• 한국결정성장학회지
• /
• 제4권2호
• /
• pp.134-138
• /
• 1994

표면탄성파 소자응요을 위하여 완전용융조성, 48.65 mole % $Li_2O에서 LiTaO_3(LT)$ 단결정(Y, X-axis)을 육성하였다. 육성된 $LiTaO_3(LT)$ 단결정의 SAW 소자성능을 확인하기 위하여 photolithography를 거쳐 기본적인 SAW filter를 제작하였다. Yamaju LT Y-cut 단결정 기판과 본 연구에서 제작된 RIST LT Y-cut 단결정 기판에서의 SAW특성결과를 비교하여 성능을 결정하였다. Yamaju LT 기판에서보다 본 연구에서 육성된 LT 단결정 기판에서 우수한 SAW 성능을 보였다.

• 한국윤활학회:학술대회논문집
• /
• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
• /
• pp.181-182
• /
• 2002

Most recent, Plasma ceramic spray is used on parts of tribosystem, has been investigated on the tribological performance. The application of ceramic coatings by plasma spray has become essential in tribosystems to produce better wear resistance and longer life in various conditions. The purpose of this work was to investigate the wear behavior of $8%Y_2O_3-ZrO_2$ coating due to temperatures of post-spay heat treatment. The plasma-sprayed $8%Y_2O_3--Zirconia$ coating was idiscussed to know the relationship between phase transformations and temperatures of post- spray heat treatment. Wear tests was carried out with ball on disk type on normal load of 50N, 70N and 90N under room temperature. The transformation of phase and the value of residual stress were measured by X-ray diffraction method(XRD). Tribological characteristics and wear mechanisms of coatings was observed by SEM. The tribologieal wear performance was discussed a point of view for residual stress. Consequently. post-spray heat treatment plays an important role in decreasing residual stress. Residual stress in coating system has a significant influence on the wear mechanism of coating.

• 센서학회지
• /
• 제20권5호
• /
• pp.305-310
• /
• 2011

This study focuses on the fabrication of $TiO_2$ nanosheets and their gas sensor application. A simple sonochemical method is employed to fabricate the $TiO_2$ nanosheets. The obtained samples were investigated by transmission electron microscope(TEM) and X-ray Diffraction(XRD). The $TiO_2$ nanosheets were coated on substrates by a dropping method followed by heat treatment. The sensor responses to volatile organic compounds(VOCs) such as toluene, benzene, ethanol and acetaldehyde were studied. It was found that the $TiO_2$ nanosheets sensors are able to detect ppb-levels of VOC gases.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.380-381
• /
• 2006

Chemical mechanical polishing (CMP) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, the cost of ownership and cost of consumables are relatively high because of expensive slurry. In this paper, we studied the mixed abrasive slurry (MAS). In order to save the costs of slurry, the original silica slurry was diluted by de-ionized water (DIW). And then, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added in the diluted slurry in order to promote the mechanical force of diluted slurry. We have also investigate the possibility of mixed abrasive slurry for the oxide CMP application.

• 한국전기전자재료학회논문지
• /
• 제17권12호
• /
• pp.1296-1300
• /
• 2004

SnO$_2$ is one of the most suitable gas sensor materials. The microstructure and surface morphology of films must be controlled because the electrical and optical properties of SnO$_2$ films depend on these characteristics. The effects of chemical mechanical polishing(CMP) on the variation of morphology of SnO$_2$ films prepared by RF sputtering system were investigated. The commercially developed ceria-based oxide slurry, silica-based oxide slurry, and alumina-based tungsten slurry were used as CMP slurry. Non-uniformities of all slurries met stability standards of less than 5 %. Silica slurry had the highest removal rate among three different slurries, sufficient thin film topographies and suitable root mean square(RMS) values.

• 한국수소및신에너지학회논문집
• /
• 제30권3호
• /
• pp.209-219
• /
• 2019

Methanol is a liquid fuel which could also be produced from renewable energy sources and has appreciably high energy density. In this work, we investigated the application of $Ce_{0.9}Gd_{0.1}O_{2-x}$ supported Cu and Ni catalysts for hydrogen production via methanol steam reforming. Catalysts were synthesized by solution combustion synthesis. The prepared catalysts with various active materials and Cu loading amounts were tested in a reactor at $200-300^{\circ}C$, 0-5 barg range and steam to methanol molar ratio was 1.5. The catalytic properties of Cu and Ni were compared, and the catalytic performance was shown to depend on the amounts of metal loading and operating conditions such as reaction temperature and pressure.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
• /
• pp.151-154
• /
• 2003

AlN/Al/SiO$_2$/Si thin films for application to FBAR(Film Bulk Acoustic Resonator) devices were prepared by FTS(Facing Targets sputtering system) apparatus which provides a stable discharge at low gas pressures and can deposit high quality thin films because of the substrate located apart from the plasma. The AlN thin films were deposited on a $SiO_2(1{\mu}m)/Si(100)$ substrate using an Al bottom electrode. The process parameters were fixed such as sputering power of 200W, working pressures of 1mTorr and AlN thin film thickness of 800nm, respectively and crytallographic characteristics of AlN thin films were investigated as a function of $N_2$ gas flow rate$[N_2/(N_2+Ar)]$. Thickness of AlN thin films were measured by $\alpha$-step, the crystallographic characteristics and c-axis preferred orientation were evaluated by XRD.

• 공업화학
• /
• 제23권1호
• /
• pp.105-111
• /
• 2012

본 연구에서는 저온에서 질소산화물 저감효율이 뛰어난 것으로 알려진 망간전구체의 종류에 따른 영향을 고찰하기 위해 초임계수열법으로 합성한 세리아($CeO_2$)와 지르코니아($ZrO_2$)를 담체로 하여 저온 SCR 공정에서의 온도에 따른 활성변화를 비교 분석하였다. Manganese acetate (MA)와 Manganese nitrate (MN), 두 종류 망간전구체의 농도를 영향인자로 고려하여 촉매의 활성변화를 고찰하였다. 활성화된 시료의 특성은 $N_2$ adsorption-desorption, TGA, XRD, XPS를 통해 분석하였고 질소산화물 저감효율을 측정하기 위해 NOx 분석기를 이용하여 De-NOx 실험을 수행하였다. 제조방법에 따라 합성한 촉매의 질소산화물 저감 효율을 분석한 결과 Manganese acetate (MA)를 활성물질로 사용한 촉매가 Manganese nitrate (MN)을 사용한 촉매에 비해 전체적인 온도 영역에서 우수한 질소산화물 저감효율을 보였다. 이는 특성분석 결과를 통해 알 수 있듯이 Manganese acetate (MA)의 주성분인 $Mn_2O_3$가 Manganese nitrate (MN)의 주성분인 $MnO_2$에 비해 높은 산소 이동도를 갖고 담체와의 강한 상호작용을 형성하는 것에 기인한 것으로 보인다.

• 한국전기전자재료학회논문지
• /
• 제22권7호
• /
• pp.567-571
• /
• 2009

Polycrystalline ZnO and Ga doped ZnO (GZO) films are deposited on glass substrate by RF magnetron sputtering at room temperature. The characteristics of ZnO and GZO films are investigated with X-ray diffraction measurement, UV-VIS-NIR spectrophotometer $(250{\sim}1200nm)$ and hall measurement. The post-growth thermal treatment of these films is carried out in N2 ambient at $500^{\circ}C$ for 30 min and an hour. ZnO and GZO films have different changing behavior of structural and optical properties by annealing. To use transparent conductive films for solar cell, films should have not only high transmittance but also good electrical property. Although as deposited GZO films have electrical properties than ZnO films, GZO films have not good transmittance properties. Consequently, we succeed that the high transmittance of GZO films is improved by annealing process.

• 한국작물학회지
• /
• 제13권
• /
• pp.107-118
• /
• 1973

완효성 비료로서 METAP이 수도의 생육 수량 및 그 구성요소에 미치는 영향을 검토하고 그 효과를 단비와 비교하고자 농촌진흥청산하 3개작물시험장과 7개 농촌진흥원에서 동일한 설계하에서 일련의 시험을 실시하였다. METAP의 효과는 토양의 물리, 화학적 성질, 시용시기, 기상조건, 품종 및 재배법에 따라서도 다른 것 같으며 각 시험장에서 얻은 결과를 요약하면 다음과 같다. 1. 사질토에서 METAP의 시용은 수수를 증가시켜 수량이 증가하였으며 분시가 전량기비시용보다 효과가 좋았다. 그러나 해성토, 배수불량한 토양 및 비옥한 토양에서는 단비시용과 차이가 없었다. 2. 등숙에 요하는 온도가 높고, 조식에서 다수성인 품종(통일)을 비식하고 출수전후에 일조가 부족하고 온도가 낮으면 METAP시용이 등숙률 향상이나 1,000 입중을 증가시키지 못한다.