• Title/Summary/Keyword: SI5

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High frequency and high power PECVD를 이용한 thin film solar cell용 microcrystalline Si 증착

  • Lee, Seung-Mu;Kim, Yeong-Seok;Han, Mun-Hyeong;Byeon, Dong-Jin
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.52.2-52.2
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    • 2009
  • Si 박막형 solar cell은 Si 결정형 solar cell대비 cost 및 대면적화 측면에서 장점을 가지고 있다. 그러나 amorphous Si의 경우 light soacking에 의한 열화 문제가 있고, microcrystalline Si의 경우 요구되는 효율 확보를 위하여 $1.5{\mu}m$ 이상 두께가 필요하며, 증착율이 $5{\AA}/sec$.이하인 단점이 있다. 본 연구에서는 high deposition rate로 microcrystalline Si를 증착하기 위하여 high frequency, high power PECVD를 이용하였으며, RF power, 증착온도, H2/SiH4 ratio의 3인자를 3수준으로 변화시킨 완전요인배치 실험을 실시하였다. 실험결과 증착율은 $8.0{\AA}/sec.{\sim}52.8{\AA}/sec$ 범위, crystalline fraction은 0%~83.3% 범위의 결과를 얻었으며, 결정이 형성된 조건에서는 XRD분석결과 $2\theta=28.5$ 및 47.5에서 Si (111), (220) peak을 확인할 수 있었다. Surface Profilometer 를 이용한 surface roughness의 경우 $6.3{\AA}\sim32.4{\AA}$ 범위의 결과를 얻었으며, crystalline Portion이 높을수록 surface roughness가 증가함을 알 수 있었다.

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Radiographic Evaluation of Small Intestinal Diameter in Small Breed Dogs (소형견에서 소장 직경의 방사선학적 평가)

  • Choi, Ho-Jung;Kim, Soo-Chan;Lee, Young-Won
    • Journal of Veterinary Clinics
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    • v.29 no.4
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    • pp.301-305
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    • 2012
  • The purpose of the present study was to prove our empirical tendency of relatively high small intestinal diameter (SI) to fifth lumbar vertebral height (L5) ratio, which has been used in dogs. In this study, the ratio of SI/L5 was determined in small breed dogs weighing less than 5 kg. In addition, the effect of large volume of contrast media on the intestinal dilation was determined by performing upper gastrointestinal contrast study. Abdominal radiography and upper gastrointestinal series were performed in twelve healthy dogs weighing less than 5 kg. Small intestinal diameter (SI), fifth lumbar vertebral height (L5), and twelfth rib diameter were measured on abdominal radiographs. The range of values of SI/L5 is from 1.03 to 2.26 in plain radiography, and from 1.55 to 2.5 in contrast studies. Contrast agent significantly increased small intestinal diameter, and could be considered as mildly dilated intestinal model. Therefore, a value of 2.1 for SI/L5 is recommended as the upper limit of the normal range suggesting nonobstructive intestinal dilation.

Anatomical study on The Arm Greater Yang Small Intestine Meridian Muscle in Human (수태양소장경근(手太陽小腸經筋)의 해부학적(解剖學的) 연구(硏究))

  • Park, Kyoung-Sik
    • Journal of Pharmacopuncture
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    • v.7 no.2
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    • pp.57-64
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    • 2004
  • This study was carried to identify the component of Small Intestine Meridian Muscle in human, dividing the regional muscle group into outer, middle, and inner layer. the inner part of body surface were opened widely to demonstrate muscles, nerve, blood vessels and the others, displaying the inner structure of Small Intestine Meridian Muscle. We obtained the results as follows; 1. Small Intestine Meridian Muscle is composed of the muscle, nerve and blood vessels. 2. In human anatomy, it is present the difference between a term of nerve or blood vessels which control the muscle of Meridian Muscle and those which pass near by Meridian Muscle. 3. The inner composition of meridian muscle in human arm is as follows ; 1) Muscle ; Abd. digiti minimi muscle(SI-2, 3, 4), pisometacarpal lig.(SI-4), ext. retinaculum. ext. carpi ulnaris m. tendon.(SI-5, 6), ulnar collateral lig.(SI-5), ext. digiti minimi m. tendon(SI-6), ext. carpi ulnaris(SI-7), triceps brachii(SI-9), teres major(SI-9), deltoid(SI-10), infraspinatus(SI-10, 11), trapezius(Sl-12, 13, 14, 15), supraspinatus(SI-12, 13), lesser rhomboid(SI-14), erector spinae(SI-14, 15), levator scapular(SI-15), sternocleidomastoid(SI-16, 17), splenius capitis(SI-16), semispinalis capitis(SI-16), digasuicus(SI-17), zygomaticus major(Il-18), masseter(SI-18), auriculoris anterior(SI-19) 2) Nerve ; Dorsal branch of ulnar nerve(SI-1, 2, 3, 4, 5, 6), br. of mod. antebrachial cutaneous n.(SI-6, 7), br. of post. antebrachial cutaneous n.(SI-6,7), br. of radial n.(SI-7), ulnar n.(SI-8), br. of axillary n.(SI-9), radial n.(SI-9), subscapular n. br.(SI-9), cutaneous n. br. from C7, 8(SI-10, 14), suprascapular n.(SI-10, 11, 12, 13), intercostal n. br. from T2(SI-11), lat. supraclavicular n. br.(SI-12), intercostal n. br. from C8, T1(SI-12), accessory n. br.(SI-12, 13, 14, 15, 16, 17), intercostal n. br. from T1,2(SI-13), dorsal scapular n.(SI-14, 15), cutaneous n. br. from C6, C7(SI-15), transverse cervical n.(SI-16), lesser occipital n. & great auricular n. from cervical plexus(SI-16), cervical n. from C2,3(SI-16), fascial n. br.(SI-17), great auricular n. br.(SI-17), cervical n. br. from C2(SI-17), vagus n.(SI-17),hypoglossal n.(SI-17), glossopharyngeal n.(SI-17), sympathetic trunk(SI-17), zygomatic br. of fascial n.(SI-18), maxillary n. br.(SI-18), auriculotemporal n.(SI-19), temporal br. of fascial n.(SI-19) 3) Blood vessels ; Dorsal digital vein.(SI-1), dorsal br. of proper palmar digital artery(SI-1), br. of dorsal metacarpal a. & v.(SI-2, 3, 4), dorsal carpal br. of ulnar a.(SI-4, 5), post. interosseous a. br.(SI-6,7), post. ulnar recurrent a.(SI-8), circuirflex scapular a.(SI-9, 11) , post. circumflex humeral a. br.(SI-10), suprascapular a.(SI-10, 11, 12, 13), first intercostal a. br.(SI-12, 14), transverse cervical a. br.(SI-12,13,14,15), second intercostal a. br.(SI-13), dorsal scapular a. br.(SI-13, 14, 15), ext. jugular v.(SI-16, 17), occipital a. br.(SI-16), Ext. jugular v. br.(SI-17), post. auricular a.(SI-17), int. jugular v.(SI-17), int. carotid a.(SI-17), transverse fascial a. & v.(SI-18),maxillary a. br.(SI-18), superficial temporal a. & v.(SI-19).

Dielectric Characteristics of $Ta_2O_5$ Thin Films Prepared by ECR-PECVD (ECR-플라즈마 화학 증착법에 의해 제조된 $Ta_2O_5$ 박막의 유전 특성)

  • 조복원;안성덕;이원종
    • Journal of the Korean Ceramic Society
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    • v.31 no.11
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    • pp.1330-1336
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    • 1994
  • Ta2O5 films were deposited on the p-Si(100) substrates by ECR-PECVD and annealed in O2 atmosphere. The thicknesses of Ta2O5/SiO2 layers were measured by an ellipsometer and a cross-sectional TEM. Annealing in O2 atmosphere enhanced the stoichiometry of the Ta2O5 film and reduced the impurity carbon content. Ta2O5 films were crystallized at the annealing temperatures above 75$0^{\circ}C$. The best leakage current characteristics and the maximum dielectric constant of Ta2O5/SiO2 film capacitor were observed in the specimen annealed at $700^{\circ}C$ and 75$0^{\circ}C$, respectively. The flat band voltage of the Al/Ta2O5/SiO2/p-Si MOS capacitor was varied in the range of -0.6~-1.6 V with the annealing temperature. The conduction mechanism in the Ta2O5 film, the variation of the effective oxide charge density with the annealing temperature, and the effective electric field distribution in the Ta2O5/SiO2 double layer were also discussed.

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Design of a 1V 5.25GHz SiGe Low Noise Amplifier (1V 5.25GHz SiGe 저잡음 증폭기 설계)

  • 류지열;노석호;박세현;박세훈;이정환
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2004.05b
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    • pp.630-634
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    • 2004
  • This paper describes the design of a two stage 1V power supply SiGe Low Noise Amplifier operating at 5.25 GHa for 802.lla wireless LAN application. The achieved performance includes a gain of 17 ㏈, noise figure of 2.7㏈, reflection coefficient of 15 ㏈, IIP3 of -5 ㏈m, and 1-㏈ compression point of -14㏈m. The total power consumption of the circuit was 7 mW including 0.5mW for the bias circuit.

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Effects of Bi on Mg2Si Modification and Mechanical Properties of Mg-Al-Si Alloy (Mg-Al-Si 합금에서 Mg2Si의 개량화 및 기계적 특성에 미치는 Bi의 영향)

  • Jun, Joong-Hwan
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.2
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    • pp.82-86
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    • 2011
  • The influences of Bi addition on morphological modification of $Mg_2Si$ phase and mechanical properties were investigated in Mg-7%Al-0.5%Si casting alloy. It was found that the addition of 0.3%Bi changed the $Mg_2Si$ morphology from coarse Chinese script type to polygonal type, and significantly decreased the size to ~5 ${\mu}m$ or less with the increase of number density. The modification of $Mg_2Si$ phase by the addition of Bi resulted in the improvement of tensile properties of the Mg-Al-Si alloy at RT and $175^{\circ}C$.

Effects of Si Addition on the Microstructure and Properties of Cr-Al alloy for High Temperature Coating (고온 코팅용 Cr-Al합금의 미세조직 및 특성에 미치는 Si 첨가의 영향)

  • Kim, Jeong-Min;Kim, Il-Hyun;Kim, Hyun-Gil
    • Korean Journal of Materials Research
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    • v.29 no.1
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    • pp.7-10
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    • 2019
  • Cr-Al alloys are attracting attention as oxidation resistant coating materials for high temperature metallic materials due to their excellent high temperature stability. However, the mechanical properties and oxidation resistance of Cr-Al alloys can be further enhanced, and such attempts are made in this study. To improve the properties of Cr-Al alloys, Si is added up to 5 wt%. Casting specimens with different amounts of Si content are prepared by a vacuum arc remelting method and isothermally heated under steam conditions at $1,100^{\circ}C$ for 1 hour. The as-cast microstructure of low Si alloys is mainly composed of only a Cr phase, while $Al_8Cr_5$ and $Cr_3Si$ phases are also observed in the 5 % Si alloy. In the high Si alloy, only Cr and $Cr_3Si$ phases remain after the isothermal heating at $1,100^{\circ}C$. It is found that Si additions slightly decrease the oxidation resistance of the Cr-Al alloy. However, the microhardness of the Cr-Al alloy is observed to increase with an increasing Si content.

Nanoindentation Experiments on MEMS Device (Nanoindenter를 이용한 MEMS 제품의 기계적 특성 측정)

  • 한준희;박준협;김광석;이상율
    • Journal of the Korean Ceramic Society
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    • v.40 no.7
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    • pp.657-661
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    • 2003
  • The elastic moduli or fracture strengths of multi-layered film (SiO$_2$/po1y-Si/SiN/SiO$_2$, 2.77 $\mu\textrm{m}$ thick), CVD diamond film (1.6 $\mu\textrm{m}$ thick), SiO$_2$ film (1.0 $\mu\textrm{m}$ thick) and SiN film (0.43 $\mu\textrm{m}$ thick) made for the membrane of ink-jet printer head were measured with cantilever beam bending method using nanoindenter after fabricating in the form of micro cantilever beam (${\mu}$-CLB). And the elastic moduli of ${\mu}$-CLB of SiO$_2$ film and SiN film were compared with the value of each film on silicon substrate determined with nanoindentation method. The results showed that the modulus and strength of multi-layered film decrease from 68.08 ㎬ and 2.495 ㎬ to 56.53 ㎬ and 1.834 ㎬, respectively as the width of CLB increases from 18.5 $\mu\textrm{m}$ to 58.5 $\mu\textrm{m}$. And the elastic moduli of SiO$_2$ and SiN films measured with ${\mu}$-CLB bending method are 68.16 ㎬ and 215.45 ㎬, respectively and the elastic moduli of these films on silicon substrate measured with nanoindentation method are 98.78 ㎬ and 219.38 ㎬, respectively. These results show that with ${\mu}$-CLB bending technique, moduli can be measured to within 2%.

Effect of Si Addition on the Corrosion Resistance of CrN Coatings in a Deaerated $3.5wt.\%$ NaCl Solution (탈기된 $3.5wt.\%$ NaCl 용액 환경에서의 스테인리스 강에 증착된 CrN 박막의 Si 첨가에 따른 영향 평가)

  • Kim Woo-Jung;Choi Yoon-Seok;Kim Jung-Gu;Lee Ho-Young;Han Jeon-Gun
    • Journal of the Korean institute of surface engineering
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    • v.38 no.4
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    • pp.137-143
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    • 2005
  • CrSiN coatings of stepwise changing Si concentration were deposited on stainless steel by closed field unbalanced magnetron sputtering (CFUBM) system. Microstructure of the films due to the Si concentration is measured by XRD. The corrosion behavior of CrSiN coatings in deaerated $3.5\%$ NaCl solution was investigated by potentiodynamic test, electrochemical impedance spectroscopy (EIS) and surface analyses. The microstructure of CrSiN film depends on the Si concentration. When Si/(Cr+si) was under $11.7\%$, preferred orientation is defined at CrN(220), CrN(311) and $Cr_2N(111).$ The results of potentiodynamic polarization tests showed that the corrosion current density and porosity decreased with increasing Si/(Cr+si) ratio. EIS measurements showed that the corrosion resistance of Si-bearing CrN was improved by phase transformation of the film, which leads to increase of pore resistance and charge transfer resistance. At the Si(Cr+si) ratio of 20, the Si-bearing CrN possesses the best corrosion resistance due to the highest pore resistance and charge transfer resistance.

Magnetization Switching of MTJs with CoFeSiB/Ru/CoFeSiB Free Layers (CoFeSiB/Ru/CoFeSiB 자유층을 갖는 자기터널 접합의 스위칭 자기장)

  • Lee, S.Y.;Lee, S.W.;Rhee, J.R.
    • Journal of the Korean Magnetics Society
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    • v.17 no.3
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    • pp.124-127
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    • 2007
  • Magnetic tunnel junctions (MTJs), which consisted of amorphous CoFeSiB layers, were investigated. The CoFeSiB layers were used to substitute for the traditionally used CoFe and/or NiFe layers with an emphasis given on understanding the effect of the amorphous free layer on the switching characteristics of the MTJs. CoFeSiB has a lower saturation magnetization ($M_s\;:\;560\;emu/cm^3$) and a higher anisotropy constant ($K_u\;:\;2800\;erg/cm^3$) than CoFe and NiFe, respectively. An exchange coupling energy ($J_{ex}$) of $-0.003\;erg/cm^2$ was observed by inserting a 1.0 nm Ru layer in between CoFeSiB layers. In the Si/$SiO_2$/Ta 45/Ru 9.5/IrMn 10/CoFe 7/$AlO_x$/CoFeSiB 7 or CoFeSiB (t)/Ru 1.0/CoFeSiB (7-t)/Ru 60 (in nm) MTJs structure, it was found that the size dependence of the switching field originated in the lower $J_{ex}$ using the experimental and simulation results. The CoFeSiB synthetic antiferromagnet structures were proved to be beneficial for the switching characteristics such as reducing the coercivity ($H_c$) and increasing the sensitivity in micrometer size, even in submicrometer sized elements.