• 제목/요약/키워드: Planar process

검색결과 417건 처리시간 0.027초

SiNx passivation에 따른 Solar Cell의 효율향상에 관한 연구 (A Study of High-efficiency me-silicon solar cells for SiNx passivation)

  • 고재경;임동건;김도영;박성현;박중현;이준신
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
    • /
    • pp.964-967
    • /
    • 2002
  • The effectiveness of silicon nitride SiNx surface passivation is investigated and quantified. This study adopted single-layer antireflection (SLAR) coating of SiNx for efficiency improvement of solar cell. The silicon nitride films were deposited by means of plasma enhanced chemical vapor deposition (PECVD) in planar coil reactor. The process gases used were pure ammonia and a mixture of silane and helium. The thickness and the refractive index on the films were measured by ellipsometry and chemical bonds were determined by using an FT-IR equipment. This films obtained were analyzed in term of hydrogen content, refractive index for gas flow ratio $(NH_3/SiH_4)$, and efficiency of solar cell. The polycrystalline silicon solar cells passivated by silicon nitride shows efficiency above 12.8%.

  • PDF

$WN_x$ Self-Align Gate GaAs LDD MESFET의 제작 및 특성 (Fabrication and its characteristics of $WN_x$ self-align gate GaAs LDD MESFET)

  • 문재경;김해천;곽명현;강성원;임종원;이재진
    • 한국진공학회지
    • /
    • 제8권4B호
    • /
    • pp.536-540
    • /
    • 1999
  • We have developed a refractory WNx self-aligned gate GaAs metal-semiconductor field-effect transistor(MESFET) using $SiO_2$ side-wall process. The MESFET hasa fully ion-implanted, planar, symmetric self-alignment structure, and it is quite suitable for integration. The uniform trans-conductance of 354nS/mm up to Vgs=+0.6V and the saturation current of 171mA/mm were obtained. As high as 43GHz of cut-off frequency hs been realized without any de-embedding of parasitic effects. The refractory WNx self-aligned gate GaAs MESFET technology is one of the most promising candidates for realizing linear power amplifier ICs and multifunction monolithic ICs for use in the digital mobile communication systems such as hand-held phone(HHP), personal communication system (PCS) and wireless local loop(WLL).

  • PDF

Wide-Viewing Display Configuration of Heilix-Deformed Ferroelectric Liquid Crystals

  • Lee, Ju-Hyun;You, Doo-Hwan;Park, Jae-Hong;Lee, Sin-Doo;Yu, Chang-Jae
    • Journal of Information Display
    • /
    • 제1권1호
    • /
    • pp.20-24
    • /
    • 2000
  • We propose on a novel vertical configuration (VC) for a helix-deformed ferroelectric liquid crystal (HDFLC) display that has fast response, high contrast, analog gray scale capability, and wide-viewing characteristics. In contrast to a conventional HDFLC in a planar geometry, smectic layers arrange themselves parallel to the substrates, and thus, extremely uniform alignment of molecules in large area is naturally achieved in our new configuration without additional processes such as the rubbing and/or electric field treatment. Moreover, with a proper design of electrode patterns on the same substrate, multidomain switching is easily realized without employing any complex process of alignment. Our new VC-HDFLC is expected to provide a viable technology to produce a next-generation large area LCD suitable for processing the dynamic image at a video-rate.

  • PDF

Characteristics of Surface Roughness as a Film Thickness and Planarization of SLS Poly-Si Films

  • Sohn, Choong-Yong;Kim, Yong-Hae;Ko, Young-Wook;Chung, Choong-Heui;Hwang, Chi-Sun;Song, Yoon-Song;Lee, Jin-Ho
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
    • /
    • pp.683-685
    • /
    • 2003
  • We report on a surface planarization process that produces more planar surface than previous sequential lateral solidification crystallized poly silicon films. By applying the single shot laser irradiation with optimum energy density ($(817mJ/cm^{2})$ on the ridge area after SLS crystallization, the ridge height can be decreased.

  • PDF

(100) Textured Si Films with Controlled Microstructures Obtained via Hybrid SLS

  • Wilt, P.C. Van Der;Chitu, A.M.;Turk, B.A.;Chung, U.J.;Limanov, A.B.;Im, James S.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
    • /
    • pp.768-771
    • /
    • 2006
  • Uniformity and performance characteristics of LTPS TFTs are important parameters for making advanced active-matrix displays. In this paper, we describe an SLS-based crystallization approach for producing orientation-controlled Si films with reduced concentrations of planar defects that stand to potentially deliver unprecedented levels of device uniformity and performance. Specifically, a 2-step process referred to as hybrid SLS has been developed that produces a variety of high-quality {100} surface-oriented Si films.

  • PDF

10 Gbps SDH 광전송시스템을 위한 클럭보상/데이타 재생회로용 전압제어 hair-pin 공진 발진기의 설계 (A design of voltage controlled hair-pin resonator oscillator for the use of clock precovery/data regeneration circuit in 10 Gbps SDH fiber optic systems)

  • 연영호;이수열;이주열;유태완;박문수;홍의석
    • 한국통신학회논문지
    • /
    • 제21권5호
    • /
    • pp.1304-1316
    • /
    • 1996
  • In this paper, A VCO(Voltage Controlled Oscillator) in use of clock recovery/data regeneration circuit for 10 Gbps fiber optic receivers was developed. The improved hair-pin resonator with a parallel coupled lines, which has been applied to microstrip filters, was used as a resonance part. As a frequcncy tuning device by substituting 3-terminalMESFET vaaractor for varactor diode, an MMIC manufacturing process will be simplified. Since a hair-pin resonator is planar type compared to the dielectric resonator and has a relatively flat reactance verus frequency, it will be favorable to apply a hair-pin resonator to an MMIC, in addition wideband frequency tuning range is able to be obtained.

  • PDF

FHD 공정에 의한 저손실 실리카 슬랩 도파로 형성 (Fabrication of Low Loss Silica Slab Waveguide by Flame Hydrolysis Deposition)

  • 심재기;김태홍;신장욱;박상호;김덕준;성희경
    • 한국세라믹학회지
    • /
    • 제37권6호
    • /
    • pp.524-529
    • /
    • 2000
  • Silica slab wavegudie was fabricated on Si substrates by FHD for planar optical passive devices. The slab waveguide consists of lower clad and core layers, where core layer index is controlled by GeO2 addition. Doping of GeO2 in silica is difficult because of the low deposition density due to nonspherical particle generation in FHD process. Silica core particles deposited at various conditions such as flame temperature and substrate scanning were analyzed by SEM and TEM. As the flame temperature increased, the surface roughness of the core layer was decreased up to 3.6 nm after consolidation. Index difference and thickness of core of slab waveguide were 0.3%, 8$\mu\textrm{m}$ respectively. Measured optical loss at TE mode was <0.04 dB/cm at 1.3$\mu\textrm{m}$ and <0.06 dB/cm at 1.55$\mu\textrm{m}$.

  • PDF

초음파검사 판정 기준이 항공기용 복합구조재의 건전성 평가에 미치는 영향에 관한 고찰 (Study on effect of ultrasonic inspection criteria to soundness evaluation of honeycomb core sandwich and laminate structure used for commercial aircrafts)

  • 진양준;한중원;김국진;송기경
    • 한국복합재료학회:학술대회논문집
    • /
    • 한국복합재료학회 2002년도 추계학술발표대회 논문집
    • /
    • pp.202-207
    • /
    • 2002
  • The soundness of honeycomb core sandwich and laminate structure used for commercial aircrafts is generally evaluated with ultrasonic inspection because the inspection is most sensitive to planar surfaces which are perpendicular to sound propagation pass and reflects sound almost 100% to equipment. And most defects inherent in composite material curing process has good reflective surfaces. With all this advantage, unexpected obstruction to product and additional cost could be occurred when inappropriate accept/reject criteria is given. In this study the importance of inspection criteria will be discussed to show how inappropriate criteria cause unexpected results leading to high production cost and how much time must be spent to correct those improper criteria with an actual case occurred in Aerospace Division, Korean Air.

  • PDF

스월형 GDI 엔진의 연료분포특성 연구 (Fuel Distribution Characteristics in a Swirl Type GDI Engine)

  • 김기성;박상규
    • 한국마린엔지니어링학회:학술대회논문집
    • /
    • 한국마린엔지니어링학회 2002년도 춘계학술대회논문집
    • /
    • pp.49-59
    • /
    • 2002
  • For the purpose of helping development of a GDI(Gasoline Direct Injection) engine, the spray behaviors and fuel distributions were investigated in a single cylinder GDI engine. The experimental engine is a swirl type GBI engine with a SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used for the measurement of the fuel distributions. The effects of SCV opening angle and the Injector specifications, such as the spray cone angle and the offset an91e on the fuel distributions characteristics were investigated. As a result, it was found that the SCV opening angle had a great effect on the fuel distributions in the late stage of compression process by changing flow fields in the combustion chamber.

  • PDF

A New Resistance Model for a Schottky Barrier Diode in CMOS Including N-well Thickness Effect

  • Lee, Jaelin;Kim, Suna;Hong, Jong-Phil;Lee, Sang-Gug
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • 제13권4호
    • /
    • pp.381-386
    • /
    • 2013
  • A new resistance model for a Schottky Barrier Diode (SBD) in CMOS technology is proposed in this paper. The proposed model includes the n-well thickness as a variable to explain the operational behavior of a planar SBD which is firstly introduced in this paper. The model is verified using the simulation methodology ATLAS. For verification of the analyzed model and the ATLAS simulation results, SBD prototypes are fabricated using a $0.13{\mu}m$ CMOS process. It is demonstrated that the model and simulation results are consistent with measurement results of fabricated SBD.