International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Fabrication of Large-area Micro-lens Arrays with Fast Tool Control

  • Noh, Young-Jin (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University) ;
  • Arai, Yoshikazu (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University) ;
  • Tano, Makoto (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University) ;
  • Gao, Wei (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University)
  • Published : 2008.10.01
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Abstract

This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

Keywords

References

  1. He, M., Yuan, X. C. and Ngo, N. Q., 'Single-step Fabrication of a Microlens Array in Sol-gel Material by Direct Laser Writing and its Application in Optical Coupling,' Journal of Pure Optics, Vol. 6, No. 1, pp. 94-97, 2004 https://doi.org/10.1088/1464-4258/6/1/017
  2. Sim, J. H., Lee, E. D. and Kweon, H. J., 'Effect of the Laser Beam Size on the Cure Properties of a Photopolymer in Stereolithography,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 50-55, 2007
  3. Yang, R., Soper, S. A. and Wang, W. J., 'Microfabrication of Pre-aligned Fiber Bundle Couplers Using Ultraviolet Lithography of SU-8,' Sensors and Actuators A-Physical, Vol. 127, No. 1, pp. 123-130, 2006 https://doi.org/10.1016/j.sna.2005.11.007
  4. Dubey, A. K. and Yadava, V., 'Simultaneous Optimization of Multiple Quality Characteristics in Laser Beam Cutting Using Taguchi Method,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 10-15, 2007
  5. Huang, Y. P., Shien, H. P. D. and Wu, S. T., 'Applications of Multidirectional Asymmetrical Micro-lens Aarray Light-Control Films on Reflective Liquid Cristal Displays for Image Quality Enhancement,' Applied Optics, Vol. 43, No. 18, pp. 3656-3663, 2004 https://doi.org/10.1364/AO.43.003656
  6. Kim, D. S., Chang, I. C. and Kim, S. W., 'Microscopic Topographical Analysis of Tool Vibration Effects on Diamond Turned Optical Surfaces,' Precision Engineering, Vol. 26, No. 2, pp. 168-174, 2002 https://doi.org/10.1016/S0141-6359(01)00115-5
  7. Sharma, V. S, Dhiman, S., Sehgal, R. and Sharma, K., 'Assessment and Optimization of Cutting Parameters while Turning AISI 52100 Steel,' International Journal of Precision Engineering and Manufacturing, Vol. 9, No. 2, pp. 54-62, 2008
  8. http://www.precitech.com
  9. Gao, W., Araki, T., Kiyono, S., Okazaki, Y. and Yamanaka, M., 'Precision Nano-fabrication and Evaluation of a Large Area Sinusoidal Grid Surface for a Surface Encoder,' Precision Engineering, Vol. 27, No. 3, pp. 289-298, 2003 https://doi.org/10.1016/S0141-6359(03)00028-X
  10. Woronko, A., Huang, J. and Altintas, Y., 'Piezoelectric Tool Actuator for Precision Machining on Conventional CNC Turning Centers,' Precision Engineering, Vol. 27, pp. 335-345, 2003 https://doi.org/10.1016/S0141-6359(03)00040-0
  11. Tano, M., Gao, W., Kimura, A., Sanuki, T., Noh, Y. J. and Kiyono, S., 'Integration of a Force Sensor into a Fast-Tool-Control Unit for Fabrication of Large Area Microlens Array,' Journal of the Chinese Society of Mechanical Engineers, Vol. 27, No. 5, pp. 555-560, 2006
  12. Holman, A. E., Scholte, P. M. L. O, Heerens, W. Chr. and Tuinstra, F., 'Analysis of Piezo Actuator in Translation Construction,' Review of Scientific Instruments, Vol. 66, No. 5, pp. 3208-3215, 1995 https://doi.org/10.1063/1.1145552
  13. Gao, W., Hocken, R., Patten, J. and Lucca, D., 'Construction and Testing of a Nano-machining Instrument,' Precision Engineering, Vol. 24, No. 4, pp. 320-328, 2000 https://doi.org/10.1016/S0141-6359(00)00042-8
  14. Gao, W., Hocken, R., Patten, J. and Lovingood, J., 'Force Measurement in a Nanomachining Instruments,' Review of Scientific Instruments, Vol. 71, No. 11, pp. 4325-4329, 2000 https://doi.org/10.1063/1.1319976
  15. Kim, H. S. and Kim, E. J., 'Feed-forward Control of Fast Tool Servo for Real-time Correction of Spindle Error in Diamond Turning of Flat Surface,' International Journal of Machine Tools & Manufacture, Vol. 43, Issue 12, pp. 1177-1183, 2003 https://doi.org/10.1016/S0890-6955(03)00156-1