Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Humidity-Sensitive Characteristics of ${MgCr_2}{O_4}$-Based Thin-Film Humidity Sensors

${MgCr_2}{O_4}$계 박막 습도센서의 감습 특성

  • 편영미 (서울시립대학교 재료공학과) ;
  • 김태송 (한국과학기술원 박막기술연구센터) ;
  • 유광수 (서울시립대학교 재료공학과)
  • Published : 2000.06.01
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Abstract

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

Keywords

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