• Title/Summary/Keyword: Process Decomposition

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Exposure to Volatile Organic Compounds and Possibility of Exposure to By-product Volatile Organic Compounds in Photolithography Processes in Semiconductor Manufacturing Factories

  • Park, Seung-Hyun;Shin, Jung-Ah;Park, Hyun-Hee;Yi, Gwang-Yong;Chung, Kwang-Jae;Park, Hae-Dong;Kim, Kab-Bae;Lee, In-Seop
    • Safety and Health at Work
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    • v.2 no.3
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    • pp.210-217
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    • 2011
  • Objectives: The purpose of this study was to measure the concentration of volatile organic compound (VOC)s originated from the chemicals used and/or derived from the original parental chemicals in the photolithography processes of semiconductor manufacturing factories. Methods: A total of four photolithography processes in 4 Fabs at three different semiconductor manufacturing factories in Korea were selected for this study. This study investigated the types of chemicals used and generated during the photolithography process of each Fab, and the concentration levels of VOCs for each Fab. Results: A variety of organic compounds such as ketone, alcohol, and acetate compounds as well as aromatic compounds were used as solvents and developing agents in the processes. Also, the generation of by-products, such as toluene and phenol, was identified through a thermal decomposition experiment performed on a photoresist. The VOC concentration levels in the processes were lower than 5% of the threshold limit value (TLV)s. However, the air contaminated with chemical substances generated during the processes was re-circulated through the ventilation system, thereby affecting the airborne VOC concentrations in the photolithography processes. Conclusion: Tens of organic compounds were being used in the photolithography processes, though the types of chemical used varied with the factory. Also, by-products, such as aromatic compounds, could be generated during photoresist patterning by exposure to light. Although the airborne VOC concentrations resulting from the processes were lower than 5% of the TLVs, employees still could be exposed directly or indirectly to various types of VOCs.

High Temperature Desulfurization over ZnO-Fe2O3 Mixed Metal Oxide Sorbent (ZnO-Fe2O3 복합금속 산화물을 이용한 고온에서의 황화수소 제거에 관한 연구)

  • Lee, Jae-Bok;Lee, Young-Soo;Yoo, Kyong-Ok
    • Journal of Environmental Health Sciences
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    • v.20 no.1
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    • pp.62-67
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    • 1994
  • Introduction : Recently, water and environmental pollution becomes serious social problem and high technology makes this pollution accelerate. Hydrogen sulfide, the main subject of our research, is one of the most dangerous air pollutant like SO$_x$ and NO$_x$. The major contaminant in coal gasification is H$_2$S, which is very toxic, hazardous and extremely corrosive. Therefore, control of hydrogen sulfide to a safe level is essential. Although commercial desulfurization process called liquid scrubbing is effective for removal of H$_2$S, it has drawbacks, the loss of sensible heat of the gas and costly wastewater treatment. Many investigations are carried out about high-temperature removal ol H$_2$S in hot coal-derived gas using metal oxide or mixed metal qxide sorbents. It was reported that ZnO was very effective sorbent for H2S removal, but it has big flaw to vaporize elemental zinc above 600\ulcorner \ulcorner As alternative, metal oxides such as CaO, $Fe_2O_3$, TiO$_2$ and CuO were added to ZnO. Especially, different results are reported for $Fe_2O_3$ additive. Tamhankar et al. reported SiO$_2$ with 45 wt% $Fe_2O_3$ sorbent is favorable for removal of H$_2$S and regeneration.

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The Study of TCE Dechlorination using Geobacter lovleyi with Slow Release Substrate Applied (Slow Release Substrate를 이용한 Geobacter lovleyi의 TCE 탈염소화 연구)

  • Cha, Jae Hun;An, Sang Woo;Park, Jae Woo;Chang, Soon Woong
    • Journal of the Korean GEO-environmental Society
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    • v.13 no.9
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    • pp.53-59
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    • 2012
  • This study investigated characteristics of decomposition of tetrabutoxysilane (TBOS) as a slow release substrate (SRS) and on effect of TBOS decompostion compounds (acetate and butylate) for anaerobic dechlorination of trichloroethylene (TCE). In the batch experiment, TCE, cis-dichloroethene (cis-DCE), 1-butanol and TBOS were analysed by GC/FID and acetate and butylate were measured by HPLC. 1M of TBOS transferred and accumulated 4M of 1-butanol by abiotically hydrolysis reaction. The hydrolysis rate was in a range of 0.186 ${\mu}M/day$. On other hand, 1-butanol fermented to butyrate and acetate with indigenous culture from natural sediments. This results showed that TBOS could be used a slow release substrate in the natural sites. The dechlorinated potential of TCE with acetate and butyrate was increased with a decreasing initial TCE concentrations. In addition, first order coefficients of dechlorination with acetate as electron donor was higher then that with butyrate. It is because that dechlorination of Geobacter lovleyi was affected by substrate affinity, biodegradability and microbial acclimation on various substrates. However, dechlorinated potential of Geobacter lovleyi was decreased with accumulation cis-DCE in the anaerobic decholoronation process. The overall results indicated that SRS with Geobacter lovleyi might be a promising material for enhancing dechlorination of TCE on natural site and cis-DCE should be treated by ZVI as reductive material or by coexisting other dechlorinated bacteria.

Characteristics of the media under a self-propelled compost turner in button mushroom cultivation (양송이버섯 재배시 자주식 배지교반기 활용 배지의 특성 및 수량성)

  • Lee, Chan-Jung;Yu, Byeong-Kee;Park, Hye-sung;Lee, Eun-Ji;Min, Gyeong-Jin
    • Journal of Mushroom
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    • v.18 no.3
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    • pp.274-279
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    • 2020
  • This study was conducted to investigate the characteristics of the medium used on the composting step, comparing the excavator agitator with the self-propelled turner. The temperature of the outdoor composting medium tended to increase rapidly after flipping in the turner. The late composting medium temperature was maintained at the excavator treatment area (farm practice), and the late composting effect progressed. During the field composting stage, various microorganisms such as Bacillus spp., Actinomycetes, fluorescent Pseudomonas spp., and filamentous fungi were distributed in the medium, and the density of aerobic bacteria involved in the decomposition of the medium was increased. Under high-temperature composting conditions, blue fungi, and mesophilic actinomycetes were inhibited or killed. Thermophilic actinomycetes, which play an important role in decomposing organic matter, showed higher densities than those observed in farm practices in the self-propelled turner process. The length of rice straw was slightly shorter when the self-propelled turner was used, and the water content did not show any significant difference between treatments. The a and b values tended to increase as the inverter was turned over. The CN ratio of the composting broth was lowered from 23.1 to 16.2 for the 5th turnover in the context of farming practices, and from 23.3 to 16.9 in the context of the self-propelled turner. The yield of each treatment was increased by 20% in 1 period, 28% in 2 periods, and 26% in 3 periods; the overall yield was 23%.

Growth of Graphene Films from Solid-state Carbon Sources

  • Kwak, Jinsung;Kwon, Tae-Yang;Chu, Jae Hwan;Choi, Jae-Kyung;Lee, Mi-Sun;Kim, Sung Youb;Shin, Hyung-Joon;Park, Kibog;Park, Jang-Ung;Kwon, Soon-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.181.2-181.2
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    • 2014
  • A single-layer graphene has been uniformly grown on a Cu surface at elevated temperatures by thermally processing a poly (methyl methacrylate) (PMMA) film in a rapid thermal annealing (RTA) system under vacuum. The detailed chemistry of the transition from solid-state carbon to graphene on the catalytic Cu surface was investigated by performing in-situ residual gas analysis while PMMA/Cu-foil samples being heated, in conjunction with interrupted growth studies to reconstruct ex-situ the heating process. We found that the gas species of mass/charge (m/e) ratio of 15 ($CH_3{^+}$) was mainly originated from the thermal decomposition of PMMA, indicating that the formation of graphene occurs with hydrocarbon molecules vaporized from PMMA, such as methane and/or methyl radicals, as precursors rather than by the direct graphitization of solid-state carbon. We also found that the temperature for dominantly vaporizing hydrocarbon molecules from PMMA and the length of time, the gaseous hydrocarbon atmosphere is maintained, are dependent on both the heating temperature profile and the amount of a solid carbon feedstock. From those results, we strongly suggest that the heating rate and the amount of solid carbon are the dominant factors to determine the crystalline quality of the resulting graphene film. Under optimal growth conditions, the PMMA-derived graphene was found to have a carrier (hole) mobility as high as ${\sim}2,700cm^2V^{-1}s^{-1}$ at room temperature, which is superior to common graphene converted from solid carbon.

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Characteristics of Memory Windows of MFMIS Gate Structures (MFMIS 게이트 구조에서의 메모리 윈도우 특성)

  • Park, Jun-Woong;Kim, Ik-Soo;Shim, Sun-Il;Youm, Min-Soo;Kim, Yong-Tae;Sung, Man-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.319-322
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    • 2003
  • To match the charge induced by the insulators $CeO_2$ with the remanent polarization of ferro electric SBT thin films, areas of Pt/SBT/Pt (MFM) and those of $Pt/CeO_2/Si$ (MIS) capacitors were ind ependently designed. The area $S_M$ of MIS capacitors to the area $S_F$ of MFM capacitors were varied from 1 to 10, 15, and 20. Top electrode Pt and SBT layers were etched with for various area ratios of $S_M\;/\;S_F$. Bottom electrode Pt and $CeO_2$ layers were respectively deposited by do and rf sputtering in-situ process. SBT thin film were prepared by the metal orgnic decomposition (MOD) technique. $Pt(100nm)/SBT(350nm)/Pt(300nm)/CeO_2(40nm)/p-Si$ (MFMIS) gate structures have been fabricated with the various $S_M\;/\;S_F$ ratios using inductively coupled plasma reactive ion etching (ICP-RIE). The leakage current density of MFMIS gate structures were improved to $6.32{\times}10^{-7}\;A/cm^2$ at the applied gate voltage of 10 V. It is shown that in the memory window increase with the area ratio $S_M\;/\;S_F$ of the MFMIS structures and a larger memory window of 3 V can be obtained for a voltage sweep of ${\pm}9\;V$ for MFMIS structures with an area ratio $S_M\;/\;S_F\;=\;6$ than that of 0.9 V of MFS at the same applied voltage. The maximum memory windows of MFMIS structures were 2.28 V, 3.35 V, and 3.7 V with the are a ratios 1, 2, and 6 at the applied gate voltage of 11 V, respectively. It is concluded that ferroelectric gate capacitors of MFMIS are good candidates for nondestructive readout-nonvolatile memories.

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Determination of boron in steel by HNO3-NH4HF2 digestion and ICP-MS (질산-이플루오린화암모늄 분해 및 ICP-MS에 의한 철강 중 붕소 정량에 관한 연구)

  • Choi, Won Myung;Eum, Chul Hun;Park, Ilyong
    • Analytical Science and Technology
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    • v.27 no.6
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    • pp.352-356
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    • 2014
  • Various studies have been done to improve the properties of the steel by adding boron to the steel. Some studies have reported on the analysis of the boron in steel by AAS (atomic absorption spectrometry), ICP-OES(inductively coupled plasma-optical emission spectrometry), ICP-MS (inductively coupled plasma/mass spectrometry). The volatile loss of boron of steel in sample digestion and the separation procedure for avoiding matrix effect by high concentration of iron are difficulties for determination of boron in steel. The method to determine boron in steel by ICP-MS was developed without volatilization of boron in sample digestion step with $HNO_3-NH_4HF_2$ digestion method, and the additional separation process for avoiding matrix effect. Complete decomposition of steel with $HNO_3-NH_4HF_2$ digestion method, and boron determination by ICP-MS in the matrix of high concentration of iron were possible. Quantitative recoveries of boron in certified standard steel by new method in this study were 103 to 111%, and the relative standard deviation is less than 5%. The method detection limit was $1.17{\mu}g/g$.

Tertiarization and Changes in the Demand for Job-based Skills - Focusing on Cognitive Skills and Interactive Skills - (서비스화가 일자리 숙련구조에 미친 영향 - 인지적 숙련 및 상호적 숙련을 중심으로 -)

  • Hwang, Soo Kyeong
    • Journal of Labour Economics
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    • v.30 no.3
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    • pp.1-41
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    • 2007
  • Since Korea experienced a 'jobless growth' in 2003, creating jobs in the service sector has been considered as a top priority employment agenda. However, despite high employment outcomes in services, labor productivity remains stagnant in the service sector in recent years. A great deal of concern has been raised regarding newly created service jobs. Critics say low productivity in the service sector will harm the engine of economic growth in our country. This paper investigates the side of the demand for quality of labor, namely, the demand for skills as one of the main source of low productivity in the service sector. To analyze the changes of skills demand, this paper suggests the concept of job-based skills instead of worker-based skills and presents the way of constructing measures of job-based skills. By means of common factor analysis using job information in the Korean Dictionary of Occupational Titles, I extract 4 direct measures of job-based skills, such as cognitive skills, physical skills, fine skills, interactive skills. These skill measures are used to explore and to test how the skill structure changed in the service sector during 2002-2006. Empirical Results show that whereas the goods sector makes progress toward upskilling being represented by increased cognitive elements and softenization of tasks, the service sector, although high-educated workers increased, exhibits trends of deskilling in the sense of job-based skills during 2002-2006 in Korea. The trend of deskilling however does not seem a general aspect in the overall service sector. Rather, it seems a compound process that high-skilled jobs are created, but, on the other hand low-skilled jobs requiring physical labor are produced at the same time.

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Studies on Chemical and Biological Processes in the Keum River Estuary, Korea 2. Factors controlling chlorophyll-a distribution (금강 하구에서의 화학적, 생물학적 제과정에 관한 연구 II. Chlorlphyll-a 분포 결정 요인에 관하여)

  • 기준학;김정렬
    • 한국해양학회지
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    • v.22 no.3
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    • pp.207-215
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    • 1987
  • The Keum River Estuary was investigated two times in April and July, 1986, to study process controlling chlorophyll distribution in estuarine waters. During the surveys, distribution patterns were studied for chlorophyll-a, nutrients, ph, SPM (Suspended Particulate Matter), DO (Dissolved Oxygen), temperature, salinity, etc. During April survey(low-discharge period), sea water penetrated to Kangkyung, about 35km upstream from the constructing weir, while in July (high-discharge period) only to 3 km upstream from the weir,In April SPM showed very high concentrations (500mg/l)on the average. But very low concentrations(about10mg/l)were observed in July due to high discharge of fresh water.Chlorophyll-a concentrations showed large variations both in time and space :much higher concentraations in July than in April and sharp decrease in concentrations at the fresh water-sea water interface (April:$6.5\mu\textrm{g}/{\ell}$ for fresh waters and 41.4\mu\textrm{g}/{\ell}$ forestuarine waters). Differebce ub chlorophyll-a concentrations for these two surveys appear to be caused mainly by the difference in effectiveness of penetrating lights controlled by SPM in the waters. Sharp decrease in chlorophll-a at the fresh water-sea water interface is believed to be resulted from mass mortality of fresh water phytoplankton caused by changes in osmotic pressure in the region. Observations in the same regions such as increase in AOU(Apparent Oxygen Utilization)and ammonia, decrease in PH,probably resulted through decomposition processes of dead planktons,furtuer support the idea.

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Synthesis and Biocompatibility of the Hydroxyapatite Ceramic Composites from Tuna Bone(I) - The Sintering Properties of Hydroxyapatite and Hydroxyapatite- Containing Wollastonite Crushed with Dry Milling Process - (참치 뼈를 이용한 Hydroxyapatite 세라믹 복합체의 합성 및 생체 친화성(제1보)-건식법으로 분쇄한 Hydroxyapatite 및 Wollastonite가 첨가된 소결체의 특성-)

  • Kim, Se-Kwon;Lee, Chang-Kook;Byun, Hee-Guk;Jeon, You-Jin;Lee, Eung-Ho;Choi, Jin-Sam
    • Applied Chemistry for Engineering
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    • v.8 no.6
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    • pp.994-999
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    • 1997
  • The sintering properties of hydroxyapatite isolated from tuna bone and hydroxyapatite-containing wollastonite sintered by solid-state reaction was investigated. As the sinterability of hydroxyapatite dependent upon the particle size by dry milling, it showed a sintering. But the hydroxyapatite-containing wollastonite was appeared good sinterability. On X-ray measurements, the major phases of hydroxyapatite-containing wollastonite by solid state reaction at $1250^{\circ}C$ were identified as hydroxyapatite and pseudowollastonite(${\alpha}-CaSiO_3$). And the phases appeared as whitlockite [$Ca_3(PO_4)_2$] by decomposition of hydroxyapatite at higher temperature above $1250^{\circ}C$. The shapes of microstructure on SEM images changed from porous to dense bulk by elevating temperature. The mean bending strength of hydroxyapatite-containing wollastonite sintered by solid-state reaction at $1300^{\circ}C$ was about 18 MPa, it was close to the cancellous bone's maximum strength, 20 MPa.

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