• IE interfaces
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• v.21 no.2
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• pp.141-150
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• 2008

In this paper, an efficient control method for semiconductor fabrication process is presented. Generally, control is performed with data which is under the influence of process disturbance. EWMA is one of the most popular control methods in semiconductor fabrication that effectively deals with varying process condition. A new method using EWMA, called the Dual Damping EWMA, is presented in this study to reduce over-control by separating weight factor of input and output. The goal is to reflect Drift but reduce the effects of White noise in run to run control. Simulation is performed to evaluate the performance of DPEWMA and to compare with EWMA and Double EWMA.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.566-572
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• 2000

The System identification is the process of developing or improving a mathematical model of a physical system using experimental data of the input, output and noise relationship. The field of system identification has been an important discipline within the automatic control area. The reason is the requirement that mathematical models having a specified accuracy must be used to apply modem control methods. In this paper, it is confirmed that we can obtain transfer function of flexible beam that is expressed in the forms of identified state-space system matrix A, B, C, D and identified observer gain G using Eigensystem Realization Algorithm including singular value decomposition. And these matrices can be applied to the automatic control. In addition to, it is also confirmed that transfer function can express a system using identified observer gain G, in spite of a noisy data or a periodic disturbance.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.564-569
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• 2000

Model Based Compensator(MBC) is recently used for the analysis of multi-variable control in frequency domain. Target loop is designed by the demanding requirements such as cross-over frequency, disturbance rejection in low frequency domain, zero steady-state error, identification of maximum and minimum singular values and sensor noise rejection in high frequency domain. Loop transfer recovery will be continued in frequency domain until the plant with MBC comes close to the target loop. In this study, the technique using MBC is applied to the elevator vibration control system. It is found that this technique is very effective to control the vibration system.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1602-1607
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• 2003

Vibration causes noise and sometimes makes structure unstable. Especially, due to the efforts of lightening, deformation of flexible structure is increased in its shape. Just a little disturbance can cause vibration and low damping ratio makes residual vibration last long time. This research is concerned with the model reference neuro-controller design for the vibration suppression of smart structures. By using a model reference neurocontroller, which is one of the algorithms of adaptive control, we performed an adaptive control of flexible cantilever plate and opened box structure with piezoelectric materials. The proposed adaptive vibration control algorithm, a model reference neuro-controller, was proved in its effectiveness by applying to an opened box structure. The model reference neuro-controller is implemented with DSP, and the real-time adaptive vibration control experiment results confirm that the model reference neuro-controller is reliable.

• Proceedings of the KIPE Conference
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• 2002.07a
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• pp.285-288
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• 2002

This paper presents external load disturbance compensation that used to deadbeat load torque observer and regulation of the compensation gain by parameter estimator As a result, the response of PMSM follows that of the nominal plant. The load torque compensation method is compose of a deadbeat observer To reduce of the noise effect, the post-filter, which is implemented by MA process, is adopted. The parameter compensator with RLSM(recursive least square method) parameter estimator is suggested to increase the performance of the load torque observer and main controller The proposed estimator is combined with a high performance load torque observer to resolve the problems. As a result, the proposed control system becomes a robust and precise system against the load torque and the parameter variation. A stability and usefulness, through the verified computer simulation, are shown in this paper.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.50 no.8
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• pp.367-375
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• 2001

In Underwater Flight Vehicle depth control system, the followings must be required. First, it needs robust performance which can get over modeling error, parameter variation and disturbance. Second, it needs accurate performance which have small overshoot phenomenon and steady state error to avoid colliding with ground surface or obstacles. Third, it needs continuous control input to reduce the acoustic noise and propulsion energy consumption. Finally, it needs interpolation method which can sole the speed dependency problem of controller parameters. To solve these problems, we propose a depth control method using Fuzzy Sliding Mode Controller with feedforward control-plane bias term and Neural Network Interpolator. Simulation results show the proposed method has robust and accurate control performance by the continuous control input and has no speed dependency problem.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.49 no.10
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• pp.555-562
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• 2000

We propose an adaptive nonlinear control algorithm for compensation of the stick-slip friction in a dynamic system. The friction force and mass of the system are estimated and compensated by adaptive control law. Especially, as the nonlinear control input in a small tracking error zone is enlarged by the nonlinear function, the steady state error is significantly reduced. The proposed algorithm is a direct adaptive control method based on the Laypunov stability theory, and its convergence is guaranteed under the bounded noise or torque disturbance. We verified the performance of the proposed algorithm by computer simulation on one-DOF mechanical system with friction.

• Journal of KSNVE
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• v.3 no.4
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• pp.373-382
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• 1993

Active micro-vibration control of a structure, which simulates a stepper device, is performed using a pair of piezolectric actuators. The control aims at reducing the translational and rotational vibrations of the upper plate when the base is subject to seismic disturbance and the upper plate undergoes impulsive transient motion. Using the experimentally determined model, derivative control scheme is adopted so that the damping of the closed-loop system is effectively increased. It is found that the predicted control performance is in good agreement with the experimental results. Finally, the limit cycle phenomenon due to the controller voltage saturation is compared with the simulation.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.29 no.9C
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• pp.1252-1257
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• 2004

This paper presents a decentralized LQ-PID controller for the TITO system which satisfies the performance of good command following, disturbance rejection, and sensor noise reduction that is design specifications in the frequency domain The procedure is developed by establishing the relationship between the closed-loop state equations including the decentralized PID tuning parameters and the closed-loop state equations of LQR and by selecting the weighting factors Q and R of the cost function in order to satisfy the design specifications in the frequency domain.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.50 no.1
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• pp.15-22
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• 2001

In this paper, a VSC(Voltage Sag Corrector) is discussed for the purpose of power quality enhancement. A fast detecting technique of voltage sag is accomplished through the detection of instantaneous value on synchronous reference frame. A robust characteristic against the noise is available by inserting the first order low pass filter in the detection circuit. The formula and the filter design process is described properly with the mathematical equations. Because the VSC system supply the active power to load, it is required to design the proper size of the energy storage system, In this paper, the capacitor bank is used as an energy storage system, and the size of the capacitor is designed from the point of view of input/output energy as the output power rating and the amplitude and duration time of the voltage sag. The simulation is accomplished by PSCAD/EMTDC.