• Title/Summary/Keyword: Pattern Fabrication

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Nanomaterials Research Using Quantum Beam Technology

  • Kishimoto, Naoki;Kitazawa, Hideaki;Takeda, Yoshihiko
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.7-7
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    • 2011
  • Quantum beam technology has been expected to develop breakthroughs for nanotechnology during the third basic plan of science and technology (2006~2010). Recently, Green- or Life Innovations has taken over the national interests in the fourth basic science and technology plan (2011~2015). The NIMS (National Institute for Materials Science) has been conducting the corresponding mid-term research plans, as well as other national projects, such as nano-Green project (Global Research for Environment and Energy based on Nanomaterials science). In this lecture, the research trends in Japan and NIMS are firstly reviewed, and the typical achievements are highlighted over key nanotechnology fields. As one of the key nanotechnologies, the quantum beam research in NIMS focused on synchrotron radiation, neutron beams and ion/atom beams, having complementary attributes. The facilities used are SPring-8, nuclear reactor JRR-3, pulsed neutron source J-PARC and ion-laser-combined beams as well as excited atomic beams. Materials studied are typically fuel cell materials, superconducting/magnetic/multi-ferroic materials, quasicrystals, thermoelectric materials, precipitation-hardened steels, nanoparticle-dispersed materials. Here, we introduce a few topics of neutron scattering and ion beam nanofabrication. For neutron powder diffraction, the NIMS has developed multi-purpose pattern fitting software, post RIETAN2000. An ionic conductor, doped Pr2NiO4, which is a candidate for fuel-cell material, was analyzed by neutron powder diffraction with the software developed. The nuclear-density distribution derived revealed the two-dimensional network of the diffusion paths of oxygen ions at high temperatures. Using the high sensitivity of neutron beams for light elements, hydrogen states in a precipitation-strengthened steel were successfully evaluated. The small-angle neutron scattering (SANS) demonstrated the sensitive detection of hydrogen atoms trapped at the interfaces of nano-sized NbC. This result provides evidence for hydrogen embrittlement due to trapped hydrogen at precipitates. The ion beam technology can give novel functionality on a nano-scale and is targeting applications in plasmonics, ultra-fast optical communications, high-density recording and bio-patterning. The technologies developed are an ion-and-laser combined irradiation method for spatial control of nanoparticles, and a nano-masked ion irradiation method for patterning. Furthermore, we succeeded in implanting a wide-area nanopattern using nano-masks of anodic porous alumina. The patterning of ion implantation will be further applied for controlling protein adhesivity of biopolymers. It has thus been demonstrated that the quantum beam-based nanotechnology will lead the innovations both for nano-characterization and nano-fabrication.

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A Study on Buckling Characteristics of 2-way Grid Single-Layer Domes Considering Rigidity-Effect of Roofing Covering Materials (지붕마감재 강성효과를 고려한 2방향 그리드 단층돔의 좌굴특성에 관한 연구)

  • Park, Sang-Hoon;Suk, Chang-Mok;Jung, Hwan-Mok;Kwon, Young-Hwan
    • Journal of Korean Association for Spatial Structures
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    • v.2 no.1 s.3
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    • pp.85-92
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    • 2002
  • Two way grid single-layer domes are of great advantage in fabrication and construction because of the simple fact that they have only four members at each junction. But, from a point of view of mechanics, the rectangular latticed pattern gives rise to a nonuniform rigidity-distribution in the circumferential direction. If the equivalent rigidity is considered in the axial direction of members, the in-plane equivalent shearing rigidity depends only on the in-plane bending rigidity of members and its value is very small in comparison to that of the in-plane equivalent stretching rigidity. It has a tendency to decrease buckling -strength of dome considerably by external force. But it is possible to increase buckling strength by the use of roofing covering materials connected to framework. In a case like this, shearing rigidity of roofing material increases buckling strength of the overall structure and can be designed economically from the viewpoint of practice. Therefore, the purpose of this paper, in Lamella dome and rectangular latticed dome that are a set of 2-way grid dome, is to clarify the effects of roofing covering materials for increasing of buckling strength of overall dome. Analysis method is based on FEM dealing with the geometrically nonlinear deflection problems. The conclusion were given as follows: 1. In case of Lamella domes which have nearly equal rigidity in the direction of circumference, the rigidity of roofing covering materials does not have a great influence on buckling-strength, but in rectangular latticed domes that has a clear periodicity of rigidity, the value of its buckling strength has a tendency to increase considerably with increasing rigidity of roofing covering materials 2. In case of rectangular latticed domes, as rise-span-ratio increases, models which is subjected to pressure -type-uniform loading than vertical-type-uniform loading are higher in the aspects of the increasing rate of buckling- strength according to the rate of shear reinforcement rigidity, but in case of Lamella dome, the condition of loading and rise-span-ratio do not have a great influence on the increasing rate of buckling strength according to the rate of shear reinforcement rigidity.

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Design and Fabrication of Dual-Band Planar Monopole Antenna with Defected Ground Structure for WLAN Applications (WLAN 시스템에 적용 가능한 결함 접지 구조를 갖는 이중대역 평면형 모노폴 안테나 설계 및 제작)

  • Kang, Byeong-Nam;Rhee, Seung-Yeop;Jeong, Min-Joo;Choi, Domin;Kim, Nam
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.1
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    • pp.42-49
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    • 2018
  • In this paper, a dual-band microstrip-fed monopole antenna with a DGS(defected ground structure) for WLAN(wireless local area network) applications is presented. The antenna consists of a monopole and a defected ground, which were etched on both sides of the FR-4 substrate. The defected ground structure was used to obtain the dual band, while the step-by-step reduction in the monopole width was used to improve the impedance matching of the antenna. The antenna has an overall compact size of $44{\times}51{\times}1.6mm^3$, which was optimized by varying the size of the monopole and the ground plane such that it may resonate at the 2.4 GHz and 5 GHz bands of the WLAN. The measurement results showed that the antenna operates in the frequency band of 210 MHz(2.29~2.50 GHz) and 900 MHz(5.05~5.95 GHz) for a VSWR under 2, and showed omnidirectional radiation pattern at all desired frequencies.

Fabrication and Electric Properties of Piezoelectric Cantilever Energy Harvesters Driven in 3-3 Vibration Mode (3-3 진동 모드 압전 캔틸레버 에너지 하베스터의 제조 및 전기적 특성)

  • Lee, Min-seon;Kim, Chang Il;Yun, Ji-sun;Park, Woon-ik;Hong, Youn-woo;Paik, Jong-hoo;Cho, Jeong-ho;Park, Yong-ho;Jang, Yong-ho;Choi, Beom-jin;Jeong, Young-hun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.5
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    • pp.263-269
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    • 2017
  • A piezoelectric cantilever energy harvester (PCEH) driven in longitudinal (3-3) vibration mode was fabricated, and its electrical properties were evaluated by varying the resistive load. A commercial PZT piezoelectric ceramic with a high piezoelectric charge constant ($d_{33}$) of 520 pC/N and the interdigitated (IDT) electrode pattern was used to fabricate the PCEH driven in longitudinal vibration. The IDT Ag electrode embedded piezoelectric laminates were co-fired at $850^{\circ}C$ for 2 h. The 3-3 mode PCEH was successfully fabricated by attaching the piezoelectric laminates to a SUS304 elastic substrate. The PCEH exhibited a high output power of 3.8 mW across the resistive load of $100k{\Omega}$ at 100 Hz and 1.5 G. This corresponds to a power density of $10.3mW/cm^3$ and a normalized global power factor of $4.56mW/g^2{\cdot}cm^3$. Given the other PCEH driven in transverse (3-1) vibration mode, the 3-3 mode PCEH could be better for vibration energy harvesting applications.

Fabrication and analysis of $1.3\mum$ spot-size-converter integrated laser diodes (광모드변환기가 집적된 $1.3\mum$ SC-FP-LD 제작 및 특성 해석)

  • 심종인
    • Korean Journal of Optics and Photonics
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    • v.11 no.4
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    • pp.271-278
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    • 2000
  • We have fabricated and analyzed the lasing characteristics of 1.3$\mu\textrm{m}$ Spot-Size-Converter (SSC) integrated Fabry-Perot (FP) laser diodes, which are very promising light sources for optical subscriber networks. SSC-LDs has been developed by BIB (buttjoint-built-in) coupling and selective MOVPE growth. High-performances were achieved such as the slope efficiency from the SSC facet of 0.23-0.32 mW/mA, the full-width at the half maximum of the far-field pattern (FFP) of 9.5$^{\circ}$~12.3$^{\circ}$, the alignment tolerances of $\pm$2.3$\mu\textrm{m}$ and $\pm$2.5$\mu\textrm{m}$ within the extra-coupling loss of 1 dB for the vertical and parallel directions, respectively. These experimental results were compared to theoretical ones in order to clarify the operational problems and give a good design direction of the fabricated SSC-LDs. It was revealed that an asymmetric output power from the facets, an irrelevancy of FFP and the waveguide structure around SSC facet region, and a poor temperature characteristics were originated from the scattering in the BIB and SSC sections and SHB effect in the active section for the first time.t time.

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Thermoelectric Characteristics of the Electroplated Bi-Te Films and Photoresist Process for Fabrication of Micro Thermoelectric Devices (전기도금 공정으로 제조한 Bi-Te 박막의 열전특성 및 미세열전소자 형성용 포토레지스트 공정)

  • Lee, Kwang-Yong;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.2 s.43
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    • pp.9-15
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    • 2007
  • Thermoelectric properties of the electrodeposited Bi-Te films and photoresist process have been investigated to apply for thermoelectric thin film devices. After plating in Bi-Te solutions of 20 mM concentration, which were prepared by dissolving $Bi_2O_3$ and $TeO_2$ into 1M $HNO_3$, thermoelectric properties of the films were characterized with variation of the Te/(Bi+Te) ratio in a plating solution. With increasing the Te/(Bi+Te) ratio in the plating solution from 0.5 to 0.65, Seebeck coefficient of Bi-Te films changed from $-59{\mu}V/K$ to $-48{\mu}V/K$ and electrical resistivity was lowered from $1m{\Omega}-cm$ to $0.8m{\Omega}-cm$ due to the increase in the electron concentration. Maximum power factor of $3.5{\times}10^{-4}W/K^2-m$ was obtained for the Bi-Te film with the $Bi_2Te_3$ stoichiometric composition. Using multilayer overhang process, the photoresist pattern to form thermoelectric legs of 30 m depth and 100m diameter was successfully fabricated fur micro thermoelectric device applications.

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Fabrication of Nanopatterned Oxide Layer on GaAs Substrate by using Block Copolymer and Reactive Ion Etching (블록 공중합체와 반응성 이온식각을 이용한 GaAs 기판상의 나노패터닝된 산화막 형성)

  • Kang, Gil-Bum;Kwon, Soon-Mook;Kim, Seoung-Il;Kim, Yong-Tae;Park, Jung-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.4
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    • pp.29-32
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    • 2009
  • Dense and periodic arrays of nano-sized holes were patterned in oxide thin film on GaAs substrate. To obtain the nano-size patterns, self-assembling diblock copolymer was used to produce thin film of uniformly distributed parallel cylinders of polymethylmethacrylate (PMMA) in polystyrene (PS) matrix. The PMMA cylinders were removed with UV expose and acetic acid rinse to produce PS nanotemplate. By reactive ion etching, pattern of the PS template was transferred to under laid silicon oxide layer. Transferred patterns were reached to the GaAs substrate by controlling the dry etching time. We confirmed the achievement of etching through the removing oxide layer and observation of GaAs substrate surface. Optimized etching time was 90 to 100 sec. Pore sizes of the nanopattern in the silicon oxide layer were 20~22 nm.

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The Fabrication of OTFT-OLED Array Using Ag-paste for Source and Drain Electrode (Ag 페이스트를 소스와 드레인 전극으로 사용한 OTFT-OLED 어레이 제작)

  • Ryu, Gi-Seong;Kim, Young-Bae;Song, Chung-Kun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.5
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    • pp.12-18
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    • 2008
  • Ag paste was employed for source and drain electrode of OTFTs and for the data metal lines of OTFT-OLED array on PC(polycarbonate) substrate. We tested two kinds of Ag-pastes such as pastes for 325 mesh and 500 mesh screen mask to examine the pattern ability and electrical performance for OTFTs. The minimum feature size was 60 ${\mu}m$ for 325 mesh screen mask and 40 ${\mu}m$ for 500 mesh screen mask. The conductivity was 60 $m{\Omega}/\square$ for 325 mesh and 133.1 $m{\Omega}/\square$ for 500 mesh. For the OTFT performance the mobility was 0.35 $cm^2/V{\cdot}sec$ and 0.12 $cm^2/V{\cdot}sec$, threshold voltage was -4.7 V and 0.9 V, respectively, and on/off current ratio was ${\sim}10^5$, for both screen masks. We applied the 500 mash Ag paste to OTFT-OLED array because of its good patterning property. The pixel was composed of two OTFTs and one capacitor and one OLED in the area of $2mm{\times}2mm$. The panel successfully worked in active mode operation even though there were a few bad pixels.

Design and Fabrication of Modified Monopole Antenna for Wireless USB Dongle with WLAN system Applications (WLAN 시스템 적용 가능한 무선 USB 동글용 변형된 모노폴 안테나의 설계 및 제작)

  • Lee, Yeong-Seong;Mun, Seung-Min;Kim, Gi-Rae;Yoon, Joong-Han
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.19 no.10
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    • pp.2223-2231
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    • 2015
  • In this paper, we propose a built-in antenna for wireless USB dongle which has a modified structure from the existing planar monopole antenna. The proposed antenna implemented a dual-band characteristic by inserting Strip1, Strip2, Strip3 into the monopole structure combined with 'n' shape and feeded 50-Ω using coaxial cable. The antenna is designed on an FR-4 substrate of which the dielectric constant is 4.6, and its overall size is 10 mm × 50 mm × 1mm. Based on the measurement results of the return loss, it was confirmed to satisfy the dual band resonance characteristics of 740 MHz (2.3 ~ 2.7 GHz) and 1,200 MHz (5.15 ~ 5.825 GHz) by -10 dB. In addition, we obtain the omni-directional radiation pattern measurements in the operating frequency bands, and the maximum gain of the proposed antenna has 2.26~3.81 dBi in the 2.4 GHz band and 2.21~5.79 dBi. in the 5.5 GHz band, respectively.

The Distribution Characteristics of Floating Debris on the Cruising Routes from Cheju Island to Qindao Harbor in the Yellow Sea (한국 제주도와 중국 청도의 항로상에 부유하는 해양폐기물의 분포에 관한 연구)

  • Kim, Min-Suk;Kim, Jong-Hwa;Kim, Sam-Kon
    • Journal of Fisheries and Marine Sciences Education
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    • v.11 no.2
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    • pp.203-215
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    • 1999
  • Floating debris was recorded from a training ship, Kaya, of Pukyong National University with about 12 knots speed at July 19~21, 1999 and July 24~26. The sampled area is the Yellow Sea (YS) connected from Cheju Is. of Korea to Qindao harbor of China, divided into 88 unit segments on survey routes. Debris fabrication materials were categorized with 6 items using the following; man-made or natural wood items, paper and cardboard, nylon netting and rope, styrofoams, vinyl and plastics, floating metal and glass containers. All identified items within a $120{\pm}20m$ wide band were recorded but ignored if beyond this boundary. The results of distribution of floating debris in the area are as follows: 1. The greatest quantities of marine debris discovered during the survey were $184pieces\;per\;km^2$ near Qindao harbor. The next polluted areas, Sohuksan islands, positioned in the eastern part of YS were scattered in about $40pieces/km^2$ or so. 2. Among items, woods, paper and cardboard, vinyl and plastics were found out near Qindao Coast of China. On the other hand, there were many styrofoams, nylon netting and rope near the area of Sohuksan islands in the eastern part of YS. 3. The distribution densities of western part of YS near Qindao are varied with largely range in items and quantities but those of the eastern part, near Sohuksan islands were nearly constant. 4. Styrofoams were composed of 63% among all debris in YS, next paper and cardboard 15%, and wood item, vinyl and plastics each 10%. Therefore, marine debris of YS is revealed that distribution characteristics and composition are very different in each area. These phenomena are concluded that they largely depend on the life styles in land and the utilities of the sea. And of items, styrofoams is dominated by the distribution pattern of YS. Furthermore, surveys are continuously being investigated, and from this it is hoped that a much wider coverage can be achieved, perhaps all sites of the YS and contributed to the finding sources, the stationary area and removal method of debris joined the flow patterns.

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