• Korean Journal of Metals and Materials
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• v.49 no.2
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• pp.153-160
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• 2011

The AISI 216L stainless steel with a composition of Fe-16Cr-6Ni-6Mn-1.7Mo (wt.%) was oxidized at $700{\sim}900^{\circ}C$ in air for 100 h. At $700^{\circ}C$, a thin $Mn_{1.5}Cr_{1.5}O_4$ oxide layer with a thickness of $0.4{\mu}m$ formed. At $800^{\circ}C$, an outer thin $Fe_2O_3$ oxide layer and a thick inner $FeCr_2O_4$ oxide layer with a total thickness of $30{\mu}m$ formed. The non-adherent scale formed at $800^{\circ}C$ was susceptible to cracking. At $900^{\circ}C$, an outer thin $Fe_2O_3$ oxide layer and a thick inner $Mn_{1.5}Cr_{1.5}O_4$ oxide layer formed, whose total thickness was $10{\sim}15{\mu}m$. The scales formed at $900^{\circ}C$ were non-adherent and susceptible to cracking. 216 L stainless steel oxidized faster than 316 L stainless steel, owing to the increment of the Mn content and the decrement of Ni content.

• Journal of the Korean institute of surface engineering
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• v.56 no.2
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• pp.115-124
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• 2023

Anodization is an electrochemical process that electrochemically converts a metal surface into an oxide layer, resulting in enhanced corrosion resistance, wear resistance, and improved aesthetic appearance. Local anodization, also known as selective anodization, is a modified process that enables specific regions or patterns on the metal surface to undergo anodization instead of the entire surface. Several methods have been attempted to produce oxide layers via localized anodic oxidation, such as using a mask or pre-patterned substrate. However, these methods are often intricate, time-consuming, and costly. Conversely, the direct writing or patterning approach is a more straightforward and efficient way to fabricate the oxide layers. This review paper intends to enhance our comprehension of local anodization and its potential applications in various fields, including the development of nanotechnologies. The application of anodization is promising in surface engineering, where the anodic oxide layer serves as a protective coating for metals or modifies the surface properties of materials. Furthermore, anodic oxidation can create micro- and nano-scale patterns on metal surfaces. Overall, the development of efficient and cost-effective anodic oxidation methods is essential for the advancement of various industries and technologies.

• Proceedings of the Korean Vacuum Society Conference
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• 2001.02a
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• pp.201-201
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• 2001

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.9
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• pp.729-734
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• 2000

Recently, Very Large Scale Integrated (VLSI) circuit & deep-submicron bulk Complementary Metal Oxide Semiconductor(CMOS) devices require gate electrode materials such as metal-silicide, Titanium-silicide for gate oxides. Many previous authors have researched the improvement sub-micron gate oxide quality. However, few have reported on the electrical quality and reliability on the ultra thin gate oxide. In this paper, at first, I recommand a novel shallow trench isolation structure to suppress the corner metal-oxide semiconductor field-effect transistor(MOSFET) inherent to shallow trench isolation for sub 0.1${\mu}{\textrm}{m}$ gate oxide. Different from using normal LOCOS technology deep-submicron CMOS devices using novel Shallow Trench Isolation(STI) technology have a unique"inverse narrow-channel effects"-when the channel width of the devices is scaled down, their threshold voltage is shrunk instead of increased as for the contribution of the channel edge current to the total channel current as the channel width is reduced. Secondly, Titanium silicide process clarified that fluorine contamination caused by the gate sidewall etching inhibits the silicidation reaction and accelerates agglomeration. To overcome these problems, a novel Two-step Deposited silicide(TDS) process has been developed. The key point of this process is the deposition and subsequent removal of titanium before silicidation. Based on the research, It is found that novel STI structure by the SEM, in addition to thermally stable silicide process was achieved. We also obtained the decrease threshold voltage value of the channel edge. resulting in the better improvement of the narrow channel effect. low sheet resistance and stress, and high threshold voltage. Besides, sheet resistance and stress value, rms(root mean square) by AFM were observed. On the electrical characteristics, low leakage current and trap density at the Si/SiO$_2$were confirmed by the high threshold voltage sub 0.1${\mu}{\textrm}{m}$ gate oxide.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.280.2-280.2
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• 2016

The graphene, a single atomic sheet of graphite, has attracted tremendous interest owing to its novel properties including high intrinsic mobility, optical transparency and flexibility. However, for more diverse application of graphene devices, it is essential to tune its transport behavior by shifting Dirac Point (DP) of graphene. So, in the following context, we suggest a method to tune structural and electronic properties of graphene using atomic layer deposition. By atomic layer deposition of zinc oxide (ZnO) on graphene using 4-mercaptophenol as linker, we can fabricate n-doped graphene. Through ${\pi}-{\pi}$ stacking between chemically inert graphene and 4-mercaptophenol, conformal deposition of ZnO on graphene was enabled. The electron mobility of graphene TFT increased more than 3 times without considerably decreasing the hole mobility, compared to the pristine graphene. Also, it has high air stability. This ZnO doping method by atomic layer deposition can be applicable to large scale array of CVD graphene TFT.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.186-193
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• Korean Journal of Materials Research
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• v.16 no.5
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• pp.336-340
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• 2006

Fluorspar has been essential flux in steelmaking process. The main effects of fluorspar addition are lowering of the viscosity and melting temperature of slag. In recent years, due to the increasing price and environmental problem of fluorspar, various types of fluorspar substitute have been investigated. In this study, iron oxide by-products such as sinter dust, basic oxygen furnace (BOF) sludge and mill scale were developed as a substitute in terms of waste recycling. Several plant trials were carried out by addition of briquetted substitutes of $4{\sim}6$ kg/ton to compare with the fluorspar of $0.7{\sim}1$ kg/ton. The substitutes showed a similar behavior of slag formation, phosphorus removal and MgO saturation content.

• 연구논문집
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• s.30
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• pp.121-128
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• 2000

The failed tube received for this study has been used for approximately 10 year at $330^{\circ}C$ in a steam production boiler tube was fractured in the transversed direction to tube length, and fracture mode was typically intergranulas type without the plastic deformation. The fracture surface was covered by the oxide scale formed from the intermal high pressure steam at high temperature. The microstructure was not nearly thermal-degraded during the service. From this result, we can conclude that the oxide film was proferentialy formed into the grainboundary and this grainboundary oxide film was brittle-fractured by the thermal stress in the longitudinal direction to the tube brittle intergranular fracture mode.

• Journal of the Korean institute of surface engineering
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• v.31 no.2
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• pp.101-108
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• 1998

The effect of oxidation-reduction heating conditions on coating adherence of hot-dip galvanized steel containing silicon has beeninvestigated. The presence of a stbke sillicon oxide formed on the steel surface has been shown to be very detrimenal to proper wetting by liquid zinc. When the steel has more than the critical sillicon content neeled to from a stable external oxide, the use of oxidation-reduction method has been found successful in obtaining a good quality, coated product with excellence adhreence. This can be explained by the formation of an iron oxide. The iron oxrtion of the scale is reduced, leaving the stable oxides dispersed in a fresh metallic iron surface layer. This reduced iron surface is easily wetted by the liquid zinc and excellent adherence is obtained.

• Journal of Environmental Science International
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• v.16 no.6
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• pp.745-750
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• 2007

Large scale of loess has been applied on the south - sea shore of the Korean peninsula to treat red tides, due to many fishery's devastation by red tides every year. However, coastal ecosystem is ruined by the huge amount of loess applied every year. Almost all creatures, living under water such as sea weeds, clams, and fishes, where loess was applied, are disappearing. In this paper, alternative methods of the loess application are investigated. The amount of loess could be reduced by the alternative methods, Especially, loess mixed with calcium oxide has excellent effects to reduce Cochlodinium polykrikoides numbers. It was found that when loess is used with calcium oxide(CaO), removal efficiency of red tides is highly increased. Moreover, the amount of loess could be reduced dramatically.