• Title/Summary/Keyword: Precision metrology

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Ultrafast Femtosecond Lasers: Fundamentals and Applications (펨토초 레이저의 원리 및 응용)

  • Kim, Young-Jin;Kim, Yun-Seok;Kim, Seung-Man;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.6
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    • pp.7-16
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    • 2010
  • Physical fundamentals of ultrashort femtosecond lasers are addressed along with emerging applications for precision manufacturing and metrology. Femtosecond lasers emit short pulses whose temporal width is in the range of less than a picosecond to a few femtoseconds, thereby enabling extremely high peak-power machining with less thermal damages. Besides, the broad spectral bandwidth of femtosecond lasers constructed in the form of frequency comb permits absolute distance measurements leading to ultraprecision positioning control and dimensional metrology.

Design and Fabrication of a Step Height Certified Reference Material for Multi-probe Inspection Instruments (다중 프로브 검사 계측 장비를 위한 단차 표준 인증 물질의 설계 및 제작)

  • Maeng, Sae-Rom;Jin, Jong-Han;Buajarern, Jariya;Kim, Jae-Wan;Kim, Jong-Ahn;Kang, Chu-Shik
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.3
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    • pp.323-329
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    • 2011
  • Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multi-probe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of $10{\times}$ and $100{\times}$. CRMs with nominal step heights of $0.5\;{\mu}m$, $1\;{\mu}m$, $3\;{\mu}m$, $5\;{\mu}m$, $7\;{\mu}m$, and $10\;{\mu}m$ were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm ($1{\sigma}$).

Fabrication of Large-area Micro-lens Arrays with Fast Tool Control

  • Noh, Young-Jin;Arai, Yoshikazu;Tano, Makoto;Gao, Wei
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.4
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    • pp.32-38
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    • 2008
  • This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

Accurate Determination of Spring Constants of Micro Cantilevers for Quantified Force Metrology in AFM (AFM에서의 정량적 힘 측정을 위한 마이크로 캔틸레버의 강성 교정)

  • Kim, Min-Seok;Choi, Jae-Hyuk;Kim, Jong-Ho;Park, Yon-Kyu
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.6
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    • pp.96-104
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    • 2007
  • Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

The Determination of Temperature and Humidity Sensitivity Coefficients of Torque Transducers using Seasonal Climatic Changes of Ambient Conditions in the Laboratory (계절에 따른 실험실 환경변화를 이용한 토크측정기의 온도 및 습도 감도계수 결정)

  • Derebew, Mulugeta;Kim, Min Seok;Park, Yon Kyu;Lee, Ho Young
    • Journal of the Korean Society for Precision Engineering
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    • v.32 no.2
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    • pp.185-190
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    • 2015
  • This paper presents a new method to determine sensitivity coefficients of temperature and humidity of torque transducers by using a natural and seasonal variation of ambient conditions at the laboratory. We had measured the sensitivities of the torque transducers over almost one year using the KRISS 2 kN m torque standard machine. The sensitivity data acquired at various ambient conditions were processed using our measurement model to extract the sensitivity coefficients of temperature and humidity simultaneously with high precision. A comparison with a previous method using an environmental control chamber was carried out to test the feasibility of using our new method. Two results agreed within the uncertainty. We revealed that the torque measuring errors could be 8 times higher than the measurement and calibration capability of KRISS torque standard machine if the sensitivity changes due to the temperature and humidity are not properly corrected during a calibration.

Three Dimensional Metrology of Surface Mounted Solder Pastes Using Bounding Box Formed by Histogram of Gradient Vectors of Point Cloud (점군의 기울기벡터 히스토그램에 의해 형성된 구속상자를 이용한 표면실장 솔더페이스트의 3차원 Metrology)

  • 신동원
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.674-677
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    • 2003
  • This work presents a method of point-to-surface assignment for 3D inspection of solder pastes on PCB. A bounding box enclosing the solder paste tightly on all sides is introduced to avoid incorrect point-to-surface assignment. The shape of bounding box for solder paste brick is variable according to geometry of measured points. The surface geometry of the bounding box is obtained by using five peaks selected from the histogram of normalized gradient vectors for measured points. By using the bounding box enclosing the solder paste. the task of point-to-surface assignment is successfully executed. Subsequently, the geometrical features are obtained via surface fitting.

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International Time Comparison by TWSTFT and GPS at KRISS

  • Hwang, Sang-wook;Lee, Chang Bok;Lee, Jong Koo;Lee, Young Kyu;Lee, Sang Jeong;Yang, Sung-hoon
    • Journal of Positioning, Navigation, and Timing
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    • v.5 no.2
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    • pp.67-74
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    • 2016
  • In this paper, time comparison is performed with standardization institution in Japan using a Two-Way Satellite Time and Frequency Transfer (TWSTFT) technique as one of the methods for high precision time comparison. To analyze the performance of time comparison in the TWSTFT method, time comparison results via the Global Positioning System (GPS) code and carrier wave are analyzed. Through the time comparison performance, frequency stability is analyzed using modified Allan deviation and by this result, characteristics of time comparison of the TWSTFT that is utilized in international time comparison are presented.