• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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• v.5B no.1
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• pp.90-94
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• 2005

As the structure of the piezoelectric bimorph cantilever becomes increasingly more complicated, a more accurate and efficient analysis of piezoelectric media is needed. In this paper, the piezoelectric transducer is analyzed by using the three-dimensional finite element method. The validity of the three-dimensional finite element routine is confirmed by comparing the experimental result. The resonance characteristics, such as resonance frequency and anti-resonance frequency, of the piezoelectric cantilever are calculated by the experimentally verified three dimensional finite element method. Subsequently, the characteristics, such as mechanical displacement and impedance, are calculated at the resonance frequency. Besides, to design the piezoelectric bimorph cantilever shape that maximizes displacement at the tip, the ES (Evolution Strategy) algorithm is applied. Finally, optimal design for the fan of the piezoelectric cantilever is fulfilled to obtain maximum displacement at the tip. From these results, the application potentiality of the piezoelectric bimorph cantilever fan is identified.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.4
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• pp.31-34
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• 2013

Based on the structural analysis of cantilever and the piezoelectric effect, we propose a new design of piezoelectric cantilever to harvest maximum vibration energy. Geometric parameters of piezoelectric cantilever are optimized according to two different types of cantilever structure. The main factors that affect the harvesting performance of the cantilever was the shape of the cantilever and the load at the free end. The amount of charge is affected by piezoelectric constant and mechanical strain of the cantilever.

• Smart Structures and Systems
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• v.16 no.4
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• pp.623-640
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• 2015

This paper presents techniques to harvest higher voltage from piezoelectric cantilever energy harvester by structural alteration. Three different energy harvesting structures are considered namely, stepped cantilever beam, stepped cantilever beam with rectangular and trapezoidal cavity. The analytical model of three energy harvesting structures are developed using Euler-Bernoulli beam theory. The thickness, position of the rectangular cavity and the taper angle of the trapezoidal cavity is found to shift the neutral axis away from the surface of the piezoelectric element which in turn increases the generated voltage. The performance of the energy harvesters is evaluated experimentally and is compared with regular piezoelectric cantilever energy harvester. The analytical and experimental investigations reveal that, the proposed energy harvesting structures generate higher output voltage as compared to the regular piezoelectric cantilever energy harvesting structure. This work suggests that through simple structural modifications higher energy can be harvested from the widely reported piezoelectric cantilever energy harvester.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.22-25
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• 2005

In this research, a wafar-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• Korean Journal of Materials Research
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• v.17 no.2
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• pp.121-123
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• 2007

Energy harvesting from the vibration through the piezoelectric effect has been studied for powering the wireless sensor node. As piezoelectric unimorph cantilever structure can transfer low vibration to large displacement, this structure was commonly deployed to harvest electric energy from vibrations. Piezoelectric unimorph structure was composed of small stiff piezoelectric ceramic on the large flexible substrate. As there is the large Young's modulus difference between the flexible substrate and stiff piezoelectric ceramic, flexible substrate could not homogeneously transfer the vibration to stiff piezoelectric ceramic. As a result, most piezoelectric ceramics had been broken at the certain point. We measured and analyzed the stress distribution on the piezoelectric ceramic on the cantilever.

• Journal of Power System Engineering
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• v.13 no.3
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• pp.65-71
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• 2009

This paper presents the energy harvesting technique which is carried out by vibration system with a piezoelectric element. In this study, low frequency characteristics of the piezoelectric element bonded to the aluminum cantilever were experimentally investigated. The piezoelectric element of size of $45L{\times}11W{\times}0.6H$ and piezoelectric constant($d_{31}$ ) of $-180{\times}10^{-12}C/N$ was used. The material of cantilever is an aluminum and two kinds of cantilever of which dimensions are (150, 190)$[mm]{\times}13[mm]{\times}1.5[mm]$ were experimented, respectively. The cantilever was fixed on the magnetic type vibrator and the vibrator was operated by power input with a sine wave. The characteristics of requency and mass variation of cantilever end part such as 0, 2.22, 4.34, 5.87, 8.66, 11.01 [g] were investigated. Finally, this paper suggests a method of generating electrical energy with a piezoelectric element using wind, an energy source that is easily applied and from which we can obtain "clean" energy.

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• Transactions of the Society of Information Storage Systems
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• v.1 no.1
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.261-265
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• 2020

In cantilever type piezoelectric energy harvester, the amount of power generation decreases rapidly when outside a certain frequency. The thickness and weight of the cantilever metal plate were modified to develop cantilevers that could produce high power over a wide frequency range. The thicker the cantilever, the higher the power in the higher frequency range. As the weight of the mass increased, the cantilever tended to generate higher power, and the frequency band decreased. A 0.6 mm metal plate cantilever that had a mass of 3.3 g generated power that exceeded 3 mW within the 91-102 Hz range, with average and output values of 9.484 mW and 20.748 mW, respectively, at 99 Hz.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.41 no.11
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• pp.743-748
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• 2017

For diseases that are difficult to detect by conventional imaging techniques, the development of a diagnostic method that allows sensors to be inserted into the human body to aid the diagnosis of local spots of the target tissue, is highly desirable. In particular, it is extremely difficult to determine whether vulnerable plaque can later develop into atherosclerosis using only imaging techniques. However, vulnerable plaques are expected to have slightly different mechanical properties than healthy tissue. In this study, we aim to develop a piezoelectric cantilever-type sensor that can be inserted into the human body and can detect the local mechanical properties of the target tissue. A piezoelectric polymer composite based on $BaTiO_3$ nanoparticles was optimized for fabrication of a piezoelectric cantilever. Next, a micro-cone tip was fabricated at the end of the piezoelectric cantilever by thermal drawing. Finally, stiffness of biological tissue samples was measured with the piezoelectric cantilever sensor for verifying its functionality.