• 제목/요약/키워드: Plasma Bonding

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탄소계 경질 박막의 연구 및 산업 적용 동향 (Trend in Research and Application of Hard Carbon-based Thin Films)

  • 이경황;박종원;양지훈;정재인
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 춘계학술대회 논문집
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    • pp.111-112
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    • 2009
  • Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.

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기계적 표면 처리된 TITANIUM PLASMA SPRAYED IMPLANT에 대한 치은섬유아세포전개양상의 형태학적 관찰 (THE MORPHOLOGICAL OBSERVATION OF HUMAN GINGIVAL FIBROBLASTS ATTACHMENT AND SPREADING ON THE MECHANICAL TREATED TITANIUM PLASMA SPRAYED IMPLANT SURFACE)

  • 황연희;이재목;서조영
    • Journal of Periodontal and Implant Science
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    • 제25권3호
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    • pp.741-755
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    • 1995
  • 구강내 매식된 임프란트가 과도한 교합력이나 염증등의 이유로 구강내로 노출되었을 때 세균독소에 이완된 면을 제거하고 평활한 면을 형성하여 주위의 연조직, 경조직에 적합한 상태로 만들어 건강한 상태로 구강내에 유지하기 위해서 임프란트 매식체 표면을 기계적인 표면처리방법으로 처치하여 이러한 방법이 임프란트 표면성분, 치은섬유아세포의 전개양상에 미치는 영향을 알아보고자 본 실험을 실행하였다. IMZ사에서 제작한 직경 10mm, 높이 2mm의 원판 타이타늄을 이용하여 피막되지 않은 타이타늄면과 TPS면을 대조군으로 하고 기계적인 표면처리방법인 low speed stone bur처치면을 실험군으로 설정한 후 EDX로 타이타늄 표면성분을 분석하였고 주사전자현미경으로 치은섬유아세포의 전개양상을 관찰하였다. EDX에 의한 타이타늄 표면성분분석 결과 모든 실험군에서 titanium peak, 소량의 aluminum이 나타났으며 그외의 성분은 나타나지 않았다. 치은섬유아세포의 전개양상에 대한 주사전자현미경 관찰결과 평활한 타이타늄면에서 접종 30분 후 세사상돌기와 박판엽상으로 확장된 세포가 많이 관찰되며 6시간 후 신장된 치은섬유아세포가 시편에 밀착된 양상을 보였고 24시간 후 치은섬유아세포는 시편의 모든 면을 피개하며 가공시의 평행한 선을 따라 방향성을 띄었다. TPS가 잔존한 stone처치군에서 세포 접종 30분 후 세사상돌기가 적게 관찰되어 평활한 타이타늄면에 비해 초기부착이 늦은 것을 알 수 있었고 6, 24시간후 치은섬유아세포는 거친면으로 인해 시편에 밀착되지 못한 양상을 보였으나 평활한 타이타늄면과 연결되며 시편의 모든면을 피개하였다. TPS군에서 치은섬유아세포는 세포 접종 30분후 세사상돌기를 거의 찾아 볼 수 없어 초기부착이 다른군에 비해 늦으며 세포배양 6, 24시간후에도 시편에 밀착되지 못하고 박판상돌기가 가늘고 길게 돌출되어 여러면에 부착된 양상을 보였으며 세포가 부착되지 않은 TPS면이 관찰되었다.

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Impact of glycosylation on the unimpaired functions of the sperm

  • Cheon, Yong-Pil;Kim, Chung-Hoon
    • Clinical and Experimental Reproductive Medicine
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    • 제42권3호
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    • pp.77-85
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    • 2015
  • One of the key factors of early development is the specification of competence between the oocyte and the sperm, which occurs during gametogenesis. However, the starting point, growth, and maturation for acquiring competence during spermatogenesis and oogenesis in mammals are very different. Spermatogenesis includes spermiogenesis, but such a metamorphosis is not observed during oogenesis. Glycosylation, a ubiquitous modification, is a preliminary requisite for distribution of the structural and functional components of spermatids for metamorphosis. In addition, glycosylation using epididymal or female genital secretory glycans is an important process for the sperm maturation, the acquisition of the potential for fertilization, and the acceleration of early embryo development. However, nonemzymatic unexpected covalent bonding of a carbohydrate and malglycosylation can result in falling fertility rates as shown in the diabetic male. So far, glycosylation during spermatogenesis and the dynamics of the plasma membrane in the process of capacitation and fertilization have been evaluated, and a powerful role of glycosylation in spermatogenesis and early development is also suggested by structural bioinformatics, functional genomics, and functional proteomics. Further understanding of glycosylation is needed to provide a better understanding of fertilization and embryo development and for the development of new diagnostic and therapeutic tools for infertility.

FSG Capping 레이어들에서의 플루오르 침투 특성 (Fluorine Penetration Characteristics on Various FSG Capping Layers)

  • 이도원;김남훈;김상용;엄준철;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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    • pp.26-29
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    • 2004
  • High density plasma fluorinated silicate glass (HDP FSG) is used as a gap fill film for metal-to-metal space because of many advantages. However, FSG films can cause critical problems such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. It is known that these problems are caused by fluorine penetration out of FSG film. To prevent it, FSG capping layers such like SRO (Silicon Rich Oxide) are needed. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated. Normal stress and High stress due to denser film. While heat treatment to PETEOS caused lower blocking against fluorine penetration, it had insignificant effect on SiN. Compared with other layers, SRO using ARC chamber and SiN were shown a better performance to block fluorine penetration.

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Room Temperature Ferromagnetism on Co and Fe Doped Multi-wall Carbon Nano-tube

  • Chae, K.H.;Gautam, S.;Yu, B.Y.;Song, J.H.;Augustine, S.;Kang, J.K.;Asokan, K.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.171-171
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    • 2011
  • Co and Fe doped multi-wall carbon nano-tubes (MWCNTs) synthesized by microwave plasma enhanced chemical vapor deposition (PECVD) technique are investigated with synchrotron radiations at Pohang Light Source (PAL) and European Synchrotron Radiation Facility (ESRF). Near edge x-ray absorption spectroscopy (NEXAFS) measurement at C K, Co $L_{3,2}$ and Fe $L_{3,2}$-edges, and x-ray magnetic circular dichroism (XMCD) at Co and Fe $L_{3,2}$-edges have been carried at 7B1 XAS KIST and 2A MS beamline, respectively, to understand the electronic structure and responsible magnetic interactions at room temperature. X-ray absorption spectroscopy (XAS) at C K-edge shows significant p-bonding and Co and Fe L-edges proves the presence of $Co^{2+}$ and $Fe^{2+}$ in octahedral symmetry. Co and Fe doped MWCNTs show good XMCD spectra at 300K. The effect on the magnetism is also studied through swift heavy ion (SHI) radiations and magnetism is found enhanced and change in the electronic structure in Co-CNTs is investigated.

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Raman Spectroscopy Studies of Graphene Nanoribbons and Chemical Doping in Graphene

  • Ryu, Sun-Min
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.15-15
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    • 2011
  • Atom-thick graphene membrane and nano-sized graphene objects (NGOs) hold substantial potential for applications in future molecular-scale integrated electronics, transparent conducting membranes, nanocomposites, etc. To realize this potential, chemical properties of graphene need to be understood and diagnostic methods for various NGOs are also required. To meet these needs, chemical properties of graphene and optical diagnostics of graphene nanoribbons (GNRs) have been explored by Raman spectroscopy, AFM and STM scanning probes. The first part of the talk will illustrate the role of underlying silicon dioxide substrates and ambient gases in the ubiquitous hole doping of graphene. An STM study reveals that thermal annealing generates out-of-plane deformation of nanometer-scale wavelength and distortion in $sp^2$ bonding on an atomic scale. Graphene deformed by annealing is found to be chemically active enough to bind molecular oxygen, which leads to a strong hole-doping. The talk will also introduce Raman spectroscopy studies of GNRs which are known to have nonzero electronic bandgap due to confinement effect. GNRs of width ranging from 15 nm to 100 nm have been prepared by e-beam lithographic patterning of mechanically exfoliated graphene followed by oxygen plasma etching. Raman spectra of narrow GNRs can be characterized by upshifted G band and strong disorder-related D band originating from scattering at ribbon edges. Detailed analysis of the G, D, and 2D bands of GNRs proves that Raman spectroscopy is still a reliable tool in characterizing GNRs despite their nanometer width.

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Linear Ion Source에 의해 증착된 Diamond-Like Carbon(DLC) 박막의 질화층 형성에 따른 밀착력 특성 연구 (Study on the Adhesion of Diamond Like Carbon Films Using the Linear Ion Source with Nitriding Layers)

  • 신창석;박민석;권아람;김승진;정원섭
    • 한국표면공학회지
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    • 제44권5호
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    • pp.190-195
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    • 2011
  • Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.

LIF 공초점 현미경을 이용한 Y-채널 마이크로믹서의 혼합 효율 평가 (Mixing Efficiency Evaluation in Y-channel Micromixer Using LIF Confocal Microscope)

  • 김경목;신용수;안유민;이도형
    • 대한기계학회논문집B
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    • 제31권2호
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    • pp.159-166
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    • 2007
  • Mixing between two or more reagents is one of important processes in biochemical microfluidics. In efficient micromixer design, it is essential to analyze flow pattern and evaluate mixing efficiency with good precision. In this work, mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS) and those are bonded to glass plate through Plasma bonding. Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. For visualization of the flow pattern, dynamic image capturing is carried out using CAM scope. For the comparison with computer simulation, modified SIMPLE algorithm for incompressible flow equation is solved for the same geometry as in the experiment. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

Solid Lubrication Characteristics of DLC Coated Alumina Seals in High Temperature

  • 옥철호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.356-356
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    • 2007
  • Plasma immersion ion beam deposition (PIIBD) technique is a cost-effective process for the deposition of diamond like carbon thin film, the possible solid lubricant on large surface and a complex shape. We used PIIB process for the preparation of DLC thin film on $Al_2O_3$ with deposition conditions of deposition temperature range $200^{\circ}C$, working gas pressure of 1.310-1Pa. DLC thin films were coated by $C_2H_2$ ion beam deposition on $Al_2O_3$ after the ion bombardment of SiH4 as the bonding layer. Energetic bombardment of $C_2H_2$ ions during the DLC deposition to ceramic materials generated mixed layers at the DLC-Si interface which enhanced the interface to be highly bonded. Wear test showed that the low coefficient of friction of around 0.05 with normal load 2.9N and proved the advantage of the low energy ion bombardment in PIIBD process which improved the tribological properties of DLC thin film coated alumina ceramic. Furthermore, PIIBD was recognized as a useful surface modification technique for the deposition of DLC thin film on the irregular shape components, such as molds, and for the improvement of wear and adhesion problems of the DLC thin film, high temperature solid lubricant.

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FTIR을 이용한 캐핑레이어의 플루오르 침투 특성 연구 (Study on Fluorine Penetration of Capping Layers using FTIR analysis)

  • 이도원;김남훈;김상용;김태형;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.300-303
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    • 2004
  • To fill the gap of films for metal-to-metal space High density plasma fluorinated silicate glass (HDP FSG) is used due to various advantages. However, FSG films can have critical drawbacks such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. These problems are generally caused by fluorine penetration out of FSG film. Hence, FSG capping layers such like SRO(Silicon Rich Oxide) are required to prevent flourine penetration. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated through FTIR analysis. FTIR graphs of both SRO using ARC chamber and SiN show that clear Si-H bonds at $2175{\sim}2300cm^{-1}$. Thus, Si-H bond at $2175{\sim}2300cm^{-1}$ of FSG capping layers lays a key role to block fluorine penetration as well as dangling bond.

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