• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.

• 대한기계학회논문집B
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• 제32권10호
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• pp.800-809
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• 2008

Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full $SiO_2$ SThM probes have much higher sensitivity than that of previous ones.

• 비파괴검사학회지
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• 제25권6호
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• pp.459-466
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• 2005

The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects, By monitoring the amplitude and frequency changes of the ultrasound generated as the SLS scans over a defect, the SLS technique has provided enhanced signal-to-noise performance compared to the traditional pitch-catch or pulse-echo ultrasonic methods, An extension of the SLS approach to map defects in microdevices is proposed by bringing both the generator and the receiver to the near-field scattering region of the defects, To facilitate near-field ultrasound measurement, silicon microcantilever probes are fabricated using microfabrication technique and their acoustical characteristics are investigated, Then, both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.

• Journal of electromagnetic engineering and science
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• 제14권4호
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• pp.336-341
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• 2014

Dosimetry of radiating electromagnetic wave from mobile devices to human body has been evaluated by measuring Specific Absorption Rate (SAR). Usual SAR measurement system scans the volume by robot arm to evaluate RF power absorption to human body from wireless devices. It is possible to fast estimate the volume SAR by software deleting robot moving time with the 2D surface SAR data acquired by arrayed probes. This paper shows the principle of fast SAR measurement and the measured data comparison between the fast SAR system and the robot scanning system. Data of the fast SAR is well corresponding with data of robot scanning SAR within ${\pm}3$ dB, and its dynamic range covers from 10 mW/kg to 30 W/kg with 4.8 mm probe diameter.

• ETRI Journal
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• 제26권3호
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• pp.189-194
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• 2004

We demonstrate a high-speed recording based on field-induced manipulation in combination with an optical reading of recorded bits on Au cluster films using the atomic force microscope (AFM) and the near-field scanning optical microscope (NSOM). We reproduced 50 nm-sized mounds by applying short electrical pulses to conducting tips in a non-contact mode as a writing process. The recorded marks were then optically read using bent fiber probes in a transmission mode. A strong enhancement of light transmission is attributed to the local surface plasmon excitation on the protruded dots.

• 세라미스트
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• 제10권3호
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• pp.55-66
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• 2007

Infrared Scanning Near-field Optical Microscopy (IR-SNOM) is an extremely powerful analytical instrument since it combines IR spectroscopy's high chemical specificity with SNOM's high spatial resolution. In order to do this in the infrared, specialty chalcogenide glass fibers were fabricated and their ends tapered to generate SNOM probes. The fiber tips were installed in a modified near field microscope and both inorganic and biological samples illuminated with the tunable output from a free-electron laser located at Vanderbilt University. Both topographical and IR spectral images were simultaneously recorded with a resolution of ${\sim}50\;nm$ and ${\sim}100\;nm$, respectively. Unique spectroscopic features were identified in all samples, with spectral images exhibiting resolutions of up to ${\lambda}/60$, or at least 30 times better than the diffraction limited lens-based microscopes. We believe that IR-SNOM can provide a very powerful insight into some of the most important bio-medical research topics.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1987년도 한국자동제어학술회의논문집; 한국과학기술대학, 충남; 16-17 Oct. 1987
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• pp.492-496
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• 1987

The testing philosophy and control schemes are investigated and applied to construct the Automatic Microwave Leakage Inspection System (AMLIS) . AMLIS is consists of three major parts such as Material Handling Mechanism, Fine Positioning Mechanism and Scanning Mechanism. The material Handling unit is designed to perform loading and unloading microwave oven onto the testing point by pneumatic cylinder and vacuum pump. The Fine positioning part includes X-Y-.THETA. table and distance sensing equipment. The scanning part is composed of five SCARA robots, which traverse X-Y-Z catesian coordinates respectively. The leakage testing probes are placed at the end of this each robot then the path and speed are both controlled via microprocessors. A performance test of this system combined with electric parts and software is done and the basic major function of system are accomplished.

• 산업기술연구
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• 제25권A호
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• pp.87-93
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• 2005

Three-dimensional ultrasonic probes being applied to the medical imaging can be grouped into three depending on the scanning methods, which are a mechanical type system, a free-hand system, and 2D phased arrays system. A mechanical type scanner uses a mechanically driven transducer to acquire series of 2D plane images. By integrating these images, a 3-D medical image can be constructed. A motor driving mechanism is a conventional choice for mechanically driving a transducer assembly which picks the raw ultrasonic images up. In this paper we attempt to design a 3D ultrasonic probe which has a operating mechanism of s tilting 3-D scanning. The motion of a transducer assembly of the ultrasonic probe is analytically modelled. We propose a selection procedure for the diameter of a wire rope driving the transducer assembly and the size of torsional spring which gives an initial tension to wire ropes.

• 대한전자공학회논문지
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• 제10권5호
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• pp.1-6
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• 1973

본논문은 자동급수기의 설계 및 제작연구를 한 것으로 digital scanning circuits를 이용하여 10개의 probe를 차례로 scanning하여 지표의 습도를 검출하여 reference level과 비교하여 필요한곳에 자동적으로 급수하도록 설계하였다. 이 system의 control을 위하여 main clock oscillator와 controloscillator를 사용하였고 control circuit로는 programmable unijunction transistor를 이용하여 reference level을 조절하게하여 임의의 원하는 습도에 급수하도록 하였다. 제작된 급수재는 모래의 습도가 6%에서 51%로 변화시키면서 실험하여 언제나 input level이 reference level보다 약 0.6V보다 높을때 완전동작하였으며 reference level은 임의로 조절할 수 있었다.