Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and Electric Properties of Piezoelectric Cantilever Energy Harvesters Driven in 3-3 Vibration Mode

3-3 진동 모드 압전 캔틸레버 에너지 하베스터의 제조 및 전기적 특성

  • Lee, Min-seon (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Chang Il (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Yun, Ji-sun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Woon-ik (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Hong, Youn-woo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Paik, Jong-hoo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong-ho (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Yong-ho (Department of Material Science and Engineering, Pusan University) ;
  • Jang, Yong-ho (Technology & Research Center, Senbool Corporation) ;
  • Choi, Beom-jin (Technology & Research Center, Senbool Corporation) ;
  • Jeong, Young-hun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology)
  • 이민선 (한국세라믹기술원 전자소재부품센터) ;
  • 김창일 (한국세라믹기술원 전자소재부품센터) ;
  • 윤지선 (한국세라믹기술원 전자소재부품센터) ;
  • 박운익 (한국세라믹기술원 전자소재부품센터) ;
  • 홍연우 (한국세라믹기술원 전자소재부품센터) ;
  • 백종후 (한국세라믹기술원 전자소재부품센터) ;
  • 조정호 (한국세라믹기술원 전자소재부품센터) ;
  • 박용호 (부산대학교 재료공학과) ;
  • 장용호 ((주)센불 기술연구소) ;
  • 최범진 ((주)센불 기술연구소) ;
  • 정영훈 (한국세라믹기술원 전자소재부품센터)
  • Received : 2017.02.20
  • Accepted : 2017.03.16
  • Published : 2017.05.01
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Abstract

A piezoelectric cantilever energy harvester (PCEH) driven in longitudinal (3-3) vibration mode was fabricated, and its electrical properties were evaluated by varying the resistive load. A commercial PZT piezoelectric ceramic with a high piezoelectric charge constant ($d_{33}$) of 520 pC/N and the interdigitated (IDT) electrode pattern was used to fabricate the PCEH driven in longitudinal vibration. The IDT Ag electrode embedded piezoelectric laminates were co-fired at $850^{\circ}C$ for 2 h. The 3-3 mode PCEH was successfully fabricated by attaching the piezoelectric laminates to a SUS304 elastic substrate. The PCEH exhibited a high output power of 3.8 mW across the resistive load of $100k{\Omega}$ at 100 Hz and 1.5 G. This corresponds to a power density of $10.3mW/cm^3$ and a normalized global power factor of $4.56mW/g^2{\cdot}cm^3$. Given the other PCEH driven in transverse (3-1) vibration mode, the 3-3 mode PCEH could be better for vibration energy harvesting applications.

Keywords

References

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