• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.114-114
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• 2008

반도체 device의 성능을 향상시키기 위하여 패턴은 더욱 더 고 집적화 되고 배선 또한 다층배선 구조를 가지게 되었으며 요구되는 선폭 또한 더욱 미세화 되어 CMP 공정이 도입되게 되었다. 이러한 CMP 공정에 사용되는 소모품으로는 크게 세 가지의 중요한 부분으로 나눌 수 있다. 그것은 slurry와 pad, conditioner이다. 그중에 pad conditioning 공정은 CMP 공정시 pad의 마모에 따라 감소하는 removal rate(RR)값을 회복시키기 위한 공정으로 마모된 pad의 표면을 활성화 시켜주는 중요한 공정이다. 하지만 pad conditioning 공정을 장시간 진행하게 되면 conditioner 표면에 오염물이 발생하게 되며, 오염물로 인하여 wafer표면에 scratch 및 defect을 발생시키는 원인이 될 수 있다. 이러한 문제점을 보완하기 위하여 conditioner의 표면을 변화시켜 공정중의 오염이 발생하지 않도록 하는 것이 중요하다. 본 논문에서는 oxide CMP 실험을 통하여 conditioner표면에 오염물이 발생함을 확인하였으며 energy dispersive spectroscopy(EDS) 분석을 통하여 주오염물의 성분이 oxide slurry중 silica임을 확인하였다. Conditioner의 표면을 소수성으로 만들기 위하여 self assembled monolayer(SAM) 방법을 이용하여 표면에 코팅을 하였으며, 소수성 박막이 코팅된 conditioner와 코팅되지 않은 conditioner의 비교 실험을 통하여 오염 정도를 비교하였다.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.6
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• pp.184-194
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• 2011

This study is to analyze the internal temperature and relative humidity of concrete at early age, as well as the mechanical behavior. Three different levels of cement unit content were cosidered as an experimental variable. In order to measure internal temperature and relative humidity immediately after concrete placement, this study developed a unique measuring device, which provided reliable results. Different cement content did not significantly affected the strengths including compressive, tensile and flexural strength and after 7 days of curing, strengths did not increase noticeably. Internal temperature reached the maximum about 11 hours later the placement and decreased after removal of forms. The internal temperature varied depending on the location and the exposure condition. In addition, the internal relative humidity was more affected by the exposure condition rather than the cement content.

• Journal of Adhesion and Interface
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• v.15 no.2
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• pp.63-68
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• 2014

Hollow mesoporous carbon nitride material with sphere shape was synthesized using polystyrene sphere as template and cyanamide as nitrogen and carbon atom sources via thermal treatment process. The process of the silica removal is not necessary because silica as template is not in use for the synthesis of hollow mesoporous carbon nitride material and any solvents are also not in use. The size of polystyrene spheres was about 170 nm. Hollow diameter and wall thickness were 82 nm and 13 nm, respectively, in hollow mesoporous carbon nitride sphere. Surface area, mesopore size and pore volume of hollow mesoporous carbon nitride material was $188m^2g^{-1}$, 3.8 nm and $0.35cm^3g^{-1}$, respectively. The wall in hollow sphere has graphitic structure. Hollow mesoporous carbon nitride material has potential applications in the area of fuel cell, catalysis, photocatalysis, electroemmision device, etc.

• Journal of the Korea Society of Computer and Information
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• v.20 no.1
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• pp.49-62
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• 2015

In this study we have proposed the prototype of design support device for architectural design assessment using the building information modeling(BIM) data and the augmented reality(AR) technology. The proposed system consists of novel hardware composition with the transparent display, the mock-up model and the digital architectural model in the new shape of frame. The removal of background and the correction of viewer point in the capture video are proposed in order to use the transparent display in AR application. The BIM data formats are reviewed to be converted for using in AR application. Also the proposed system can be expanded to multi-user collaboration system from two user system through the suggested hardware and software compositions. The results of this study will be applied to use the mock-up model and digital architectural model in order to carry out the design assessment process efficiently and economically in the architectural design field.

• Journal of Convergence for Information Technology
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• v.8 no.6
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• pp.231-236
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• 2018

Recently, a wide variety of IoT environment is being created due to the rapid development of information and communication technology. And accordingly in a variety of network structures, a countless number of attack techniques and new types of vulnerabilities are producing a social disturbance. In May of 2018, Talos Intelligence, the Cisco threat intelligence team has newly discovered 'VPN-Filter', which constitutes a large-scale IoT-based botnet, is infecting consumer routers in over 54 countries around the world. In this paper, types of IoT-based botnets and the attack techniques utilizing botnet will be examined and the countermeasure technique through EXIF metadata removal method which is the cause of connection method of C & C Server will be proposed by examining the characteristics of attack vulnerabilities and attack scenarios of VPN-Filter.

• Journal of odor and indoor environment
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• v.17 no.4
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• pp.372-380
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• 2018

To abate the problem of odor from restaurants, a hybrid adsorbent consisting of organic and inorganic materials was developed and evaluated using acetaldehyde as a model compound was deveioped and evaluated. Powders of activated carbon, bentonite, and calcium hydroxide were mixed and calcinated to form adsorbent structure. The surface area of the hybrid adsorbent was smaller than that of high-quality activated carbon, but its microscopic image showed that contours and pores were developed on its surface. To determine its adsorption capacity, both batch isotherm and continuous flow column experiments were performed, and these results were compared with those using commercially available activated carbon. The isotherm tests showed that the hybrid adsorbent had a capacity 40 times higher than that of the activated carbon. In addition, the column experiments revealed that breakthrough time of the hybrid adsorbent was 2.5 times longer than that of the activated carbon. These experimental results were fitted to numerical simulations by using a homogeneous surface diffusion model (HSDM); the model estimated that the hybrid adsorbent might be able to remove acetaldehyde at a concentration of 40 ppm for a 5-month period. Since various odor compounds are commonly emitted as a mixture when meat is barbecued, it is necessary to conduct a series of experiments and HSDM simulations under various conditions to obtain design parameters for a full-scale device using the hybrid adsorbent.

• Clean Technology
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• v.24 no.4
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• pp.301-306
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• 2018

Recently, due to the increase in the fine dust, regulations on PM generated from diesel cars are strengthened. There is a growing interest in diesel particulate filters (DPFs), a post-treatment device that removes exhaust gases from diesel vehicles. Therefore, one of the enhancements of the DPF efficiency is to reduce the pressure drop in the DPF, thereby increasing the efficiency of the filter and regeneration. In this study, the effect of cell density, channel shape, wall thickness, and inlet channel ratio of 5.66" SiC and Cordierite DPF on the pressure drop in DPF was investigated using ANSYS FLUENT simulator. As a result of the experiment, the pressure drop was smaller at 300 CPSI than 200 CPSI, and the anisotropy and O / S cell showed less than Isotropy by pressure drop of about 1,000 Pa. As the porosity increased by 10% the pressure drop was reduced by about 300 Pa and as the wall thickness increased by 0.05 mm, the pressure drop was increased by about 500 Pa.

• Journal of the Korean Physical Society
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• v.73 no.10
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• pp.1555-1560
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• 2018

$AlFe_2B_2$ produced by using a conventional arc melter has a ferromagnetic material with a Curie temperature ($T_C$) of around 300 K, but the arc-melt generates paramagnetic $Al_{13}Fe_4$ impurities during the synthesis of $AlFe_2B_2$. Impurities are brought to cause a decrease in magnetocaloric effects (MCEs). To investigate the effects of $Al_{13}Fe_4$ impurities on MCEs, we prepared and compared ascast and acid-treated samples, where the acid treatment was performed to remove the $Al_{13}Fe_4$ impurities. For the structural analysis, powder X-ray diffraction was carried out, and the measured data were subjected to a Rietveld refinement. The presence of $Al_{13}Fe_4$ impurities in the as-cast sample was observed in the phase analysis measurements. Magnetic properties were investigated by using Superconducting Quantum Interference Device (SQUID) measurements for the as-cast and the acid-treated $AlFe_2B_2$ samples. From isothermal magnetization measurements, Arrott plots were obtained showing that the transition of $AlFe_2B_2$ has a second-order magnetic phase transition (SOMT). The $T_C$ and the saturation magnetization increased for the acid-treated sample due to removal of the paramagnetic impurities. As a consequence, the magnetic entropy change ($-{\Delta}S$) increased in the pure $AlFe_2B_2$ samples, but the full width at half maximum in the plot of $-{\Delta}S$ vs. T decreased due to the absence of impurities.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.171-176
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• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• Textile Coloration and Finishing
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• v.35 no.4
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• pp.256-273
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• 2023

Among the dyeing industries, the tenter process is a process that improves the quality of fibers by drying and ironing (heat treatment) dyed fabrics, and drugs such as water repellents, antistatic agents, and fiber softeners are mainly used in these tenter processes. These drugs are vaporized in the process of treatment by high temperatures (180 ~ 230℃), and are observed in a complex form such as white smoke, oil mist, and fine dust, causing odor. To treat the complex exhaust gas at the rear end of the tenter facility, most companies operate by installing a wet scrubber and an adsorption tower alone or in parallel, but there are many problems. In particular, the insoluble oil mist at the rear end of the tenter has significantly low processing efficiency in the cleaning dust collection facility, and there is a problem in the facility by adsorption due to the occlusion phenomenon caused by the oil mist. In addition, the odor gas at the rear end of the tenter contains a lot of aldehydes, and in order to improve these various problems, a complex exhaust purification device using cyclone and electric support collector was developed. This study examined the applicability of economical and efficient technology by removing complex air pollution at the rear end of the tenter and applying improved technology than the existing technology.