• 한국광학회:학술대회논문집
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• 한국광학회 1999년도 제16회 광학 및 양자전자 학술발표회Proceedings of 16th Optics and Quantum Electronics Conference, 1999
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• pp.156-157
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• 1999

• 한국광학회:학술대회논문집
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• 한국광학회 2002년도 제13회 정기총회 및 2002년도 동계학술발표회
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• pp.202-203
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• 2002

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.242-243
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• 2015

Fault detection using optical emission spectra with modified K-means cluster analysis and principal component anal ysis are demonstrated for inductive coupl ed pl asma cl eaning processes. The optical emission spectra from optical emission spectroscopy (OES) are used for measurement. Furthermore, Principal component analysis and K-means cluster analysis algorithm is modified and applied to real-time detection and sensitivity enhancement for fluorocarbon cleaning processes. The proposed techniques show clear improvement of sensitivity and significant noise reduction when they are compared with single wavelength signals measured by OES. These techniques are expected to be applied to various plasma monitoring applications including fault detections as well as chamber cleaning endpoint detection.

• Current Optics and Photonics
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• 제3권3호
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• pp.199-203
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• 2019

The characteristics of a photonic crystal fiber sensor with reuleaux triangle are studied by using the finite element method. The wavelength sensitivity of the designed optical fiber sensor is related to the arc radius of the reuleaux triangle. Whether the core area is solid or liquid as well as the refractive index of the liquid core contributes to wavelength sensitivity. The simulation results show that larger arc radius leads to higher sensitivity. The sensitivity can be improved by introducing a liquid core, and higher wavelength sensitivity can be achieved with a lower refractive index liquid core. In addition, the specific channel plated with gold film is polished and then analyte is deposited on the film surface, in which case the position of the resonance peak is the same as that of the complete photonic crystal fiber with three analyte channels being filled with analyte. This means that filling process becomes convenient with equivalent performance of designed sensor. The maximum wavelength sensitivity of the sensor is 10200 nm/RIU and the resolution is $9.8{\times}10^{-6}RIU$.

• 한국전기전자재료학회논문지
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• 제19권3호
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• pp.267-272
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• 2006

Optical waveguide based on symmetric and asymmetric Mach-Zehnder interferometer(MZI) type was designed, fabricated and measured the optical characteristics for the application of biosensor. The wavelength of the input optical signal for the device was 1550 nm. And the difference of refractive index was $0.45\;{\Delta}\%$ between core and cladding of the device. The TM(Transverse Magnetic) mode optical properties of the biosensor were analyzed with the refractive index variation of gold thin film deposited for overclad. Nowadays, nano-photonic crystal structures have been paied much attention for its high optical sensitivity. There is a technique to realize the structure, which is called Dip-Pen Nanolithography(DPN) process. The process requires a nano-scale process patterning resolution and high reliability. In this paper, two dimensional nano-photonic crystal array on the surface was proposed for improving the sensitivity of optical biosensor. And the Dip-Pen Nanolithogrphy process was investigated to realize it.

• 한국광학회:학술대회논문집
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• 한국광학회 2005년도 제16회 정기총회 및 동계학술발표회
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• pp.32-33
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• 2005

• Journal of the Optical Society of Korea
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• 제18권2호
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• pp.124-128
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• 2014

We derive joint probability density functions (JPDFs) for two adjacent data from direct-detection optical receivers in dense wavelength-division multiplexing systems. We show that the decision using two data per bit can increase the receiver sensitivity compared with the conventional decision. Our JPDFs can be used for software-defined optical receivers enhancing the receiver sensitivities for intensity-modulated channels.

• 한국정보통신학회논문지
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• 제10권3호
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• pp.579-585
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• 2006

본 논문에서는 스펙트럼 분할된 WDM시스템의 성능해석시, 광전치 증폭기를 사용하여 일반적인 핀(PIN) 다이오드를 채용한 수신기를 통해 얻을 수 있는 수신감도를 개선하는 방법에 대해 해석하였다. 또한 온-오프키잉(OOK: On Off Keying)과 주파수 천이키잉(FSK: Frequency Shift Keying) 전송을 이용하여 표준에러 확률을 유지하기 위해 필요로 하는 비트당 광자의 수를 계산한 후 수신기에서 광신호와 전기신호의 다양한 대역폭 비가 변화하는 경우에 대하여 위의 값을 다시 도출함으로써 수신감도를 해석하였다.

• 한국광학회지
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• 제24권2호
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• pp.86-91
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• 2013

본 논문에서는 근접장-분자반응 간의 중첩을 이용한 표면 플라스몬 공명 (SPR) 바이오센서의 측정감도 평가방법을 연구하였다. 전달행렬 방법을 사용하여 다양한 형태의 중첩적분으로 정의된 광학자취 값을 계산하였고, 샌드위치 및 역샌드위치 면역글로뷸린 (IgG) 어세이에 대해서 실험적으로 측정된 수치와 비교하였다. 이론 및 실험적인 결과와의 비교를 통하여 접선 방향의 전기장을 사용한 광학자취의 경우 그 연속성으로 말미암아 가장 높은 상관계수를 얻을 수 있었으며 이때 광학자취와 측정감도 사이에 97% 이상의 높은 상관계수가 존재함을 보았다. 이러한 상관관계는 SPR 바이오센서의 측정 감도에 관한 메커니즘을 분명하게 설명하며, 분자 스케일 감도를 가지는 SPR 바이오센서 개발에 기여하게 될 것이다.

• Transactions on Electrical and Electronic Materials
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• 제9권4호
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• pp.163-168
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• 2008

Photonic crystal structures have been received considerable attention due to their high optical sensitivity. One of the techniques to construct their structure is the dip-pen lithography (DPN) process, which requires a nano-scale resolution and high reliability. In this paper, we propose a two dimensional photonic crystal array to improve the sensitivity of optical biosensor and DPN process to realize it. As a result of DPN patterning test, we have observed that the diffusion coefficient of the mercaptohexadecanoic acid (MHA) molecule ink in octanol is much larger than that in acetonitrile. In addition, we have designed and fabricated optical waveguides based on the mach-zehnder interferometer (MZI) for application to biosensors. The waveguides were optimized at a wavelength of 1550 nm and fabricated according to the design rule of 0.45 delta%, which is the difference of refractive index between the core and clad. The MZI optical waveguides were measured of the optical characteristics for the application of biosensor.