• Title/Summary/Keyword: Residual Stress Relaxation

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Numerical Analysis of Pressure and Temperature Effects on Residual Layer Formation in Thermal Nanoimprint Lithography

  • Lee, Ki Yeon;Kim, Kug Weon
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.2
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    • pp.93-98
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    • 2013
  • Nanoimprint lithography (NIL) is a next generation technology for fabrication of micrometer and nanometer scale patterns. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. To successfully imprint a nanosized pattern with the thermal NIL, the process conditions such as temperature and pressure should be appropriately selected. This starts with a clear understanding of polymer material behavior during the thermal NIL process. In this paper, a filling process of the polymer resist into nanometer scale cavities during the thermal NIL at the temperature range, where the polymer resist shows the viscoelastic behaviors with consideration of stress relaxation effect of the polymer. In the simulation, the filling process and the residual layer formation are numerically investigated. And the effects of pressure and temperature on NIL process, specially the residual layer formation are discussed.

Effect of low-temperature GaN grown at different temperature on residual stress of epitaxial GaN (저온 GaN의 성장 온도에 따른 에피택셜 GaN의 stress relaxation 효과)

  • Lee, Seung Hoon;Lee, Joo Hyung;Oh, Nuri;Yi, Sung Chul;Park, Hyung Bin;Shin, Ran Hee;Park, Jae Hwa
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.3
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    • pp.83-88
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    • 2022
  • To improve the crystallinity of GaN, there are researches on surface treatment to control the difference in physical properties between GaN and heterogeneous substrate. 'Low-temperature GaN (LT-GaN)' is one of the ways to solve the problem and we investigated the relationship between growth temperature and properties of LT-GaN in our homemade vertical type HVPE. The LT-GaN nuclei were formed on the sapphire surface at low growth temperatures and they presented differences in the density and crystallinity depending on the growth temperature. Significantly, the stress relaxation effect on the epitaxial GaN (epi-GaN) was affected by the crystallinity of LT-GaN. However, the high crystallinity of LT-GaN exacerbated the crystal quality of epi-GaN because they worked as a catalyst and seed of polycrystalline.

Experimental and numerical study on viscoelastic behavior of polymer during hot embossing process (핫엠보싱 공정의 폴리머 점탄성 거동에 대한 연구)

  • Song, N.H.;Son, J.W.;Rhim, S.H.;Oh, S.I.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.191-194
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    • 2007
  • In hot embossing lithography which has shown to be a good method to fabricate polymeric patterns for IT and bio components, it is very important to determine the proper process conditions of pressure, temperature, and time. It is also a key factor for predicting the optical properties of final product to calculate residual stress distribution after the embossing process. Therefore, to design the optimum process with right conditions, the ability to predict viscoelastic behavior of polymer during and after the hot embossing process is required. The objective of the present investigation is to establish simulation technique based on constitutive modeling of polymer with experiments. To analyze deformation behavior of viscoelastic polymer, the large strain material properties were obtained from quasi-static compression tests at different strain rates and temperatures and also stress relaxation tests were executed. With this viscoelastic material model, finite element simulation of hot embossing was executed and stress distribution is obtained. Proper process pressure is very important to predict the defect and incomplete filling.

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Effect of Surface Grinding on Low Temperature Degradation of 3Y-TZP (표면 연마가 3Y-TZP의 저온열화에 미치는 영향)

  • 김대준;이홍림;정형진
    • Journal of the Korean Ceramic Society
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    • v.30 no.2
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    • pp.164-168
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    • 1993
  • Grinding of 3mol% Y-TZP enhanced the texturing of t-ZrO2, which is represented by the increased I(002)t/I(200)t peak intensity ratio, and an asymetric broadening of (111)t peak. The degree of texturing and asymetric broadening depended on a seversity of grinding. The asymetric (111)t peak broadening was resulted by the formation of r-ZrO2. When aged at 25$0^{\circ}C$ for 120h, r-ZrO2 transformed to t-ZrO2 due to the relief of stressed surface area and the amount of tlongrightarrowm transformation inversely varied with the I(002)t/I(200)t. The inverse dependence was interpreted by that the degree of texturing determines the magnitude of residual surface stress and the lattice relaxation of t-ZrO2, which causes the low temperature degradation, is retarded as the residual stress becomes greater.

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Effect of the boundary shape of weld specimen on the stress distribution (용접시편의 테두리 모양이 응력 분포에 미치는 영향)

  • Yang, Seung-Yong;Goo, Byeong-Choon
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.348-352
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    • 2004
  • In finite element analysis of mechanical behavior of weld, typical process is first to obtain a finite element model containing residual stress by conducting welding analysis and then to examine the computational specimen for various external loading. The numerical specimen with residual stress has irregular boundary lines since one usually begins the welding analysis from a body having regular straight boundary lines and large thermal contraction takes place during cooling of weld metal. We notice that these numerical weld specimens are different from the real weld specimens as the real specimens are usually cut from a bigger weld part and consequently have straight boundaries neglecting elastic relaxation associated with the cutting. In this paper, an iterative finite element method is described to obtain a weld specimen which is bounded by straight lines. The stress distributions of two types of weld specimen, one with regular and the other with irregular boundaries, are compared to check the effect of the boundary shape. Results show that the stress distribution can be different when large plastic deformation is induced by the application of external loading. In case of elastic small deformation, the difference turns out almost negligible.

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Thermal Stress Evaluation by Elastic-Creep Analysis during Start-up of Boiler Header (보일러 헤더 기동시의 탄성 크리프 해석에 의한 열응력 평가)

  • Shin, Kyu-In;Yoon, Kee-Bong
    • Journal of the Korean Society of Safety
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    • v.24 no.2
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    • pp.17-22
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    • 2009
  • Thermal stress and elastic creeping stress analysis was conducted by finite element method to simulate start-up process of a boiler header of 500MW standard fossil power plant. Start-up temperature and operating pressure history were simplified from the real field data and they were used for the thermal stress analysis. Two kinds of thermal stress analysis were considered. In the first case only temperature increase was considered and in the second case both of temperature and operating pressure histories were considered. In the first analysis peak stress was occurred during the temperature increase from the room temperature. Hence cracking or fracture may occur at the temperature far below the operating maximum temperature. In the results of the second analysis von Mises stress appeared to be higher after the second temperature increase. This is due to internal pressure increase not due to the thermal stress. When the stress components of radial(r), hoop($\theta$) and longitudinal(z) stress were investigated, compression hoop stress was occurred at inner surface of the stub tube when the temperature increased from room temperature to elevated temperature. Then it was changed to tension hoop stress and increased because of the operating pressure. It was expected that frequent start-up and shut-down operations could cause thermal fatigue damage and cracking at the stub tube hole in the header. Elastic-creeping analysis was also carried out to investigate the stress relaxation due to creep and stabilized stress after considerable elapsed time. The results could be used for assessing the creep damage and the residual life of the boiler header during the long-tenn service.

Mechanical and Rheological Properties of Rice Plant (수도(水稻)의 역학적(力學的) 및 리올러지 특성(特性)에 관(關)한 연구(硏究))

  • Huh, Yun Kun;Cha, Gyun Do
    • Korean Journal of Agricultural Science
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    • v.14 no.1
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    • pp.98-133
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    • 1987
  • The mechanical and rheological properties of agricultural materials are important for engineering design and analysis of their mechanical harvesting, handling, transporting and processing systems. Agricultural materials, which composed of structural members and fluids do not react in a purely elastic manner, and their response when subjected to stress and strain is a combination of elastic and viscous behavior so called viscoelastic behavior. Many researchers have conducted studies on the mechanical and rheological properties of the various agricultural products, but a few researcher has studied those properties of rice plant, and also those data are available only for foreign varieties of rice plant. This study are conducted to experimentally determine the mechanical and the rheological properties such as axial compressive strength, tensile strength, bending and shear strength, stress relaxation and creep behavior of rice stems, and grain detachment strength. The rheological models for the rice stem were developed from the test data. The shearing characteristics were examined at some different levels of portion, cross-sectional area, moisture content of rice stem and shearing angle. The results obtained from this study were summarized as follows 1. The mechanical properties of the stems of the J aponica types were greater than those of the Indica ${\times}$ Japonica hybrid in compression, tension, bendingand shearing. 2. The mean value of the compressive force was 80.5 N in the Japonica types and 55.5 N in the Indica ${\times}$ Japonica hybrid which was about 70 percent to that of the Japonica types, and then the value increased progressively at the lower portion of the stems generally. 3. The average tensile force was about 226.6 N in the Japonica types and 123.6 N in the Indica ${\times}$ Japonica hybrid which was about 55 percent to that of the Japonica types. 4. The bending moment was $0.19N{\cdot}m$ in the Japonica types and $0.13N{\cdot}m$ in the Indica ${\times}$ Japonica hybrid which was 68 percent to that of the Japonica types and the bending strength was 7.7 MPa in the Japonica types and 6.5 MPa in the Indica ${\times}$ Japonica hybrid respectively. 5. The shearing force was 141.1 N in Jinju, the Japonica type and 101.4 N in Taebaeg, the Indica ${\times}$ Japonica hybrid which was 72 percent to that of Jinju, and the shearing strength of Taebaeg was 63 percent to that of Jinju. 6. The shearing force and the shearing energy along the stem portion in Jinju increased progressively together at the lower portions, meanwhile in Taebaeg the shearing force showed the maximum value at the intermediate portion and the shearing energy was the greatest at the portion of 21 cm from the ground level, and also the shearing strength and the shearing energy per unit cross-sectional area of the stem were the greater values at the intermediate portion than at any other portions. 7. The shearing force and the shearing energy increased with increase of the cross-sectional area of the rice stem and with decrease of the shearing angie from $90^{\circ}$ to $50^{\circ}$. 8. The shearing forces showed the minimum values of 110 N at Jinju and of 60 N at Taebaeg, the shearing energy at the moisture content decreased about 15 percent point from initial moisture content showed value of 50 mJ in Jinju and of 30 mJ in Taebaeg, respectively. 9. The stress relaxation behavior could be described by the generalized Maxwell model and also the compression creep behavior by Burger's model, respectively in the rice stem. 10. With increase of loading rate, the stress relaxation intensity increased, meanwhile the relaxation time and residual stress decreased. 11. In the compression creep test, the logarithmic creep occured at the stress less than 2.0 MPa and the steady-state creep at the stress larger than 2.0 MPa. 12. The stress level had not a significant effect on the relaxation time, while the relaxation intensity and residual stress increased with increase of the stress level. 13. In the compression creep test of the rice stem, the instantaneous elastic modulus of Burger's model showed the range of 60 to 80 MPa and the viscosities of the free dashpot were very large numerical value which was well explained that the rice stem was viscoelastic material. 14. The tensile detachment forces were about 1.7 to 2.3 N in the Japonica types while about 1.0 to 1.3 N in Indica ${\times}$ Japonica hybrid corresponding to 58 percent of Japonica types, and the bending detachment forces were about 0.6 to 1.1 N corresponding to 30 to 50 percent of the tensile detachment forces, and the bending detachment of the Indica ${\times}$ Japonica hybrid was 0.1 to 0.3 N which was 7 to 21 percent of Japonica types. 15. The detachment force of the lower portion was little bigger than that of the upper portion in a penicle and was not significantly affected by the harvesting period from September 28 to October 20. 16. The tensile and bending detachment forces decreased with decrease of the moisture content from 23 to 13 percent (w.b.) by the natural drying, and the decreasing rate of detachment forces along the moisture content was the greater in the bending detachment force than the tensile detachment force.

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The Effect of Internal Restraint of Rebar in Shrinkage Stress Analysis of Concrete Slab in Multistory Building (고층건물 콘크리트 슬래브의 건조수축응력 해석에서 철근의 구속효과)

  • Kim Han-Soo;Kim Jae-Keun
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 2006.04a
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    • pp.496-499
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    • 2006
  • In this study, a practical method of shrinkage stress analysis on concrete slab in multi-story building is proposed, which considers both internal restraint and external restraint variation resulting from construction sequence. The shrinkage stress due to external restraint is obtained by multiplying relaxation coefficient to elastic shrinkage stress. The additional shrinkage stress due to internal restraint is obtained by residual strain of the elastic analysis. A verification example was analyzed and compared by the proposed method and commercial analysis program that is capable of time-dependent analysis of concrete. The results of 10-story example building show that the internal restraint of reinforcement increases the shrinkage stress considerably at the slabs under loose external restraint.

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Properties and Prediction Model for Ultra High Performance Fiber Reinforced Concrete (UHPFRC): (II) Evaluation of Restrained Shrinkage Characteristics and Prediction of Degree of Restraint (초고성능 섬유보강 콘크리트(UHPFRC)의 재료 특성 및 예측모델: (II) 구속 수축 특성 평가 및 구속도 예측)

  • Yoo, Doo-Yeol;Park, Jung-Jun;Kim, Sung-Wook;Yoon, Young-Soo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.32 no.5A
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    • pp.317-325
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    • 2012
  • In this study, to evaluate the shrinkage behavior of ultra high performance fiber reinforced concrete (UHPFRC) under restrained condition, restrained shrinkage test was performed according to ring-test mostly used at home and abroad. Ring-test was performed with the various thicknesses and radii of inner steel ring to give different degree of restraint. Free shrinkage and tensile tests were carried out simultaneously to estimate the degree of restraint, stress relaxation, and shrinkage cracking potential. Test results indicated that the average steel strain and residual tensile stress were reduced as the thicker inner steel ring was used, whereas degree of restraint was increased. The steel strain, residual tensile stress and degree of restraint were hardly affected by the size of radius of inner ring. In the case of all ring specimens, shrinkage crack did not occur because the residual tensile stress was lower than the tensile strength. About 39~65% of the elastic shrinkage stress was relaxed by the sustained interface pressure, and the maximum relaxed stress was increased as the thicker inner ring was applied. Finally, the degree of restraint with age was predicted by performing non-linear regression analysis, and it was in good agreement with the test results.

UNSM Surface Technology for Manufacturing and Remanufacturing Torsion Bars for Crawler Vehicles (초음파 나노표면개질을 적용한 궤도차량용 토션바 제조 및 재제조용 표면 개질기술에 관한 연구)

  • Suh, Chang-Min;Pyoun, Young-Sik;Cho, In-Ho;Baek, Un-Bong
    • Journal of Ocean Engineering and Technology
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    • v.25 no.6
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    • pp.80-85
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    • 2011
  • The Ultrasonic Nanocrystal Surface Modification (UNSM) technology improves the fatigue life of a torsion bar by inducing compressive residual stress on the surface layer. The UNSM is applied to replace the presetting method and shot peening technology. The torsion bar must be changed periodically because of a lack of durability and a phenomenon related to the stress relaxation. The torsion fatigue test specimens were made of DIN17221 material, and the results showed that the fatigue life was 5 times more than under durability test conditions. A comparison test between the commercial vehicles' presetting method and shot peened torsion bar and the UNSM torsion bar showed that the UNSM could replace the presetting method and shot peening.