• Korean Journal of Metals and Materials
• /
• v.49 no.5
• /
• pp.388-394
• /
• 2011

High speed copper filling into TSV (through-silicon-via) for three dimensional stacking of Si chips was investigated. For this study, a tapered via was prepared on a Si wafer by the DRIE (deep reactive ion etching) process. The via had a diameter of 37${\mu}m$ at the via opening, and 32${\mu}m$ at the via bottom, respectively and a depth of 70${\mu}m$. $SiO_2$, Ti, and Au layers were coated as functional layers on the via wall. In order to increase the filling ratio of Cu into the via, a PPR (periodic pulse reverse) wave current was applied to the Si chip during electroplating, and a PR (pulse reverse) wave current was applied for comparison. After Cu filling, the cross sections of the vias was observed by FE-SEM (field emission scanning electron microscopy). The experimental results show that the tapered via was filled to 100% at -5.85 mA/$cm^2$ for 60 min of plating by PPR wave current. The filling ratio into the tapered via by the PPR current was 2.5 times higher than that of a straight via by PR current. The tapered via by the PPR electroplating process was confirmed to be effective to fill the TSV in a short time.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.20 no.7
• /
• pp.648-656
• /
• 2009

We perform an analysis of the characteristics of the time-reversal pulse in Rayleigh or Ricean fading channel environments. We verify it by using Monte Carlo simulation. In a time-reversal system, each antenna in the time-reversal array receives signals from the transmitter and reverse the received signal in the time axis and then resend it to the original transmitter. We assume that the channel characteristics varies very slowly and the spatial separation between the antennas is not large. Hence the signals received by each antenna are correlated. In this paper, the effect of the correlation on the time-reversed pulse is examined, which includes the spatial properties of the time-reversal pulse such as the focus size, and spatial power distribution.

• Journal of the Institute of Electronics Engineers of Korea TE
• /
• v.37 no.3
• /
• pp.66-71
• /
• 2000

A new Soft Recovery Quasi-Resonant Converter (SR QRC) haying multiple order folding snubber network is proposed. It is combined with normal quasi-resonant converter with folding snubber network of which the surrounding components are composed of diodes and capacitors. The reverse recovery loss of main rectifier diode is eliminated by this method utilizing multiple resonance. The proposed converter has PWM capability with high efficiency and is suitable for high voltage and high power applications. By extension of this concept to other switching converters, a new family of SR PW QRC may be developed.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.236-236
• /
• 2011

본 연구 축전 결합형 고주파 플라즈마(CCP) 식각장비에 펄스 직류(Pulse DC) 전원을 인가하여 오실로스코프(oscilloscope)를 분석하여 전기적 특성을 평가하는 것이다. 펄스 직류전원 플라즈마 시스템에서는 다양한 변수를 이해하여야 한다. 본 실험에서 사용한 공정 변수는 Pulsed DC Voltage 300~500 V, Pulsed DC reverse time $0.5{\sim}2.0{\mu}s$, Pulsed DC Frequency 100~250 kHz 이었다. 실험 결과를 정리하면 1) Pulsed DC Voltage 가 증가할수록 Input voltage의 최대값은 336~520 V, 최소값은 -544~-920 V로 변하여 피크 투 피크 (peak to peak)값은 880~1460 V로 증가였다. Input current 또한 최대값은 1.88~2.88 A, 최소값은 -0.84~-1.28 A로 변하여 피크 투피크 값은 2.88~4.24 A로 증가하였다. 이는 척에 인가되는 전류와 파워의 증가를 의미한다. 2) Pulsed DC reverse time이 증가하면 Input voltage와 Input current값이 증가했다 (Input voltage의 피크 투 피크 값은 1200~1440 V, Input current의 피크 투 피크 값은 3.56~4.56 A). 3) Pulsed DC frequency가 증가하면 주기가 짧아져 Input voltage와 Input current값이 증가 한다 (Input voltage의 피크 투 피크 값은 900~1320 V, Input current의 피크 투 피크 값은 2.36~3.64 A). 결론적으로 펄스 직류 플라즈마의 다양한 전기적 변수들은 반응기 내부에 인가되는 Input voltage와 Input current의 값에 큰 영향을 준다는 것을 알 수 있었다.

• Proceedings of the KIEE Conference
• /
• 1996.07a
• /
• pp.556-558
• /
• 1996

PLS 2-GeV linac has 11 sets of high power klystron-modulator system as a main RF source for the beam acceleration. The modulators can provide 200-MW peak pulsed power(400-kV, 500-A) with a pulse width of $7.5{\mu}s$(ESW), a maximum pulse repetition rate of 120-Hz at the full power level. The DC power supply provides a 25-kV, 7-Adc and the charging system consists of a charging inductor, charging capacitor, and the diode for reverse current protection. The charged PFN voltage by a LC resonant charging method has two times of the DC high voltage and the pulsed power is delivered to the load by a thyratron switch. To reduced the press of high voltage lit thyratron switch, the command charging is the best method. In this article, the high voltage switch for the command charging method is tested to the start work and the system is presented with the experiment results of the trigger and operational characteristics.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.66 no.5
• /
• pp.792-799
• /
• 2017

The real time unmanned monitoring system of an equipment's internal parts and condition requires the monitoring device to be able to stop at a set location on the rail. However, due to the slip between the driving surface and the roller, an error occurs between the actual position and the command position. In this paper, a method to compensate the position error due to the roller slip is proposed. A proximity sensor located at both ends of the rail detects the starting point and the maximum position pulse, linearly compensating the error between the angular position of the motor and the mechanically fixed starting and maximum position pulse of the rail in forward and reverse direction. Moreover, unlike the existing servo position controller, the motor adopts the position detection method of Hall sensor in BLDC (Brushless DC) and applies an algorithm for low-speed driving so that a stable position control is possible. The proposed rail guided unmanned monitoring system with driving slip compensator was tested to verify the effectiveness.

• Journal of Korea Society of Digital Industry and Information Management
• /
• v.12 no.4
• /
• pp.25-31
• /
• 2016

In this research, to analyze the concentration of heavy metal ions in water, we tried to find the measuring time at which the faradaic electric currents flowing by the pure oxidation-reduction reaction from the pushing up mercury electrode of the stripping scan square wave voltammetry(SV+SWV) methods system becomes larger than the capacitance electric current. In order to do this, a method for analyzing signals using FPGA has been designed and we conducted 120 experiments using it. As a result, when the frequency of the square wave is 40Hz, The valid potential-current signal was measured from 96.6667% to 96.7155% of the end of the pulse of the forward and reverse, and the optimal signal was measured at 96.6667%. In addition, the experiment was carried out 40 times by changing the pulse height of the square wave from 10Mv to 40Mv. As a result, at a size smaller than 40Mv, there is little change in the magnitude of the potential-current, and an invalid signal was generated when it is out of this size.

• Journal of the Korean institute of surface engineering
• /
• v.43 no.1
• /
• pp.1-6
• /
• 2010

The effect of organic additives, 1-(3-sulfoproyl)-2-vinylpyridineium hydroxide (SVH) and thiourea (TU), on the precision copper electrodeposition was investigated with optical, electrochemical and x-ray diffraction techniques. It was found that SVH played a r ole as a n accelerator and TU as an i nhibitor during the electroreduction of cupric ions in acidic Cu electroplating solution. Through electrochemical measurements, TU showed more strong interaction with cupric ions than SVH and dominated overall Cu electroplating process when both additives were present in the solution. In the case of three dimensional Cu electrodeposition on the 20 ${\mu}m$-patterned Ni substrates, SVH controlled the upright growth of Cu electrodeposits and so determined its flatness, while TU prohibited the lateral spreading of Cu in the course of pulse-reverse pulse current adaptation. With microscopic observation, we obtained the optimum organic additives composition, that is, 100 ppm SVH and 200 ppm TU during the current pulsation.

• Journal of Power Electronics
• /
• v.18 no.4
• /
• pp.1027-1036
• /
• 2018

In this paper a new generalized space vector pulse width modulation scheme is proposed based on the principle of reverse mapping to drive the switches of multilevel inverters. This projected scheme is developed based on the middle vector of the subhexagon which holds the tip of the reference vector, which plays a major role in mapping the reference vector. A new approach is offered to produce middle vector of the subhexagon which holds tip of the reference vector in the multilevel space vector plane. By using middle vector of the subhexagon, reference vector is linked towards the inner two level sub-hexagon. Then switching vectors, switching sequence and dwell times corresponding to a particular sector of a two-level inverter are determined. After that, by using the two level stage findings, the switching vectors related to exact position of the reference vector are directly generated based on principle of the reverse mapping approach and do not need to be found at n level stage. In the reverse mapping principle, the middle vector of subhexagon is added to the formerly found two level switching vectors. The proposed generalized algorithm is efficient and it can be applied to an inverter of any level. In this paper, the proposed scheme is explained for a five-level inverter and the performance is analyzed for five level and three level inverters through MATLAB. The simulation results are validated by implementing the propose scheme on a V/f controlled three-level inverter fed induction motor using dSPACE control desk.

• The Transactions of the Korean Institute of Power Electronics
• /
• v.7 no.4
• /
• pp.346-352
• /
• 2002

A novel Zero Current Switching(ZCS) Pulse Width Modulation(PWM) boost converter with dual mode for reducing two rectifiers reverse recovery related losses is proposed. The switches of the proposed converter are operating to work alternatively turn-on and turn-off with soft switching condition In the every cycle and the proposed converter reduces the reverse recovery current, which is related switching losses and EMI problems, of the free-wheeling diode$(D_1, D_2)$ by adding the resonant inductor Lr, in series with the switch $S_1$. The switching components$(S_1, S_2, D, D_1)$ in the proposed boost converter are subjected to minimum voltage and current stresses same as those in their PWM counterparts because there are no additional active switches and resonant elements compared with the conventional ZVT PWM $converters^{[2]}$. The operation of the proposed converter, in this paper, is analyzed and to verify the feasibility of the characteristics is built and tested.