Improvement in Ferroelectric Properties of $SrBi_2Ta_2O_9$ Thin Films with seed Layer by Liquid Delivery Metal-Organic Chemical Vapor Deposition
(액체운반용 유기금속화학증착법으로 제조된 SBT박막의 씨앗층에 의한 강유전특성의 향상)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2001.05a
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- pp.81-81
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- 2001