• 한국산학기술학회논문지
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• 제4권1호
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• pp.22-26
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• 2003

Attenuated PSM lithography 공정에서 overlay margin 확보 및 side-lobe 제거를 위해 기존의 Cr shield 방식의 단점인 복잡한 mask 제작공정과 구조를 단순화하기 위한 방법으로 scattering bar 방식을 제안하였다. Scattering bar는 Cr 보조패턴처럼 완전히 빛을 차단하는 것이 아니라 약간의 빛을 투과시켜 보강된 intensity를 상쇄하므로 side-lobe를 억제하는 방법으로 metal pattern을 생성할 때 scattering bar도 동시에 만들어 mask제작에 필요한 공정횟수를 줄이고 mask구조 역시 단순하게 한다 그리고 동시에 DOF(depth of focus)를 향상시킨다. Background clear pattern의 경우에 발생하는 side-lobe도 scattering bar를 이용하여 효율적으로 제거되었다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2004년도 학술대회지
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• pp.784-786
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• 2004

Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2002년도 추계학술발표논문집
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• pp.201-204
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• 2002

Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

• Transactions on Electrical and Electronic Materials
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• 제5권3호
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• pp.104-108
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• 2004

Problems of overlap errors and side-lobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.159-162
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• 2004

Problems of overlap errors and sidelobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and sidelobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the sidelobes and to get additional pattern fidelity at the same time.

• 대한금속재료학회지
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• 제49권6호
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• pp.474-487
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• 2011

Bars of OFHC Cu with the diameter of 45 mm were processed by equal channel angular pressing up to 16 passes via route $B_c$, and homogeneity of their microstructures and mechanical properties was examined at every four passes which develop the equiaxed ultrafine grains. In general, overall hardness, yield strength and tensile strength increased by 3, 7, and 2 times respectively compared with those of unECAPed sample. Cross-sectional hardness exhibited a concentric distribution. Hardness was the highest at the center of bar and it decreased gradually from center to surface. After 16 passes, overall hardness decreased due to recovery and partial recrystallization. Regardless of the number of passage, yield strength and tensile strength were quite uniform at all positions, but elongation showed some degree of scattering. At 4 passes, coarse and ultrafine grains coexisted at all positions. After 4 passes, uniform equiaxed ultrafine grains were obtained at the center, while uniform elongated ultrafine grains were manifested at the upper half position. At the lower half position, grains were equiaxed but its size were inhomogeneous. It was found that inhomogeneity of grain morphology and grain size distribution at different positions are to be attributed to scattering in elongation but they did not affect strength. The present results reveal the high potential of practical application of equal channel angular pressing on fabrication of large-sized ultrafine grained bars with quite homogeneous mechanical properties.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2005년도 Proceedings of ISRS 2005
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• pp.538-541
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• 2005

Tidal flats develop along the south coast ofthe Korean peninsula. These areas are famous for sea farming. Specially, strong and coherent radar backscattering signals are observed over oyster sea farms that consist of artificial structures. Tide height in oyster farm is possible to measure by using interferometric phase and intensity of SAR data. It is assumed that the radar signals from oyster farm could be considered as double-bouncing returns by vertical and horizontal bars. But, detailed backscattering mechanism and polarimetric characteristics in oyster farm had not been well studied. We could not demonstrate whether the assumption is correct or not and exactly understand what the properties of back scattering were in oyster farm without full polarimetric data. The results of AIRSAR L-band POLSAR data, experiments in laboratory and JERS-l images are discussed. We carried out an experiment simulating a target structure using vector network analyser (Y.N.A.) in an anechoic chamber at Niigata University. Radar returns from vertical poles are stronger than those from horizontal poles by 10.5 dB. Single bounce components were as strong as double bounce components and more sensitive to antenna look direction. Double bounce components show quasi-linear relation with height of vertical poles. As black absorber replaced AI-plate in bottom surface, double bounce in vertical pole decreased. It is observed that not all oyster farms are characterized by double bounced scattering in AIRSAR data. The image intensity of the double bounce dominant oyster farm was investigated with respect to that of oyster farm dominated by single bounce in JERS-l SAR data. The image intensity model results in a correlation coefficient (R2 ) of 0.78 in double bounce dominant area while that of 0.54 in single bouncing dominant area. This shows that double bounce dominant area should be selected for water height measurement using In8AR technique.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2005년도 봄학술 발표회 논문집(II)
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• pp.325-328
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• 2005

Fiber Reinforced Polymers are recognized as the alternative materials for solving the problem due to the excellent corrosion-resistant property, light-weight and higher strength than steel. Glass fiber is superior to other fibers from the economical point of view but the mechanical property is not. For this reason, researches to improve the mechanical property of glass fiber reinforced polymer rebar has been conducted and it emerged as a solution to make the bar as a hybrid type with carbon fibers. This paper presents results of experimental program to investigate the scattering effectiveness of carbon fibers in glass FRP bar.

• 대한방사선치료학회지
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• 제9권1호
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• pp.40-45
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• 1997

When therapeutic irradiation is indicated for the orbital tumors, the greatest concern is the risk of radiation-induced cataract. Conjunctival lymphoma is one of the good examples. We would like to report the procedure of the lens shielding device(L.S.D) and the result of irradiated dose to the lens. L.S.D. consistes of two parts : load alloy to attenuate electron beam, and dental acryl which completely covers the lead alloy to avoid discomfort of cornea from contacting directly with cerrobend and side scattering by cerrobend. And for easy location and removal, side bars were made on each side. Radiation doses were meaured with TLD(TLD 3500 Hawshaw). Markus chamber in a polystyrene phantom. The phantom was irradiated with 9MeV electron beams from Clinac 2100C with $6{\times}6cm$ electron cone. The relative dose at 6mm depth where the lens is located was $4.2\%$ with TLD and $5.1\%$ with Markus chamber clinically when 2600 cGy are irradiated to the eyeball, the mapinary dose to the lens will be 109 cGy or 132 cGy, which will significently reduce the cataract.

• 한국진공학회지
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• 제16권1호
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• pp.46-51
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• 2007

포항가속기연구소의 HFMX(High Flux Macromolecular X-ray crystallography) 빔라인은 다극 위글러의 방사광을 이용한다. 따라서 고 열량부하에 적합한 두 개의 수평 및 수직 슬릿이 빔라인의 프론트엔드 영역에 설치되었다. 빔 산란을 피하면서 고 열량부하를 처리하기 위하여, 빔을 차단하는 수평 슬릿의 두 글리드콥 블록은 수직면 상에서 기울어진, $10^{\circ}$의 스침각 경사면 구조를 이루고 있다. 글리드콥 블록들은 두 개의 구동막대에 의해서 궤도대를 따라 각각 병진함으로써 슬릿의 간격을 조정한다. 구동막대 내부에 가공된 유로를 통하여 흐르는 냉각수가 두 블록의 열량부하를 냉각시킨다. 수직 슬릿은 진공용기에 대한 설치 방향과 스침각 경사면 구조의 경사각만 다를 뿐 수평 슬릿과 동일한 구조를 가지고 있다. 블록들이 궤도대 상에서 정밀하게 조정되므로 두 블록 간의 정렬이 필요치 않은 장점이 있으며 설치된 슬릿들은 안정적인 작동 성능을 보이고 있다. 또한, 두 슬릿의 냉각 성능도 만족할 만한 것으로 나타났다. 본 논문에서는 두 슬릿의 설계에 대한 상세한 설명이 제시되고 그 작동 성능을 검토한다.