• ETRI Journal
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• v.16 no.1
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• pp.45-57
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• 1994

The effects of reactive ion etching (RIE) of $SiO_2$ layer in $CHF_3/C_2F_6$ on the underlying Si surface have been studied by X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometer, Rutherford backscattering spectroscopy, and high resolution transmission electron microscopy. We found that two distinguishable modified layers are formed by RIE : (i) a uniform residue surface layer of 4 nm thickness composed entirely of carbon, fluorine, oxygen, and hydrogen with 9 different kinds of chemical bonds and (ii) a contaminated silicon layer of about 50 nm thickness with carbon and fluorine atoms without any observable crystalline defects. To search the removal condition of the silicon surface residue, we monitored the changes of surface compositions for the etched silicon after various post treatments as rapid thermal anneal, $O_2$, $NF_3$, $SF_6$, and $Cl_2$ plasma treatments. XPS analysis revealed that $NF_3$ treatment is most effective. With 10 seconds exposure to $NF_3$ plasma, the fluorocarbon residue film decomposes. The remained fluorine completely disappears after the following wet cleaning.

• Journal of the Korean Society of Clothing and Textiles
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• v.26 no.3_4
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• pp.464-472
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• 2002

The aim of this study was to elucidate dyeability and antimicrobial activity of cotton fabrics dyed with Sophora Radix extracts according to various mordants. Dyes were extracted from Sophora Radix using ethanol. Then, cotton fabrics were dyed with extracts two times by post-mordanting method in which the extract was 60% (owf, the mordant was 3% (owf), L.R was 1:20, the temperature was 60~7$0^{\circ}C$, the time of dyeing was 60min., and the time of mordanting was 60min.. The dyeability was evaluated by surface color and color fastness. The skin microorganism was evaluated on S. sureus, B. subtilis, S. epidermidis, P. acnes, P. aeruginosa, E. coli, A. niger, C. albicans and T. mentagrophytes. The results are as follows; 1. When mordants were treated, surface color was 3.3Y to 0.1 GY in H (hue) value which indicated greenish yellow to yellow 2. The color fastness to perspiration, dry-cleaning, rubbing, and washing stain fabric showed 4~5 degree. The color fastness to light was improved to 4 degree by treatment of mordants. The color fastness to washing was 2 degree which was somewhat poor. 3. Cotton dyed with ethanol extracts was excellent on S. aureus, B. subtilis, S. epidermidis and p. antis. But that showed poor antibacterial activities on P. aeruginosa and E. coli such as gram negative baterials 4. Antibacterial activity of cotton fabrics dyed didn't be improved by treatment of mordant 5. Antifungal activity of cotton dyed with ethanol extracts was excellent on T. mentagrophytes. Especially, on T. mentagrophytes there was no growth of fungus during 72 hours in cotton dyed mordanting with SnCl$_2$.$_2$$H_2O$.

• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Particle and aerosol research
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• v.15 no.1
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• pp.1-13
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• 2019

Current desulfurization and denitrification technologies have reached a considerable level in terms of reduction efficiency. However, when compared with the simultaneous reduction technology, the individual reduction technologies have issues such as economic disadvantages due to the difficulty to scale-up apparatus, secondary pollution from wastewater/waste during the treatment process, requirement of large facilities for post-treatment, and increased installation costs. Therefore, it is necessary to enable practical application of simultaneous SOx and NOx treatment technologies to remove two or more contaminants in one process. The present study analyzes a technology capable of maintaining simultaneous treatment of SOx and NOx even at low temperatures due to the electrochemically generated strong oxidation of the wet-pulse complex system. This system also reduces unreacted residual gas and secondary products through the wet scrubbing process. It addresses common problems of the existing fuel gas treatment methods such as SDR, SCR, and activated carbon adsorption (i.e., low treatment efficiency, expensive maintenance cost, large installation area, and energy loss). Experiments were performed with varying variables such as pulse voltage, reaction temperature, chemicals and additives ratios, liquid/gas ratio, structure of the aeration cleaning nozzle, and gas inlet concentration. The performance of individual and complex processes using the wet-pulse discharge reaction were analyzed and compared.

• Safety and Health at Work
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• v.15 no.2
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• pp.228-235
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• 2024

Background: Glove reuse poses risks, as chemicals can persist even after cleaning. Decontamination methods like thermal aeration, recommended by US OSHA, vary in effectiveness. Some studies show promising results, while others emphasize the importance of considering both permeation and tensile strength changes. This research advocates for informed glove reuse, emphasizing optimal thermal aeration temperatures and providing evidence to guide users in maintaining protection efficiency. Methods: The investigation evaluated Neoprene and Nitrile gloves (22 mils). Permeation tests with toluene and acetone adhered to American Society for Testing Materials (ASTM) F739 standards. Decontamination optimization involved aeration at various temperatures. The experiment proceeded with a maximum of 22 re-exposure cycles. Tensile strength and elongation were assessed following ASTM D 412 protocols. Breakthrough time differences were statistically analyzed using t-test and ANOVA. Results: At room temperature, glove residuals decreased, and standardized breakthrough time (SBT)₂ was significantly lower than SBT₁, indicating reduced protection. Higher temperature decontamination accelerated residual removal, with ∆SBT (SBT₂/SBT₁) exceeding 100%, signifying restored protection. Tensile tests showed stable neoprene properties postdecontamination. Results underscore thermal aeration's efficacy for gloves reuse, emphasizing temperature's pivotal role. Findings recommend meticulous management strategies, especially post-breakthrough, to uphold glove-protective performance. Conclusions: Thermal aeration at 100℃ for 1 hour proves effective, restoring protection without compromising glove strength. The study, covering twenty cycles, suggests safe glove reuse with proper decontamination, reducing costs significantly. However, limitations in chemical-glove combinations and exclusive focus on specific gloves caution against broad generalization. The absence of regulatory directives on glove reuse highlight the importance of informed selection and rigorous decontamination validation for workplace safety practices.

• Applied Chemistry for Engineering
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• v.3 no.4
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• pp.730-738
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• 1992

Filtration characteristics according to membrane materials were studied In the ultrafiltration of anaerobic digestion broth as a post treatment method. A series of resistances for different membranes were quantitatively assessed on the basis of the resistance-in-series model. Flux behavior observed with the digestion broth was irrelevant to initial water permeabilities of each membrane. The fluoro polymer membrane showed the most significant improvement of flux with increase of cross-flow velocity, which suggests that the cake layer formed on this membrane is more weakly attached to the membrane surface than those on the other membranes. Flux reduction during longtime running was attrib-used to the polarization layer resistance ($R_p$) as well as the fouling layer resistance($R_f$). Continuous increase of $R_p$ may reflect the variation in the characteristics of cake layers, which could result from size, shape, and structure changes due to lysis and growth of biomass. Hydrophilic cellulosic membrane had a much lower fouling tendency than hydrophobic polysulfone membrane. The depressurization method induced a small increase in flux of $5-10L/m^2/h$. During washing and cleaning, filtrability of each membrane was rapidly recovered within 15 minutes until a stationary value was reached.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.134-134
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• 2011

High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

• Therapeutic Science for Rehabilitation
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• v.13 no.2
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• pp.85-94
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• 2024

Objective : This study aimed to determine the impact of an instrumental daily living activity program for adults with developmental disabilities on their daily living activities and quality of life (QOL). Methods : This study used a single-group pre-test-post-test experimental design. Participants comprised 17 adults with developmental disabilities from the Welfare Center for the Disabled. This program consisted of 10 sessions, including pre- and post-assessments, pertaining to training and education on grocery shopping, meal preparation and cleaning, home management, safety, and emergency management. The evaluation tools used in this study were the Quality of Life Questionnaire, Korean version of the Life Space Assessment (K-LSA), and Korean version of the Instrumental Activities of Daily Living (K-IADL). Results : There was a statistically significant difference in the QOL and K-IADL scores before and after the instrumental activities of daily living occupational therapy program, and there was no statistically significant difference in the K-LSA scores. Conclusion : This study confirmed that implementing an IADL program for adults with developmental disabilities had a positive impact on performance and QOL. For adults with developmental disabilities to participate in daily life and society, interventions for work participation, including training in activities of daily living, must be expanded.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.1
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• pp.331-336
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• 2018

Oral health is an essential requirement for maintaining and promoting health and quality of life while aging. It is known that there is a deep connection with hygienic management of dentures. However, despite the emphasis on the importance of clean management of dentures, there is a lack of quantitative research on denture-related detergents. Therefore, the purpose of this study is to evaluate food stain removal performance of three denture cleansers containing proteolytic enzymes. In addition, this study provides basic data on self-cleaning methods using detergents and suggests ways to improve effective treatment for oral health of elders in domiciliary care. In order to obtain quantitative data concerning food stain removal performance of each proteinase denture cleaner, the test evaluation method proposed by the Korean Consumer Agency, ISO 20795, was used. A total of 18 specimens were discolored for 48 hours in water dissolved with turmeric, and then washed with each denture cleaner for 24 hours. The cleaned denture specimens were measured quantitatively using a spectrophotometer to measure the color values of the denture specimens before the discoloration as well as the color values of the discolored specimens after cleaning with the denture cleanser. The experimental values were analyzed through one-way ANOVA with post-hoc Tukey's test, and statistically significant differences were found among the experimental groups. It was found that C had statistically significant stain removal performance compared with A and B(p<.05). All experiments were conducted for a total of 21 days, from July 3- 23, 2017. This study confirms that denture cleansers is a beneficial self-denture management method for domiciliary seniors. Therefore, it is necessary to extend accessibility for denture cleansers in order to to optimize domiciliary care for elderly oral hygiene and health.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.3
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• pp.173-179
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• 2020

The purpose of this study was to examine whether chicken-rearing activity is effective on the character, emotion and self-esteem of middle school students, as a pilot study for the development of an animal-assisted education program based on chicken-rearing activity. School was selected as the place where students have experience with raising animals before and no poultry farms were located near the school. The experimental group consisted of 11 students as the chicken-rearing group. The conducted activities were greeting chickens, cleaning henhouse, feeding them, and picking eggs up for five months. Character, emotion and self-esteem scales were used as test tools, and pre-testing and post-testing were conducted to verify the effectiveness of the study. Data collected were analyzed by using SPSS Win 25.0 statistical program. As a result, the character, emotional stability and self-esteem of middle school students who participated in chicken-rearing activity were improved. This study is meaningful in that the chicken-rearing activity proved to be effective for the character, emotion and self-esteem of middle school students and prepared an experimental case study for developing an animal-assisted education program based on chicken-rearing activity. It is expected to be useful as basic data of animal-assisted education for adolescents in school.