• Korean Journal of Materials Research
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• v.14 no.6
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• pp.389-393
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• 2004

The silicide layer used as a diffusion barrier in microelectronics is typically required to be below 50 nm-thick and, the same time, the silicides also need to have low contact resistance without agglomeration at high processing temperatures. We fabricated Si(100)/15 nm-Ni/15 nm-Co samples with a thermal evaporator, and annealed the samples for 40 seconds at temperatures ranging from $700^{\circ}C$ to $1100^{\circ}C$ using rapid thermal annealing. We investigated microstructural and compositional changes during annealing using transmission electron microscopy and auger electron spectroscopy. Sheet resistance of the annealed sample stack was measured with a four point probe. The sheet resistance measurements for our proposed Co/Ni composite silicide was below 8 $\Omega$/sq. even after annealing $1100^{\circ}C$, while conventional nickel-monosilicide showed abrupt phase transformation at $700^{\circ}C$. Microstructure and auger depth profiling showed that the silicides in our sample consisted of intermixed phases of $CoNiSi_{x}$ and NiSi. It was noticed that NiSi grew rapidly at the silicon interface with increasing annealing temperature without transforming into $NiSi_2$. Our results imply that Co/Ni composite silicide should have excellent high temperature stability even in post-silicidation processes.

• Journal of the Korean GEO-environmental Society
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• v.13 no.3
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• pp.21-27
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• 2012

Estimating the thermal conductivity of clayey soils is important for enhancing the performance of geoengineering structures in cold regions and clay barriers for nuclear waste repositories, but specimen disturbance, saturation, and heat boundary conditions of the test apparatus hinder reliable measurements of the thermal conductivity of saturated clayey soils. This paper presents the results of an experimental study carried out using modified consolidation tests with the needle probe method to measure thermal conductivity. Experimental consolidation tests with saturated kaolinite were performed to investigate the effect of effective stress and dry density on thermal conductivity for saturated kaolinite. In addition, thermal conductivity of soil particles were thoroughly investigated and experimental results were used to evaluate the accuracy of the models to predict thermal conductivity.

• Geotechnical Engineering
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• v.13 no.4
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• pp.109-120
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• 1997

In the working stress conditions, the strain level in a soil mass experienced by existing structures and during construction is less than about 0.1-1%. In order to analyse the deformational behavior accurately, the in-situ testing technique which provides the reliable deformational characteristics at small strains, needs to be developed. The purpose of this paper is to measure the small-strain shear modulus of soils by using pressuremeter test(PMT). PMT is a unique method for assessing directly the in-situ shear modulus of soils with strain amplitude. For the accurate small strain measurements without initial disturbance effect, the unloading-reloading cycle was used and the measured modulus was corrected in view of the relevant stress and strain levels around the PMT probe during testing. Not only in the calibration chamber but in the field, PMT tests were performed on the cohesionless soils. The variation in shear modulus with strain amplitude ranging from 10-2% to 0.5% was reliably determined by PMT PMT results were also compared with other in-situ and laboratory test results. Moduli obtained from different testing techniques matched very well if the effect of strain amplitude was considered in the com pall son.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1803-1805
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• 1998

Electron temperature, electron density and electron energy distribution function were measured in Radio-Frequency Inductively Coupled Plasma(RFICP) using a probe method. Measurements were conducted in argon discharge for pressure from 10 mTorr to 40 mTorr and input rf power from 100W to 600W and flow rate from 3 sccm to 12 sccm. Spatial distribution electron temperature and electron density and electron energy distribution function were measured for discharge with same aspect ratio(R/L=2). Electron temperature was found to depend on pressure, but only weakly on power. Electron density and electron energy distribution function strongly depended on both pressure and power. Electron density and electron energy distribution function increased with increasing flow rate. Radial distribution of the electron density and electron energy distribution function were peaked in the plasma center. Normal distribution of the electron density electron energy distribution function were peaked in the center between quartz plate and substrate. These results were compared to a simple model of ICP, then we found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.521-529
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• 2002

We have recently proposed the new concept of a phase-measuring volumetric interferometer that enables us to accurately measure the xyz-coordinates of the probe without metrology frames. The interferometer is composed of a movable target and a fixed photo-detector array. The target is made of point diffraction sources to emit two spherical wavefronts, whose interference is monitored by an array of photo-detectors. Phase shifting is applied to obtain the precise phase values of the photo-detectors. Then the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. The proposed interferometer has been designed and built with a volumetric uncertainty of less than 1.0 $\mu\textrm{m}$ within a cubic working volume of side 120 mm. Here, in this paper, we also present error sources, an evaluated uncertainty, and test results from the prototype system. The self-calibration of two-dimensional precision metrology stages is applied to test the performance of the interferometer.

• The Journal of Engineering Research
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• v.2 no.1
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• pp.165-174
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• 1997

It is not possible to define the earth's interior because of it complicity. However, it can be interpreted directly and/ or indirectly. Geophysics is the subject of this study. To study the possibility of construction supervision by geophysical method, geophysical prospecting was performed and studied at the SamYang pumping well area in Cheju Island, where, although underground dam was constructed, the saline water invade the pumping well area. This study focuses on the construction supervision by electrical measurements. Two electric resistivity survey lines are installed in the pumping well site, and at each line electric survey was conducted at ebb and flow tides. To increase the data quality SP (self-potential) survey was also performed. As a result the geophysical exploration methods explained the defect of construction well, and It shows that geophysical probe can be a useful tool for the construction supervision.

• Journal of Periodontal and Implant Science
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• v.31 no.3
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• pp.625-631
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• 2001

The anatomic structure around interproximal area plays an important role not only in the natural teeth, but also in the implant. The loss of papilla can lead to cosmetic deformity, phonetic problem, food impaction on the anterior dentition, and masticatory problem, food impaction and proximal caries on the posterior dentition. The purpose of this study was to evaluate the relationship between interdental papilla existence and distance from contact point to alveolar crest in Korean posteior dentition. 45 Korean adult patients(31males, 14 females) participated in this study. Measurements were carreid out total 126 interproximal areas, 18 first premolar, 31 second premolar, 40 first molar, and 37 second molar areas. Papilla index was recorded as suggested by Jemt. Distance between contact point and alveolar crest measrued by Florida $probe^{R}$, after flap elevation. Each distance was measured 10 times by every 0.1mm unit. The results showed that the mean Papilla index 1.37 and mean distance between contact point and alveolar crest was 7.44mm. The correlation between the Papilla index and distance was high negative correlation(Pearson correlation=-0.47), and it was statistically significant(P=0.000) When the distance between contact point and alveolar crest was 5mm, the loss of papilla was appeared almost in half cases. When the distance was 6mm, the papilla loss was present 95%, when 7mm, the papilla loss was 100%.

• Journal of IKEEE
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• v.17 no.2
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• pp.182-188
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• 2013

Using a ceramic target ZnO:In with In doping concentration of 2%, hetero-junctions of n-ZnO:In/p-Si and p-ZnO:(In, N)/n-Si were fabricated by depositing Indium doped n - type ZnO (ZnO:In or IZO) and Indium-nitrogen co-doped p - type ZnO (ZnO:(In, N)) films on wafers of p-Si (100) and n-Si (100) by DC magnetron sputtering, respectively. These films with the best electrical and optical properties were then obtained. The micro-structural, optical and electrical properties of the n-type and p-type semiconductor thinfilms were characterized by X-ray diffraction (XRD), RBS, UV-vis; four-point probe resistance and room-temperature Hall effect measurements, respectively. Typical rectifying behaviors of p-n junction were observed by the current-voltage (I-V) measurement. It shows fairly good rectifying behavior with the fact that the ideality factor and the saturation current of diode are n=11.5, Is=1.5108.10-7 (A) for n-ZnO:In/p-Si hetero-jucntion; n=10.14, Is=3.2689.10-5 (A) for p-ZnO:(In, N)/n-Si, respectively. These results demonstrated the formation of a diode between n-type thin film and p-Si, as well as between p-type thin film and n-Si..

• The Journal of Advanced Prosthodontics
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• v.5 no.2
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• pp.167-171
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• 2013

PURPOSE. The purpose of this case series was to evaluate the effect of guided bone regeneration using demineralized allogenic bone matrix with calcium sulfate. MATERIALS AND METHODS. Guided bone regeneration using Demineralized Allogenic Bone Matrix with Calcium Sulfate ($AlloMatrix^{TM}$, Wright. USA) was performed at the time of implant placement from February 2010 to April 2010. At the time of the second surgery, clinical evaluation of bone healing and histologic evaluation were performed. The study included 10 patients, and 23 implants were placed. The extent of bony defects around implants was determined by measuring the horizontal and vertical bone defects using a periodontal probe from the mesial, distal, buccal, and lingual sides and calculating the mean and standard deviation of these measurements. Wedge-shaped tissue samples were obtained from 3 patients and histologic examination was performed. RESULTS. In clinical evaluation, it was observed that horizontal bone defects were completely healed with new bones, and in the vertical bone defect area, 15.1% of the original defect area remained. In 3 patients, histological tests were performed, and 16.7-41.7% new bone formation was confirmed. Bone graft materials slowly underwent resorption over time. CONCLUSION. $AlloMatrix^{TM}$ is an allograft material that can be readily manipulated. It does not require the use of barrier membranes, and good bone regeneration can be achieved with time.

• Journal of the Korean Ceramic Society
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• v.52 no.5
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• pp.299-303
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• 2015

The electrolyte is an important component in determining the performance of Fuel Cells. Especially, investigation of the conduction properties of electrolytes plays a key role in determining the performance of the electrolyte. The electrochemical properties of Yttrium stabilized zirconia (YSZ) were measured to allow the use of this material as an electrolyte for solid oxide fuel cells (SOFC) in the temperature range of $700-1000^{\circ}C$ and in $0.21{\leq}pO_2/atm{\leq}10^{-23}$. A Hebb-Wagner polarization experimental cell was optimally manufactured; here we discuss typical problems associated with making cells. The partial conductivities due to electrons and holes for 8YSZ, which is known as a superior oxygen conductor, were obtained using I-V characteristics based on the Hebb-Wagner polarization method. Activation energies for holes and electrons are $3.99{\pm}0.17eV$ and $1.70{\pm}0.06eV$ respectively. Further, we calculated the oxygen ion conductivity with electron, hole, and total conductivity, which was obtained by DC four probe conductivity measurements. The oxygen ion conductivity was dependent on the temperature; the activation energy was $0.80{\pm}0.10eV$. The electrolyte domain was determined from the top limit, bottom limit, and boundary (p=n) of the oxygen partial pressure. As a result, the electrolyte domain was widely presented in an extensive range of oxygen partial pressures and temperatures.