Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Measurement of Electron Energy Distribution of the Radio-Frequency Inductively Coupled Plasma

고주파 유도결합 플라즈마의 전자에너지 분포 계측 (II)

  • Hwang, Dong-Won (Dept. of Electrical & Electronic Engineering of Yeungnam University) ;
  • Ha, Chang-Ho (Dept. of Electrical & Electronic Engineering of Yeungnam University) ;
  • Jeon, Yong-Woo (Dept. of Electrical & Electronic Engineering of Yeungnam University) ;
  • Choi, Sang-Tae (Dept. of Computer Information Engineering of Kyong-Ju University) ;
  • Park, Won-Zoo (Dept. of Electrical & Electronic Engineering of Yeungnam University) ;
  • Lee, Kwang-Sik (Dept. of Electrical & Electronic Engineering of Yeungnam University) ;
  • Lee, Dong-In (Dept. of Electrical & Electronic Engineering of Yeungnam University)
  • 황동원 (영남대학교 전기전자 공학부) ;
  • 하장호 (영남대학교 전기전자 공학부) ;
  • 전용우 (영남대학교 전기전자 공학부) ;
  • 최상태 (경주대학교 컴퓨터 정보공학부) ;
  • 박원주 (영남대학교 전기전자 공학부) ;
  • 이광식 (영남대학교 전기전자 공학부) ;
  • 이동인 (영남대학교 전기전자 공학부)
  • Published : 1998.07.20
Download PDF
⟨ Previous Next ⟩

Abstract

Electron temperature, electron density and electron energy distribution function were measured in Radio-Frequency Inductively Coupled Plasma(RFICP) using a probe method. Measurements were conducted in argon discharge for pressure from 10 mTorr to 40 mTorr and input rf power from 100W to 600W and flow rate from 3 sccm to 12 sccm. Spatial distribution electron temperature and electron density and electron energy distribution function were measured for discharge with same aspect ratio(R/L=2). Electron temperature was found to depend on pressure, but only weakly on power. Electron density and electron energy distribution function strongly depended on both pressure and power. Electron density and electron energy distribution function increased with increasing flow rate. Radial distribution of the electron density and electron energy distribution function were peaked in the plasma center. Normal distribution of the electron density electron energy distribution function were peaked in the center between quartz plate and substrate. These results were compared to a simple model of ICP, then we found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

Keywords