Development of 3-axis Moving Magnet Type Actuator

가동 자석형 3 축 구동 엑츄에이터 개발

The optical disc drive has used a high NA objective lens and a shorter wavelength laser diode for high recording density. But high NA and shorter wavelength cause several margins to become short. Focusing and tracking servo has to be more accurate and active tilt compensation mechanism is also needed for coma aberration compensation. In this paper, we proposed 3-axis moving magnet type actuator. For 3-DOF motion, moving coil actuator has to be equipped with 6 wires for supplying 3 independent signals. However, moving magnet type actuator doesn't need to change the configuration of wires because coils are in stator. So, we added a tilt mechanism to the 2-axis moving magnet actuator which is designed in previous research. Addition of the tilt mechanism cuts down the focus sensitivity. So, maximization the tilting sensitivity and securing the focusing sensitivity are objectivities of this research. DOE (design of experiments) procedures of electromagnetic circuit are performed for parameter study and the optimization is also performed to maximize the tilt sensitivity. And then the final design is suggested and its performance is verified by FE simulation.