• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.828-831
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• 2003

The benefits of the pneumatic valve with piezoelectric element are faster response times, low energy consumption, and the ability to be used in hazardous environments and field bus systems. In this paper, PZT actuator, 2 and 3 stages pneumatic valve were designed and manufactured. Also. characteristics of the pneumatic valve with piezoelectric element were tested with a testing system. It is confirmed that the PZT actuator is useful one for controlling the direction of pilot valve.

• 드라이브 ㆍ 컨트롤
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• 제9권4호
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• pp.14-18
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• 2012

Two kinds of piezoelectric actuator are applied to the valve for controlling the direction, the flow and the pressure of the fluid. One is a stack type piezoelectric actuator which has very fast response characteristics but very tiny displacement. The other is a bender type piezoelectric actuator which has also fast response characteristics but lower than the stack type one, and has longer displacement than the stack type one. So, the bender type piezoelectric actuator has advantage to apply to the valve for controlling a large amount of flow and fast on-off operating. In this study, the bender type piezoelectric pneumatic valve for color sorter is designed and fabricated. The new type high speed piezo valve with the both side supporting mechanism for high operating frequency and high reliability is discussed for separating the foreign body from the grains. Finally, the performance characteristics of a fabricated valve are analyzed and the frequency characteristics are also discussed for substituting the conventional type solenoid actuator.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1576-1577
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• 2007

As a intelligent valve piezoelectric valve is to applied to various fields of application. Piezoelectric valves have fast response time and good linearity for pressure control but its hysteresis displacement by its stack actuator influences on pressure control in electro-hydraulic braking. Solenoid valves are traditional element to control hydraulic pressure but this paper proposes piezoelectric valve for brake pressure control with hysteresis compensation.

• 항공우주시스템공학회지
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• 제12권5호
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• pp.54-68
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• 2018

본 논문에서는 소형 압전유압펌프에 적용된 체크밸브의 동적 특성이 유량 형성에 미치는 효과에 대한 연구를 수행하였다. 브레이크 시스템 작동을 위한 부하 압력의 형성을 위해서는 압전유압펌프의 유량이 중요한 요소이다. 이때, 유체 내에서 작동하는 체크밸브의 고유 진동수는 압전 유압펌프의 유량 형성에 큰 영향을 미친다. 또한, 체크밸브의 고유 진동수는 체크밸브와 펌프 시트 사이의 간격에 영향을 받는다. 이를 고려하여 본 연구에서는 체크밸브와 펌프 시트 사이의 간격에 따른 체크밸브의 고유진동수를 유체-구조 연성 해석을 통해 산출하였다. 시뮬레이션을 통해 얻은 유량은 개발된 압전유압펌프를 이용한 유량 형성 실험과의 비교를 통해 검증하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1864-1869
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• 2003

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of $17{\times}8{\times}11mm^{3}$. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are $15^{\circ}$ in inlet check valve and $195^{\circ}$ in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of $10{\times}10{\times}10mm^{3}$ is fabricated and basic characteristics are experimentally investigated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.946-949
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• 2003

This paper reports on the fluid flow simulation results of a multilayer type piezoelectric valve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed type using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a MLCA(Multilayer Type Ceramic Actuator). It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in valve. Thus, it is expected that our simulation results would be apply for piezoelectric applications such as valve and pump, fluidic control systems.

• 한국전기전자재료학회논문지
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• 제17권5호
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1442-1445
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• 2003

In precision machinery industry, it's required with small size and low noise design to using in constant liquid delivery equipment. To accomplish it's purpose, we designed the check valve with rubber sheet of circle shapes as a possible assembly in pump body. The test equipment for piezoelectric pump was able to test pressure-flow property and output property of piezoelectric pump by variation(magnitude of voltage and frequency) of input power.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3383-3388
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• 2007

To compare the sensor performance of AE leak diagnosis system which can measure valve leak conditions, AE activities such as RMS voltage level, AE signal trend, leak rate degree according to AE database, FFT spectrum were measured on valve of the simulated test system for power plant. AE activities were recorded and analyzed from various operating conditions including different temperature, pressure difference, valve size and fluid using both piezoelectric acoustic emission sensor and Pb-Free acoustic emission sensor. The results of this study are utilized to select the type of sensors, the frequency band for filtering and thereby to improve the signal-to-noise ratio for diagnosis or monitoring of valves in operation. As the final result of application study above, portable type leak diagnosis system by AE was developed. The outcome of the study can be definitely applied as a means of the diagnosis or monitoring system for energy saving and prevention of accident for power plant valve.

• 한국기계가공학회지
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• 제4권4호
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.