• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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• 제5B권1호
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• pp.90-94
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• 2005

As the structure of the piezoelectric bimorph cantilever becomes increasingly more complicated, a more accurate and efficient analysis of piezoelectric media is needed. In this paper, the piezoelectric transducer is analyzed by using the three-dimensional finite element method. The validity of the three-dimensional finite element routine is confirmed by comparing the experimental result. The resonance characteristics, such as resonance frequency and anti-resonance frequency, of the piezoelectric cantilever are calculated by the experimentally verified three dimensional finite element method. Subsequently, the characteristics, such as mechanical displacement and impedance, are calculated at the resonance frequency. Besides, to design the piezoelectric bimorph cantilever shape that maximizes displacement at the tip, the ES (Evolution Strategy) algorithm is applied. Finally, optimal design for the fan of the piezoelectric cantilever is fulfilled to obtain maximum displacement at the tip. From these results, the application potentiality of the piezoelectric bimorph cantilever fan is identified.

• 마이크로전자및패키징학회지
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• 제20권4호
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• pp.31-34
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• 2013

외팔보의 형상적인 해석과 압전효과에 의거하여, 최대 전력량 산출을 위한 에너지 수확기를 설계하였다. 두가지의 외팔보 형상으로 에너지 수확기의 구조가 설계되었다. 에너지 수확기의 성능을 좌우하는 주요 변수는 외팔보 형상과 끝단에 부착된 질량이다. 수확되는 전하량은 압전재료의 압전상수와 외팔보의 기계적인 변형량에 비례한다.

• Smart Structures and Systems
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• 제16권4호
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• pp.623-640
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• 2015

This paper presents techniques to harvest higher voltage from piezoelectric cantilever energy harvester by structural alteration. Three different energy harvesting structures are considered namely, stepped cantilever beam, stepped cantilever beam with rectangular and trapezoidal cavity. The analytical model of three energy harvesting structures are developed using Euler-Bernoulli beam theory. The thickness, position of the rectangular cavity and the taper angle of the trapezoidal cavity is found to shift the neutral axis away from the surface of the piezoelectric element which in turn increases the generated voltage. The performance of the energy harvesters is evaluated experimentally and is compared with regular piezoelectric cantilever energy harvester. The analytical and experimental investigations reveal that, the proposed energy harvesting structures generate higher output voltage as compared to the regular piezoelectric cantilever energy harvesting structure. This work suggests that through simple structural modifications higher energy can be harvested from the widely reported piezoelectric cantilever energy harvester.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.22-25
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• 2005

In this research, a wafar-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• 한국재료학회지
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• 제17권2호
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• pp.121-123
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• 2007

Energy harvesting from the vibration through the piezoelectric effect has been studied for powering the wireless sensor node. As piezoelectric unimorph cantilever structure can transfer low vibration to large displacement, this structure was commonly deployed to harvest electric energy from vibrations. Piezoelectric unimorph structure was composed of small stiff piezoelectric ceramic on the large flexible substrate. As there is the large Young's modulus difference between the flexible substrate and stiff piezoelectric ceramic, flexible substrate could not homogeneously transfer the vibration to stiff piezoelectric ceramic. As a result, most piezoelectric ceramics had been broken at the certain point. We measured and analyzed the stress distribution on the piezoelectric ceramic on the cantilever.

• 동력기계공학회지
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• 제13권3호
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• pp.65-71
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• 2009

This paper presents the energy harvesting technique which is carried out by vibration system with a piezoelectric element. In this study, low frequency characteristics of the piezoelectric element bonded to the aluminum cantilever were experimentally investigated. The piezoelectric element of size of $45L{\times}11W{\times}0.6H$ and piezoelectric constant($d_{31}$ ) of $-180{\times}10^{-12}C/N$ was used. The material of cantilever is an aluminum and two kinds of cantilever of which dimensions are (150, 190)$[mm]{\times}13[mm]{\times}1.5[mm]$ were experimented, respectively. The cantilever was fixed on the magnetic type vibrator and the vibrator was operated by power input with a sine wave. The characteristics of requency and mass variation of cantilever end part such as 0, 2.22, 4.34, 5.87, 8.66, 11.01 [g] were investigated. Finally, this paper suggests a method of generating electrical energy with a piezoelectric element using wind, an energy source that is easily applied and from which we can obtain "clean" energy.

• 정보저장시스템학회논문집
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• 제2권2호
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• 센서학회지
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• 제29권4호
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• pp.261-265
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• 2020

In cantilever type piezoelectric energy harvester, the amount of power generation decreases rapidly when outside a certain frequency. The thickness and weight of the cantilever metal plate were modified to develop cantilevers that could produce high power over a wide frequency range. The thicker the cantilever, the higher the power in the higher frequency range. As the weight of the mass increased, the cantilever tended to generate higher power, and the frequency band decreased. A 0.6 mm metal plate cantilever that had a mass of 3.3 g generated power that exceeded 3 mW within the 91-102 Hz range, with average and output values of 9.484 mW and 20.748 mW, respectively, at 99 Hz.

• 대한기계학회논문집B
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• 제41권11호
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• pp.743-748
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• 2017

체외 및 체내 삽입형 이미징 기술 등에 의해서는 판별이 어려운 질환의 조기 진단을 위해 인체 내 삽입이 가능하며 체내 국소부위의 정밀 측정이 가능한 새로운 진단기술이 필요하다. 동맥경화로 발전할 수 있는 죽상경화반의 경우 이미징 기술로는 판별이 어려우나 건강한 조직 대비 미세한 기계적 물성치의 차이를 가질 것으로 예상되어 정밀한 국소 조직의 기계적 강도 측정을 통한 조기 진단이 가능할 것으로 기대된다. 본 연구에서는 궁극적으로 체내 삽입이 가능하며 국소 조직의 강도 측정이 가능한 압전 재료 기반 캔틸레버 센서를 제작하고자 하였다. 압전 기능을 갖는 캔틸레버 제작을 위해 $BaTiO_3$ 나노입자 기반의 압전 고분자 복합재 최적화 연구 및 열 인장 공정으로 캔틸레버 끝 단에 마이크로 콘 구조의 팁을 제작하였다. 이 압전 캔틸레버 센서를 이용하여 기계적 물성치가 다른 생체 조직의 강도 측정을 통해 센서로서의 기능을 확인하였다.