• 전자공학회논문지D
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• 제35D권2호
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• 한국전자파학회논문지
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• 제25권9호
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• pp.879-885
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• 2014

논문에서는 전자파(EMFs) 측정을 위한 광대역 3축 등방성 안테나를 설계 및 제작하였다. 제안된 3축 안테나의 각축에 따른 개별 안테나는 등방성 특성을 가지며, 임의의 안테나 축을 선택하기 위하여 RF 스위치를 사용하였다. 또한, 안테나의 이득 개선 및 잡음성분을 억제하기 위하여 각 축에 저항을 삽입하였고, 각 다이폴 안테나의 포트 임피던스는 발룬을 사용하여 정합하였다. 안테나의 성능 검증을 위하여, 표준전자기장을 만들어주는 GTEM Cell를 사용하여 antenna factor 및 수신감도를 도출하였다. 결과적으로, 제작된 3축 등방성 안테나는 0.03~3 GHz의 넓은 동작주파수 범위 내에서 수신감도 0.12~4.2 mV/m, VSWR(typical)은 3.3:1 이하이다.

• 천문학회보
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• 제44권2호
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• pp.79.1-79.1
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• 2019

The Schwarzchild-Chang telescope is a confocal off-axis two mirror telescope with D = 50 mm, F = 100 mm and FOV = 8 ° × 8 °. Unlike common off-axis telescopes, the mirrors of the Schwarzchild-Chang telescope share their focal points to remove the linear astigmatism. In this poster, we show the alignment process of the Schwarzchild-Chang telescope with wavefront measurement and the sensitivity table method. Wavefront is measured using the Shack-Hartmann sensor, and Zernike polynomials are obtained from measured wavefront. Sensitivity table method is to calculate alignment errors from the Zernike coefficients. As a result, we evaluate tilt, decenter, and despace of each mirror of linear astigmatism-free con-focal off-axis system.

• Journal of Information Processing Systems
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• 제19권2호
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• pp.173-188
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• 2023

To improve the shock-resistance of piezoresistive high-g accelerometer, we propose a design of piezoresistive high-g accelerometer. The accelerometer employs special-shaped proof masses system with a cross gap. Four tiny sensing beams are bonded above the cross gap. The expression of the deformation, natural frequency and damping is deduced, and the structural parameters are optimized. The accelerometer structure is simulated and verified by finite element method (FEM) simulation. The results show that the range of the accelerometer can reach 200,000 g, the natural frequency is 453.6 kHz, and the cross-axis sensitivity of X-axis and Y-axis is 0.25% and 0.11%, respectively, which can apply to the measurement of high shock. Contrastively, the cross-axis sensitivity of X-axis and Y-axis is respectively, reduced by 93.2% and 96.9%. The sensitivity of our accelerometer is 0.88 μV/g. It is of great value for the application of piezoresistive high-g accelerometer with high shock-resistance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.1033-1036
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• 2007

The optical disc drive has used a high NA objective lens and a shorter wavelength laser diode for high recording density. But high NA and shorter wavelength cause several margins to become short. Focusing and tracking servo has to be more accurate and active tilt compensation mechanism is also needed for coma aberration compensation. In this paper, we proposed 3-axis moving magnet type actuator. For 3-DOF motion, moving coil actuator has to equip 6 wires for supplying 3 independent signals. However, moving magnet type actuator doesn't need to change the configuration of wires because coils are in stator. So, we added tilting mechanism to 2-axis moving magnet actuator which is designed in previous research. Addition of the tilting mechanism cuts down the focusing sensitivity. So, maximization the tilting sensitivity and securing the focusing sensitivity are objectivities of this research. DOE (design of experiments) procedures of electromagnetic circuit are performed for parameter study and the optimization is also performed to maximize the tilt sensitivity. And then the final design is suggested and its performance is verified by FE simulation.

• 한국소음진동공학회논문집
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• 제18권9호
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• pp.905-912
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• 2008

Notion sickness is well known to be caused by long time exposure to the very low frequency motion in the multiple axes of human body Since the vestibular system for the perception of low frequency motion is located in the head, accurate measurement of 6 degree of freedom head motion is of great importance. In this study, the measurement system consisting of a safety helmet and 9 translational accelerometers was constructed for the estimation of 3 translational and 3 rotational motions of human head. Since estimation errors of 3 rotational components can be significantly magnified even by small offset of the sensitivity axis from the geometric center of an accelerometer, accurate measurement of sensitivity axis must be preceded. The method for accurate estimation of the offset was proposed, and the effect of offset on the estimation of angular acceleration was investigated.

• 정보저장시스템학회논문집
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• 제3권4호
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• pp.191-195
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• 2007

The optical disc drive has used a high NA objective lens and a shorter wavelength laser diode for high recording density. But high NA and shorter wavelength cause several margins to become short. Focusing and tracking servo has to be more accurate and active tilt compensation mechanism is also needed for coma aberration compensation. In this paper, we proposed 3-axis moving magnet type actuator. For 3-DOF motion, moving coil actuator has to be equipped with 6 wires for supplying 3 independent signals. However, moving magnet type actuator doesn't need to change the configuration of wires because coils are in stator. So, we added a tilt mechanism to the 2-axis moving magnet actuator which is designed in previous research. Addition of the tilt mechanism cuts down the focus sensitivity. So, maximization the tilting sensitivity and securing the focusing sensitivity are objectivities of this research. DOE (design of experiments) procedures of electromagnetic circuit are performed for parameter study and the optimization is also performed to maximize the tilt sensitivity. And then the final design is suggested and its performance is verified by FE simulation.

• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.132-137
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• 2022

In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change, and mass compensation for balancing of the structure. We conducted the modal analysis, drive mode analysis and sense mode analysis using COMSOL Multiphysics. As a result, a drive resonant frequency was 26003 Hz, with the x-sense, y-sense, z-sense being 26749 Hz, 26858 Hz, 26920 Hz, respectively. And the Mechanical sensitivity was computed at 2000 degrees per second(dps) input angular rate while the sensitivity for roll, pitch, and yaw was computed 0.011, 0.012, and 0.011 nm/dps respectively. And z-axis quadrature error was successfully improved, 2.78 nm to 0.95 nm, which the improvement rate was about 66 %.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.1000-1003
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• 2002

For high density optical storage, there should be a high NA objective lens and a shorter wavelength laser diode. To secure the disc tilt margin related to the coma aberration, moreover, it's difficult to apply the tilt compensation mechanism into the portable PC. In this paper, we proposed the 3-axis asymmetry pickup actuator with high efficiency symmetric magnetic circuit, which consisted of the top cover type inner yoke for high magnetic flux density, the coil stack unit for the 3-axis independent operation and vertically polarized magnets. This newly suggested actuator features DVD-RAM recording, we achieved the high focus & track AC sensitivity and the greatly stabilized system.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.208-213
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• 2003

A note-book PC has become thinner in recent years. And optical disc drives are required to have high memory capacity. Therefore, the actuator of optical disc drives must be thinner and have disc tilt compensation function for high density memory. In this paper, the hybrid type actuator is investigated for 3-axis ultra-slim actuator. A 3-axis ultra-slim actuator is designed by using the modal analysis of the actuator and the electromagnetic analysis of magnetic circuit to achieve dynamic characteristics and magnetic flux density for high sensitivity, respectively. Also, magnetic force between tilt magnet and tilt yoke is investigated to find the influence on the DC sensitivity in the focus and track directions.