in the CNT sensor increased by more than 5.2 %. We fabricated a metal oxide (ITO, indium-tin-oxide) film and compared its performance with that of the CNT sensor. The ITO sensor showed an error of >12.5 % at 30 ℃, indicating that in terms of the stability of the sensor to temperature, the CNT film sensor has superior performance.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
• /
• pp.140-143
• /
• 1991

This paper describes a compensation method for the rotor resistance variation of induction machines in speed sensor-less vector control system using MRAS(model reference adaptive system). In case of rotor resistance variation, the analysis of the conventional speed sensor-less vector control system using MRAS is presented and the compensation method for rotor resistance variation using Fuzzy logic is proposed. In order to confirm the performance of the proposed algorithm, computer simulation is performed.

• 한국안전학회지
• /
• 제14권1호
• /
• pp.66-72
• /
• 1999

Local heating transportation pipe has sensor and return lines to detect water-leakage. There are impulse and resistance comparison measurement types for a water-leakage detection. The impulse type shows large detection error within a measurement range. Since the resistance comparison type can find a comparative accurate single water-leakage point in the measurement range of heating pipe, it has been used to detect water-leakages these days. However if the multi water-leakages are happened in the measurement range of transportation pipe. the resistance comparison type shows a detection error point by the parallel resistance between a detection sensor line and ground. But the detection error will be minimized by the divided transportation pipe loops. In this research, it suggests the design of remote controlled detection system which can divide a large pipe loop and a possible single water-leakage measurement process in each divided loops.

• Journal of Mechanical Science and Technology
• /
• 제20권4호
• /
• pp.505-512
• /
• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• 한국전기전자재료학회논문지
• /
• 제25권2호
• /
• pp.91-95
• /
• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• 한국가시화정보학회지
• /
• 제9권2호
• /
• pp.34-39
• /
• 2011

This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.

• Journal of Biosystems Engineering
• /
• 제34권1호
• /
• pp.15-20
• /
• 2009

This study was conducted to develop a moisture sensor for rapeseed, a bio-diesel material. A typical rapeseed, SUNMANG, was used as a raw material. The rapeseed moisture content sensor consists of three components, such as upper and bottom electrodes, a test material dish, and a fixing housing. To evaluate the performance, a data acquisition system was equipped with the rapeseed moisture sensor, computer, printer, and main board. The findings of this study were: 1) the rapeseed moisture content was inversely proportional to electric resistance, and 2) values of electric resistance were recorded in a range of $10{\sim}100\;M{\Omega}$, depending upon a change of the moisture content. The determination of coefficient ($R^2$) and standard error between rapeseed moisture content and electric resistance were 0.9921 and ${\pm}0.289$, which indicated a highly correlative relationship. The response of rapeseed moisture sensor to temperature change was also observed for further performance test. Satisfying results were obtained, such as the determination of coefficient ($R^2$) of 0.9918, predicted standard error of ${\pm}0.373%$, deviation of 0.103%, measurement error of $0.14{\sim}0.48%$, standard deviation of $0.01{\sim}0.22%$, and measurement time of 28.3 s per point, respectively.